公开(公告)号：US08210662B2

公开(公告)日：2012-07-03

申请号：US12576994

申请日：2009-10-09

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Koichi Morozumi ,  Jiro Kato

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Koichi Morozumi ,  Jiro Kato

IPC分类号： B41J2/45

CPC分类号： B41J2/14233 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2002/14241

摘要： A liquid-ejecting head including a pressure-generating chamber communicating with an nozzle, and a piezoelectric element having a first electrode, a piezoelectric layer arranged above the first electrode, and a second electrode arranged above the piezoelectric layer. An internal electric field in the piezoelectric layer is biased toward the first electrode or the second electrode and no voltage is applied to the first electrode or the second electrode.

摘要翻译： 包括与喷嘴连通的压力产生室的液体喷射头以及具有第一电极，布置在第一电极上方的压电层和布置在压电层上方的第二电极的压电元件。 压电层内的内部电场朝向第一电极或第二电极偏置，也不向第一电极或第二电极施加电压。

公开(公告)号：US08752938B2

公开(公告)日：2014-06-17

申请号：US12974800

申请日：2010-12-21

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai ,  Toshihiro Shimizu

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai ,  Toshihiro Shimizu

IPC分类号： B41J2/045

CPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid ejecting head includes a flow channel forming substrate having pressure generation chambers communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chambers, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer, the first electrode includes a taper section of which a width is gradually decreased toward the boundary from the active section side.

摘要翻译： 液体喷射头包括具有压力产生室的流路形成基板，该压力产生室与喷嘴开口连通并且沿着横向方向平行布置。 压电元件设置在对应于压力产生室的流道形成基板的一个表面上，并且具有第一电极，设置在第一电极上的压电层和设置在压电层上的第二电极。 在与压力产生室的排列方向相交的方向上，在作为实质的驱动部分的有效部分和不是压电层的实质驱动部分的非活动部分之间的边界中，第一电极包括锥形部分 宽度从有效部分侧朝向边界逐渐减小。

公开(公告)号：US08534802B2

公开(公告)日：2013-09-17

申请号：US12562306

申请日：2009-09-18

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Koichi Morozumi ,  Jiro Kato

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Koichi Morozumi ,  Jiro Kato

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/055 ,  B41J2002/14241 ,  B41J2002/1425 ,  B41J2002/14266 ,  B41J2002/14419 ,  H01L41/0973

摘要： A liquid ejecting head including a fluid channel forming substrate including a pressure generating chamber communicating with a nozzle opening that ejects a liquid droplet and a piezoelectric element. The piezoelectric element has a first electrode, a piezoelectric material layer that is provided on the first electrode and has a perovskite monoclinic structure, and a second electrode formed on the piezoelectric material layer opposite to the first electrode. An angle formed between a direction of an electric field generated between the first and second electrodes and an orientation of a polarization moment of the piezoelectric material layer is greater than an angle formed between the direction of the electric field at a time when the piezoelectric constant of the piezoelectric material layer reaches a maximum level and the orientation of the polarization moment.

摘要翻译： 一种液体喷射头，包括：流体通道形成基板，包括与喷射液滴的喷嘴开口连通的压力产生室和压电元件。 压电元件具有第一电极，设置在第一电极上并具有钙钛矿单斜晶体结构的压电材料层，和形成在与第一电极相对的压电体层上的第二电极。 在第一和第二电极之间产生的电场的方向与压电材料层的极化力矩的方向之间形成的角度大于在压电材料层的压电常数 压电材料层达到最大水平和极化力矩的方向。

公开(公告)号：US08449084B2

公开(公告)日：2013-05-28

申请号：US13004823

申请日：2011-01-11

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/055 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2002/14241 ,  B41J2002/14419

摘要： A liquid ejection head comprising a flow-channel-containing substrate having pressure generating chambers communicating a nozzle opening and a piezoelectric element including a first electrode, a piezoelectric layer formed above the first electrode, and a second electrode formed above the piezoelectric layer. The piezoelectric layer includes an active portion which is substantially driven, a non-active portion which is not substantially driven, and a low dielectric material layer which has a dielectric constant lower than that of a center portion of the active portion and which is in the active portion side of the boundary between the active portion and the non-active portion.

摘要翻译： 一种液体喷射头，其特征在于，具备含有流路的基板，具有连通喷嘴开口的压力产生室和包括第一电极的压电元件，形成在第一电极上方的压电层，以及形成在压电层上方的第二电极。 压电层包括基本驱动的有源部分，基本上不被驱动的非有效部分和介电常数低于有源部分的中心部分的介电常数低的介质材料层， 在活动部分和非活动部分之间的边界的有效部分侧。

公开(公告)号：US08636341B2

公开(公告)日：2014-01-28

申请号：US12974851

申请日：2010-12-21

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Toshihiro Shimizu

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Toshihiro Shimizu

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/055 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid ejecting head includes a flow channel forming substrate having a pressure generation chamber communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chamber, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer of the first electrode, an opening group is provided including at least one opening in the active section and the inactive section.

摘要翻译： 液体喷射头包括具有与喷嘴开口连通并沿着横向平行设置的压力产生室的流路形成基板。 压电元件设置在对应于压力产生室的流道形成基板的一个表面上，并且具有第一电极，设置在第一电极上的压电层和设置在压电层上的第二电极。 在与压力产生室的排列方向相交的方向上，在作为实质的驱动部分的有效部分和不是第一电极的压电层的实质驱动部分的非活动部分之间的边界中，开口组是 提供在活动部分和非活动部分中包括至少一个开口。

公开(公告)号：US20110169896A1

公开(公告)日：2011-07-14

申请号：US13004823

申请日：2011-01-11

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/055 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2002/14241 ,  B41J2002/14419

摘要： A liquid ejection head comprising a flow-channel-containing substrate having pressure generating chambers communicating a nozzle opening and a piezoelectric element including a first electrode, a piezoelectric layer formed above the first electrode, and a second electrode formed above the piezoelectric layer. The piezoelectric layer includes an active portion which is substantially driven, a non-active portion which is not substantially driven, and a low dielectric material layer which has a dielectric constant lower than that of a center portion of the active portion and which is in the active portion side of the boundary between the active portion and the non-active portion.

摘要翻译： 一种液体喷射头，其特征在于，具备含有流路的基板，具有连通喷嘴开口的压力产生室和包括第一电极的压电元件，形成在第一电极上方的压电层，以及形成在压电层上方的第二电极。 压电层包括基本驱动的有源部分，基本上不被驱动的非有效部分和介电常数低于有源部分的中心部分的介电常数低的介质材料层， 在活动部分和非活动部分之间的边界的有效部分侧。

公开(公告)号：US08080924B2

公开(公告)日：2011-12-20

申请号：US12573654

申请日：2009-10-05

申请人： Hiromu Miyazawa ,  Jiro Kato

发明人： Hiromu Miyazawa ,  Jiro Kato

IPC分类号： H01L41/00 ,  H02N2/00

CPC分类号： H01L41/18 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/1876

摘要： A liquid ejecting head including a pressure-generating chamber which communicates with a nozzle opening, and a piezoelectric element including a first electrode, a piezoelectric layer formed above the first electrode and having a perovskite structure represented by the general formula ABO3, and a second electrode formed above the piezoelectric layer, wherein the piezoelectric layer, lead, zirconium, and titanium are present at A sites of the perovskite structure, and lead, zirconium, and titanium are present at B sites of the perovskite structure.

摘要翻译： 一种液体喷射头，包括与喷嘴开口连通的压力产生室，以及包括第一电极的压电元件，形成在第一电极上方并具有由通式ABO3表示的钙钛矿结构的压电层，以及第二电极 形成在压电层的上方，其中压电层，铅，锆和钛存在于钙钛矿结构的A位，铅，锆和钛存在于钙钛矿结构的B位。

公开(公告)号：US08461747B2

公开(公告)日：2013-06-11

申请号：US13301950

申请日：2011-11-22

申请人： Hiromu Miyazawa ,  Jiro Kato

发明人： Hiromu Miyazawa ,  Jiro Kato

IPC分类号： H01L41/00 ,  B41J2/07

CPC分类号： H01L41/18 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/1876

摘要： A liquid ejecting head including a pressure-generating chamber which communicates with a nozzle opening, and a piezoelectric element including a first electrode, a piezoelectric layer formed above the first electrode and having a perovskite structure represented by the general formula ABO3, and a second electrode formed above the piezoelectric layer, wherein the piezoelectric layer, lead, zirconium, and titanium are present at A sites of the perovskite structure, and lead, zirconium, and titanium are present at B sites of the perovskite structure.

摘要翻译： 一种液体喷射头，包括与喷嘴开口连通的压力产生室，以及包括第一电极的压电元件，形成在第一电极上方并具有由通式ABO3表示的钙钛矿结构的压电层，以及第二电极 形成在压电层的上方，其中压电层，铅，锆和钛存在于钙钛矿结构的A位，铅，锆和钛存在于钙钛矿结构的B位。

公开(公告)号：US08819903B2

公开(公告)日：2014-09-02

申请号：US13197464

申请日：2011-08-03

申请人： Toshihiro Shimizu ,  Jiro Kato ,  Eiju Hirai ,  Hiroshi Ito

发明人： Toshihiro Shimizu ,  Jiro Kato ,  Eiju Hirai ,  Hiroshi Ito

IPC分类号： H04R17/00 ,  H01L41/29 ,  B41J2/16 ,  H01L41/314 ,  B41J2/14

CPC分类号： H01L41/29 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/14491 ,  H01L41/314 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49401

摘要： A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second conductive layer upon the piezoelectric layer; forming a third conductive layer upon the second conductive layer; forming a first portion, a second portion, and an opening portion provided between the first portion and the second portion by patterning the third conductive layer; forming a resist layer that covers the opening portion and covers the edges of the first portion and the second portion that face the opening portion side; and forming a first conductive portion and a second conductive portion configured from the first portion and the second portion, and forming a third conductive portion configured from the second conductive layer, by dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask.

摘要翻译： 压电元件的制造方法包括：在基板上形成第一导电层; 在所述第一导电层上形成压电层; 在所述压电层上形成第二导电层; 在所述第二导电层上形成第三导电层; 通过对第三导电层进行构图而形成第一部分，第二部分和设置在第一部分和第二部分之间的开口部分; 形成覆盖所述开口部并且覆盖所述第一部分和面向所述开口部侧的所述第二部分的边缘的抗蚀剂层; 以及形成由所述第一部分和所述第二部分构成的第一导电部分和第二导电部分，以及通过使用所述第一部分干蚀刻所述第二导电层，形成由所述第二导电层构成的第三导电部分，所述第二部分 ，抗蚀剂层作为掩模。

公开(公告)号：US08721055B2

公开(公告)日：2014-05-13

申请号：US13094490

申请日：2011-04-26

申请人： Toshihiro Shimizu ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai

发明人： Toshihiro Shimizu ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/045 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  H01L27/20 ,  H01L41/047 ,  H01L41/0475 ,  H01L41/0477 ,  H01L41/0973

摘要： There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.

摘要翻译： 提供了一种压电装置，其包括第一电极，形成在第一电极上方的压电层，形成在压电层上方的第二电极和形成在由钨或钛构成的第二电极上方的涂层。