公开(公告)号：US5442183A

公开(公告)日：1995-08-15

申请号：US137965

申请日：1993-10-19

申请人： Hironobu Matsui ,  Mikio Ichihashi ,  Shinjiroo Ueda ,  Tadashi Otaka ,  Kazue Takahashi ,  Toshiaki Kobari ,  Kenji Odaka

发明人： Hironobu Matsui ,  Mikio Ichihashi ,  Shinjiroo Ueda ,  Tadashi Otaka ,  Kazue Takahashi ,  Toshiaki Kobari ,  Kenji Odaka

IPC分类号： G01Q30/02 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/18 ,  H01J37/12 ,  H01J37/28 ,  H01J49/06 ,  H01J37/256

CPC分类号： H01J37/28 ,  H01J37/12 ,  H01J2237/18

摘要： A charged particle beam apparatus includes a charged particle beam generating system for causing a charged particle source to generate a charged particle beam. A focusing system focuses the charged particle beam onto a sample. A deflecting system causes the focused charged particle beam to scan the surface of the sample. An evacuating system evacuates a space through which the charged particle beam passes. A detector detects information obtained by irradiating the charged particle beam onto the sample. An image display system displays as an image the status of distribution of the information over the sample surface based on a detection signal forwarded from the detector. The focusing system is entirely constituted by an electrostatic lens containing a plurality of lens electrodes, one of the lens electrodes being a final electrode located closest to the sample. All of the lens electrodes except for the final electrode are supplied with positive voltages as opposed to a negative voltage to the final electrode when the charged particle beam is negatively charged (e.g., electron beam). All of the lens electrodes except for the final electrode are supplied with negative voltages as opposed to a positive voltage to the final electrode when the charged electron beam is positively charged (e.g., positive ion beam). The deflecting system is so constructed as to deflect the charged particle beam within the inner space of the plurality of lens electrodes excluding the final electrode.

摘要翻译： 带电粒子束装置包括带电粒子束产生系统，用于使带电粒子源产生带电粒子束。 聚焦系统将带电粒子束聚焦到样品上。 偏转系统使聚焦的带电粒子束扫描样品的表面。 抽空系统排空带电粒子束通过的空间。 检测器检测通过将带电粒子束照射到样品上而获得的信息。 图像显示系统基于从检测器转发的检测信号，将样品表面上的信息的分布状态显示为图像。 聚焦系统完全由包含多个透镜电极的静电透镜构成，其中一个透镜电极是最靠近样品的最终电极。 当带电粒子束带负电（例如电子束）时，除了最终电极之外的所有透镜电极都被提供与正电压相对的最终电极的正电压。 当带电的电子束带正电（例如，正离子束）时，除了最终电极之外的所有透镜电极都被提供有与正电压相反的负电压。 偏转系统被构造成使带电粒子束在除了最终电极之外的多个透镜电极的内部空间内偏转。

公开(公告)号：US5254856A

公开(公告)日：1993-10-19

申请号：US717018

申请日：1991-06-18

申请人： Hironobu Matsui ,  Mikio Ichihashi ,  Shinjiroo Ueda ,  Tadashi Otaka ,  Kazue Takahashi ,  Toshiaki Kobari ,  Kenji Odaka

发明人： Hironobu Matsui ,  Mikio Ichihashi ,  Shinjiroo Ueda ,  Tadashi Otaka ,  Kazue Takahashi ,  Toshiaki Kobari ,  Kenji Odaka

IPC分类号： G01Q30/02 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/18 ,  H01J37/12 ,  H01J37/28 ,  H01J49/06 ,  H01J37/10 ,  H01J37/18

CPC分类号： H01J37/28 ,  H01J37/12 ,  H01J2237/18

摘要： A charged particle beam apparatus includes a charged particle beam generating system for causing a charged particle source to generate a charged particle beam. A focusing system focuses the charged particle beam onto a sample. A deflecting system causes the focused charged particle beam to scan the surface of the sample. An evacuating system evacuates a space through which the charged particle beam passes. A detector detects information obtained by irradiating the charged particle beam onto the sample. An image display system displays as an image the status of distribution of the information over the sample surface based on a detection signal forwarded from the detector. The focusing system is entirely constituted by an electrostatic lens containing a plurality of lens electrodes, one of the lens electrodes being a final electrode located closest to the sample. All of the lens electrodes except for the final electrode are supplied with positive voltages as opposed to a negative voltage to the final electrode when the charged particle beam is negatively charged (e.g., electron beam). All of the lens electrodes except for the final electrode are supplied with negative voltages as opposed to a positive voltage to the final electrode when the charged electron beam is positively charged (e.g., positive ion beam). The deflecting system is so constructed as to deflect the charged particle beam within the inner space of the plurality of lens electrodes excluding the final electrode.

公开(公告)号：US4853640A

公开(公告)日：1989-08-01

申请号：US155120

申请日：1988-02-11

申请人： Manabu Matsumoto ,  Takashi Ikeguchi ,  Shinjiroo Ueda ,  Tadasi Sonobe ,  Toru Murashita ,  Satoshi Ido ,  Kazuo Kuroishi ,  Yoshiaki Kazawa ,  Shunji Kakiuchi ,  Toshiaki Kobari

发明人： Manabu Matsumoto ,  Takashi Ikeguchi ,  Shinjiroo Ueda ,  Tadasi Sonobe ,  Toru Murashita ,  Satoshi Ido ,  Kazuo Kuroishi ,  Yoshiaki Kazawa ,  Shunji Kakiuchi ,  Toshiaki Kobari

IPC分类号： H05H7/00

CPC分类号： H05H7/00

摘要： An industrial compact synchrotron radiation source which can improve vacuum evacuation performance to prolong life-time of a charged particle beam and supply highly intensive stable synchrotron radiation. In the source, a charged particle beam bending duct forming a vacuum chamber through which the charged particle beam circulates is encompassed by a bending electromagnet, and at least one SR guide duct for guiding the radiation to outside extends from the outer circumferential wall of the bending duct. The SR guide duct is connected through a gate valve to an SR beam line duct for guiding the SR beam to an object to be worked and a vacuum pump is disposed on the side, close to an orbit of the charged particle beam, of the gate valve. The SR guide duct extending from the outer circumferential wall of the bending duct takes a form of a divergent duct which is widened in accordance with a spreading angle of the SR beam traveling through the SR guide duct.

公开(公告)号：US06369978B1

公开(公告)日：2002-04-09

申请号：US09356056

申请日：1999-07-16

申请人： Hayato Shimizu ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari

发明人： Hayato Shimizu ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari

IPC分类号： G11B3314

CPC分类号： G11B5/6005 ,  G11B33/1446

摘要： To suppress pressure fluctuation caused by insertion of arms between disks, which arms support thereon magnetic heads, to reduce disk flutter to thereby reduce disk driving power in a magnetic disk apparatus, there are provided an open space not covered by a shroud, which constitutes a part of a housing structure to cover a side surface of a disk stack, and provided on a downstream side of the arms relative to an airflow moving along surfaces of the disks as the disks rotate, and a channel, which connects a space on an upstream side of the arms and the open space not restricted by the shroud on the downstream side of the arms, the channel being provided with a linear section, which has a rectifying effect on the airflow.

摘要翻译： 为了抑制由于在其上支撑磁头的磁盘之间的臂的插入引起的压力波动，以减少磁盘振动从而减小磁盘装置中的磁盘驱动能力，提供未被罩盖覆盖的开放空间，其构成一个 壳体结构的一部分，以覆盖盘堆叠的侧表面，并且相对于沿着盘旋转的沿着盘的表面移动的气流设置在臂的下游侧;以及通道，其连接上游的空间 臂和开放空间不受臂的下游侧的护罩的限制，通道设有直线部分，其对气流具有整流作用。

公开(公告)号：US4898635A

公开(公告)日：1990-02-06

申请号：US256485

申请日：1988-10-12

申请人： Toshiaki Kobari

发明人： Toshiaki Kobari

IPC分类号： B22C7/02 ,  B29C45/14 ,  B29C65/00 ,  B29C65/42

CPC分类号： B29C66/1142 ,  B22C7/026 ,  B29C45/14467 ,  B29C65/42 ,  B29C66/03241 ,  B29C66/43 ,  B29C66/727 ,  B29K2105/04 ,  B29L2031/757

摘要： A method and an apparatus for bonding parts of a disappearing model used for casting. This method comprises placing portions of parts of a disappearing model to be bonded so as to oppose each other to form portions to be adhered, surrounding the portions to be adhered by an injection mold frame which is previously formed, has an internal shape that accords with the external shape of the portions to be adhered and comprises a receiving mold and an injection mold that has an injection hole formed therein to allow an adhesive to be injected, and injecting the adhesive into the portions to be adhered from the injection hole.

摘要翻译： 一种用于粘合用于铸造的消失模型的部件的方法和装置。 该方法包括将消失模型的部分部分放置成彼此相对，以形成待粘附的部分，通过预先形成的注射模架围绕要粘附的部分，具有符合 要粘合的部分的外部形状包括接收模具和注射模具，其中形成有注入孔以允许粘合剂被注入，并且将注入孔从注射孔注入到待粘附的部分中。

公开(公告)号：US06600626B2

公开(公告)日：2003-07-29

申请号：US10103318

申请日：2002-03-22

申请人： Hayato Shimizu ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari ,  Mikio Tokuyama ,  Satomitsu Imai ,  Shozo Saegusa ,  Masahiko Sega ,  Toshihisa Okazaki ,  Yuzo Yamaguchi

发明人： Hayato Shimizu ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari ,  Mikio Tokuyama ,  Satomitsu Imai ,  Shozo Saegusa ,  Masahiko Sega ,  Toshihisa Okazaki ,  Yuzo Yamaguchi

IPC分类号： G11B3314

CPC分类号： G11B25/043 ,  G11B5/6005 ,  G11B33/142 ,  G11B33/1446 ,  G11B33/148

摘要： A magnetic disk apparatus arranged in a housing having a plurality of magnetic disks stacked on a rotating shaft, arms supporting thereon magnetic heads and adapted to be inserted between said magnetic disks, a rotary actuator for moving the arms, a housing forming at least a part of an arcuate-shaped shroud which substantially surrounds a portion of side surfaces of the magnetic disks so as to permit movement of the arms and which is concentric with the magnetic disks so as to define a gap between the shroud and the portion of the side surfaces of said magnetic disks. The gap defined between the outer peripheral end surfaces of the magnetic disks and the shroud is in a range of 0.1 mm to 0.6 mm.

公开(公告)号：US6031235A

公开(公告)日：2000-02-29

申请号：US339300

申请日：1999-06-24

申请人： Yasuhiko Ishida ,  Minoru Hiroki ,  Toshiaki Kobari ,  Osamu Satou ,  Yasushi Nakaizumi ,  Akimitsu Okura ,  Hideiti Kimura

发明人： Yasuhiko Ishida ,  Minoru Hiroki ,  Toshiaki Kobari ,  Osamu Satou ,  Yasushi Nakaizumi ,  Akimitsu Okura ,  Hideiti Kimura

IPC分类号： C09K3/10 ,  F16J15/10 ,  F16K51/02 ,  G01N23/00

CPC分类号： F16K51/02

摘要： A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.

摘要翻译： 将真空容器抽真空以保持在超高真空度。 提供阀装置用于将真空容器的内部与外部连接和断开，并且包括由具有0.1％以下的吸水率和2×10 -6以下的吸气率的高聚物制成的真空密封 （Torrxl / sec / cm 2：200℃）以下。

公开(公告)号：US07330334B2

公开(公告)日：2008-02-12

申请号：US11129335

申请日：2005-05-16

申请人： Hayato Shimizu ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari ,  Mikio Tokuyama ,  Satomitsu Imai ,  Shozo Saegusa ,  Masahiko Sega ,  Toshihisa Okazaki ,  Yuzo Yamaguchi

发明人： Hayato Shimizu ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari ,  Mikio Tokuyama ,  Satomitsu Imai ,  Shozo Saegusa ,  Masahiko Sega ,  Toshihisa Okazaki ,  Yuzo Yamaguchi

IPC分类号： G11B33/14

CPC分类号： G11B25/043 ,  G11B5/6005 ,  G11B33/142 ,  G11B33/1446 ,  G11B33/148

摘要： A magnetic disk apparatus includes a plurality of magnetic disks driven to rotate by a spindle motor, arms supporting magnetic heads on the magnetic disks, an actuator for moving the arms on the magnetic disks by a voice coil motor, and a housing which surrounds the magnetic disks, the arms and the actuator. A shroud which arcuately surrounds the magnetic disks along the outer periphery thereof has an opened portion for inserting the arms is formed in a part of the housing. The shroud on an upstream side of the arms relative to airflow generated by the magnetic disks when rotating is provided with an opening having a greater width than that of a gap defined between the shroud and the outer periphery of the magnetic disks. An empty bypass channel is provided which communicates from the opening through a rear side of the voice coil motor to the downstream side of the arms.

摘要翻译： 一种磁盘装置，包括由主轴电动机驱动旋转的多个磁盘，支撑在磁盘上的磁头的臂，用于通过音圈电机将臂支撑在磁盘上的致动器，以及围绕磁性的壳体 磁盘，臂和致动器。 沿其外周弧形围绕磁盘的护罩具有用于插入臂的开口部分形成在壳体的一部分中。 臂相对于旋转时由磁盘产生的气流在臂的上游侧的护罩设置有具有比限定在护罩与磁盘外周之间的间隙大的宽度的开口。 提供了一个空的旁路通道，其从开口通过音圈马达的后侧连通到臂的下游侧。

公开(公告)号：US5626682A

公开(公告)日：1997-05-06

申请号：US405768

申请日：1995-03-17

申请人： Toshiaki Kobari ,  Nobuo Hirano ,  Manabu Matsumoto ,  Mamoru Katane ,  Hiroaki Sakurabata ,  Shiro Matsuzaki

发明人： Toshiaki Kobari ,  Nobuo Hirano ,  Manabu Matsumoto ,  Mamoru Katane ,  Hiroaki Sakurabata ,  Shiro Matsuzaki

IPC分类号： H05H7/14 ,  B08B9/04 ,  B08B9/08 ,  B23D37/04 ,  H05H7/00 ,  H05H13/04 ,  B08B9/00

CPC分类号： B08B9/0436 ,  B08B9/0808 ,  B23D37/04 ,  H05H7/00 ,  Y10T407/1685 ,  Y10T409/40105 ,  Y10T409/404375 ,  Y10T409/405775

摘要： A rod driver is used to drive a rod so as to move a broach through a continuous vacuum chamber in the axial direction. The broach is provided at the leading end of the rod with cutting and finishing edges at a plurality of stages in the axial direction. The cutting edges each have chip breakers in their outer periphery. The broach is moved in the vacuum chamber to cut the inner surface of the vacuum chamber, so that a new surface is formed. During the cutting at least one of an inert gas, nitrogen, and a mixture of the inert gas and nitrogen is supplied to the cutting edges. The outer diameter of the finishing edge is same as the desired inner diameter of the vacuum chamber and the finishing edges are effective in forming such a vacuum chamber with greater precision and the least friction. As a contaminated and decomposed layer on the inner surface of the vacuum chamber is removed in the axial direction of the inner surface of the vacuum chamber for certain, moreover, gas desorption, from a new surface, originating from thermal desorption and photodesorption generated at the time of synchrotron radiation can be minimized to satisfy a requirement for a vacuum vessel.

摘要翻译： 杆驱动器用于驱动杆，以便使拉刀在轴向方向上移动通过连续的真空室。 拉杆在杆的前端处设置有在轴向方向上的多个阶段的切割和精加工边缘。 切削刃在其外周边各有断屑器。 将拉刀在真空室中移动以切割真空室的内表面，从而形成新的表面。 在切割期间，惰性气体，氮气和惰性气体和氮气的混合物中的至少一种被供给到切削刃。 精加工边缘的外径与真空室的期望内径相同，并且精加工边缘有效地以更高的精度和最小的摩擦力来形成这样的真空室。 由于在真空室的内表面上的污染和分解层在真空室的内表面的轴向方向被去除，而且从新表面开始的气体解吸附源于热解吸和在 可以将同步加速器辐射的时间最小化以满足对真空容器的要求。

公开(公告)号：US06665139B2

公开(公告)日：2003-12-16

申请号：US10022260

申请日：2001-12-20

申请人： Mikio Tokuyama ,  Hayato Shimizu ,  Satomitsu Imai ,  Shozo Saegusa ,  Masahiko Sega ,  Toshihisa Okazaki ,  Yuzo Yamaguchi ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari

发明人： Mikio Tokuyama ,  Hayato Shimizu ,  Satomitsu Imai ,  Shozo Saegusa ,  Masahiko Sega ,  Toshihisa Okazaki ,  Yuzo Yamaguchi ,  Masao Iwakura ,  Shigeo Nakamura ,  Kazuo Sakai ,  Shigenori Togashi ,  Masayuki Kaiho ,  Toshiaki Kobari

IPC分类号： G11B3314

CPC分类号： G11B33/08 ,  G11B5/6005 ,  G11B25/043 ,  G11B33/1446

摘要： In a magnetic disc apparatus including a plurality of magnetic discs mounted on a spindle, arms supporting magnetic heads, a rotary actuator for the arms, and a housing having an arcuate-shaped shroud, the improvement wherein gaps between the shroud and the sides of outer peripheries of the magnetic discs are larger than 0.1 mm and less than 0.6 mm. An open space is located, downstream of the arms with respect to the air flow on surfaces of the magnetic discs, the open space being devoid of the shroud. An opening is provided in the shroud, upstream of the arms with respect to the air flow and having a greater width than a width of the gaps defined between the magnetic discs and the shroud, and a bypass channel is provided which communicates between the opening and open space.

摘要翻译： 在包括安装在主轴上的多个磁盘，支撑磁头的臂，用于臂的旋转致动器和具有弧形罩的壳体的磁盘装置中，改进之处在于罩与外侧之间的间隙 磁盘的周边大于0.1mm且小于0.6mm。 相对于磁盘表面上的气流，位于臂的下游的开放空间，开放空间没有护罩。 在护罩中，相对于空气流在臂的上游设置开口，并且具有比限定在磁盘和护罩之间的间隙的宽度更大的宽度，并且提供旁通通道，其在开口和 开放空间。