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    Mask holding structure, film forming method, electro-optic device manufacturing method, and electronic apparatus
    1.
    发明申请
    Mask holding structure, film forming method, electro-optic device manufacturing method, and electronic apparatus 有权
    掩模保持结构，成膜方法，电光器件制造方法和电子设备

    公开(公告)号：US20060258030A1

    公开(公告)日：2006-11-16

    申请号：US11417319

    申请日：2006-05-03

    Applicant: Hiroshi Koeda ,  Shinichi Yotsuya

    Inventor： Hiroshi Koeda ,  Shinichi Yotsuya

    IPC: H01L21/00 ,  C23C16/00

    CPC classification number: C23C14/042 ,  H01L51/0011 ,  H01L51/56

    Abstract: A mask includes a base plate having aperture parts, and chips having aperture patterns and positioned in the aperture parts of the base plate. The mask is arranged on a bottom surface of a bed plate with a substrate on which a film is to be formed sandwiched therebetween. Magnets are arranged on the bed plate, and plugs which are attracted to the magnets are arranged in the base plate.

    Abstract translation: 掩模包括具有开口部分的基板和具有孔图案并且位于基板的孔部中的芯片。 掩模布置在床板的底表面上，其上将要形成有薄膜的基板。 磁铁布置在床板上，并且被吸引到磁体的塞子被布置在基板中。

    Surface treatment apparatus
    2.
    发明申请
    Surface treatment apparatus 审中-公开
    表面处理装置

    公开(公告)号：US20050115679A1

    公开(公告)日：2005-06-02

    申请号：US10953871

    申请日：2004-09-29

    Applicant: Ryuichi Kurosawa ,  Fumio Takagi ,  Hiroshi Koeda ,  Kazufumi Oya ,  Katsuji Arakawa

    Inventor： Ryuichi Kurosawa ,  Fumio Takagi ,  Hiroshi Koeda ,  Kazufumi Oya ,  Katsuji Arakawa

    IPC: H01L21/02 ,  C23F1/08 ,  H01L21/306 ,  H01L21/683 ,  C23F1/00

    CPC classification number: H01L21/6838 ,  C23F1/08

    Abstract: A surface treatment apparatus 1 is constructed to hold a substrate 10 when surface treatment is carried out to a back surface 101 of the substrate 10. The surface treatment apparatus 1 includes at least one enclosed space each defined by a concave portion 32 and a front surface 102 of the substrate 10; and an O-ring 2 (contact portion) adapted to hermetically contact with the front surface 102 of the substrate 10 to produce negative pressure in cooperation with the O-ring 2 and the front surface 102 of the substrate 10. The surface treatment apparatus 1 is constructed so that the substrate 10 is attracted onto the surface treatment apparatus 1 using a difference between the negative pressure and atmospheric pressure by decompressing the enclosed space in a decompression chamber and then bringing out the substrate 10 from the inside of the decompression chamber to environment under atmospheric pressure.

    Abstract translation: 当对基板10的背面101进行表面处理时，表面处理装置1被构造成保持基板10。 表面处理装置1包括由凹部32和基板10的前表面102限定的至少一个封闭空间; 以及适于与基板10的前表面102气密接触以产生与O形环2和基板10的前表面102协作的负压的O形环2（接触部分）。 表面处理装置1被构造成使得通过减压减压室中的封闭空间将衬底10从负压和大气压之间的差异吸引到表面处理装置1上，然后从衬底10的内部引出衬底10 减压室在大气压下环境。

    Ink jet head with an integrated charging control circuit
    4.
    发明授权
    Ink jet head with an integrated charging control circuit 有权
    具有集成充电控制电路的喷墨头

    公开(公告)号：US06517195B1

    公开(公告)日：2003-02-11

    申请号：US09202488

    申请日：1998-12-15

    Applicant: Hiroshi Koeda

    Inventor： Hiroshi Koeda

    IPC: B41J2045

    CPC classification number: B41J2/04541 ,  B41J2/04578 ,  B41J2/14201 ,  B41J2/14314 ,  B41J2002/14411 ,  B41J2202/13

    Abstract: In an ink jet head for performing charging and discharging between diaphragms and electrodes to transform the diaphragms to thereby eject ink drops from nozzle holes, a control circuit (60) of this ink jet head is constituted by an integrated circuit which is provided on a nozzle plate (300), a diaphragm substrate (200) or an electrode glass substrate (100) of an ink jet head chip (7).

    Abstract translation: 在用于在隔膜和电极之间进行充电和放电以转换隔膜以便从喷嘴孔喷出墨滴的喷墨头中，该喷墨头的控制电路（60）由设置在喷嘴上的集成电路 板（300），光阑基板（200）或喷墨头芯片（7）的电极玻璃基板（100）。

    Method of manufacturing spatial light modulator and electronic device employing it
    5.
    发明授权
    Method of manufacturing spatial light modulator and electronic device employing it 失效
    制造空间光调制器的方法及其采用的电子装置

    公开(公告)号：US06452712B2

    公开(公告)日：2002-09-17

    申请号：US09895694

    申请日：2001-06-29

    Applicant: Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

    Inventor： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

    IPC: G02B2600

    CPC classification number: G02B26/0841

    Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

    Abstract translation: 空间光调制器由导电硅镜基板和包括阳极粘合在一起的钠的玻璃电极基板构成。 硅镜基板具有以矩阵形式布置的微镜，在x方向上连接这些微镜的扭杆以及耦合到扭杆的两端的框架。 玻璃电极基板具有中央凹部，围绕其周边的边缘，从凹部内突出的支柱，以及以倾斜方式形成在凹部内的微电子驱动微镜的电极和布线。 扭杆的两端粘接到框架部分的边缘，并且扭杆的中间部分结合到支柱上。 在切割期间，扭杆的两端被切割离开框架部分。

    Method of manufacturing spatial light modulator and electronic device employing it
    6.
    发明授权
    Method of manufacturing spatial light modulator and electronic device employing it 失效

    公开(公告)号：US6107115A

    公开(公告)日：2000-08-22

    申请号：US398263

    申请日：1999-09-17

    Applicant: Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

    Inventor： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

    IPC: G02B26/00 ,  G02B26/08 ,  G03B21/00 ,  G03B21/26 ,  H01L21/84

    CPC classification number: G02B26/0841

    Abstract: A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

    Biochip manufacturing method and biochip manufacturing device
    8.
    发明授权
    Biochip manufacturing method and biochip manufacturing device 有权
    生物芯片制造方法和生物芯片制造装置

    公开(公告)号：US07960183B2

    公开(公告)日：2011-06-14

    申请号：US11497736

    申请日：2006-08-02

    Applicant: Hiroshi Koeda

    Inventor： Hiroshi Koeda

    IPC: G01N1/10

    CPC classification number: B01L3/0268 ,  B01J19/0046 ,  B01J2219/00378 ,  B01J2219/00527 ,  B01J2219/00576 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00704 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L2200/0673 ,  B01L2200/143 ,  B01L2300/0645 ,  B01L2400/0439 ,  Y10T436/113332 ,  Y10T436/115831 ,  Y10T436/2575

    Abstract: Provided is a method of manufacturing a biochip using a droplet discharging device including a droplet discharging head having a cavity and a nozzle hole provided in communication with the cavity, and a liquid housing unit connected to the cavity via a passage, having the steps of filling a retention liquid which separates without getting mixed with the sample liquid into the liquid housing unit, the passage, and the cavity; injecting the sample liquid into the liquid housing unit; moving the sample liquid from the liquid housing unit to the cavity by discharging the retention liquid from the nozzle hole; stopping the discharge of the retention liquid at the moving step upon detecting with a sensor that the sample liquid reached a position adjacent to the nozzle hole; and delivering the sample liquid as droplets onto the object by discharging the sample liquid from the nozzle hole.

    Abstract translation: 提供一种使用液滴排出装置制造生物芯片的方法，所述液滴排出装置包括具有空腔的喷液头和与空腔连通的喷嘴孔，以及通过通道连接到空腔的液体容纳单元，具有填充 分离而不与样品液体混合到液体容纳单元，通道和空腔中的保留液体; 将样品液体注入到液体容纳单元中; 通过从喷嘴孔排出保留液体将样品液体从液体容纳单元移动到空腔; 当用传感器检测到样品液体到达与喷嘴孔相邻的位置时，在移动步骤停止保留液体的排出; 并通过从喷嘴孔排出样品液体将样品液体作为液滴输送到物体上。

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