摘要:
The invention relates to a halftone phase shift photomask whose transmittance and phase angle remain unchanged even when irradiated with an excimer laser used for exposure over an extended period of time, and a blank therefor, and provides a halftone phase shift mask 108 comprising a pattern of halftone phase shift film 102 containing at least chromium and fluorine on a transparent substrate 101, wherein optical characteristic changes upon irradiation with an exposure excimer laser have been reduced by patterning a film irradiated with light 109 having a wavelength substantially absorbed by halftone phase shift film 102.
摘要:
In a halftone phase shifting photomask 108, having a pattern of halftone phase shifting film 102 containing at least chromium and fluorine, the halftone phase shifting film is heat-treated at a temperature between 250° C. and 500° C. so that a change of the optical property of the film produced by the application of excimer laser for exposure to the film is decreased.
摘要:
A halftone phase shift photomask having a sufficiently high transmittance for light of short wavelength and usable for high-resolution lithography effected by exposure using deep-ultraviolet+radiation, e.g., krypton fluoride excimer laser light. The halftone phase shift photomask has on a transparent substrate a halftone phase shift layer which includes at least one layer composed mainly of a chromium compound. The chromium compound contains at least fluorine atoms in addition to chromium atoms. A transmittance higher than a predetermined level can be obtained even in exposure carried out a relatively short wavelength. The photomask can be used for exposure using deep-ultraviolet+radiation, e.g., krypton fluoride excimer laser light (wavelength: 248 nm). Thus, high-resolution lithography can be realized. Since the photomask can be formed by approximately the same method as in the case of the conventional photomasks, it is possible to improve the yield and reduce the cost.
摘要:
A halftone phase shift photomask having a sufficiently high transmittance for light of short wavelength and usable for high-resolution lithography effected by exposure using deep-ultraviolet+radiation, e.g., krypton fluoride excimer laser light. The halftone phase shift photomask has on a transparent substrate a halftone phase shift layer which includes at least one layer composed mainly of a chromium compound. The chromium compound contains at least fluorine atoms in addition to chromium atoms. A transmittance higher than a predetermined level can be obtained even in exposure carried out at a relatively short wavelength. The photomask can be used for exposure using deep-ultraviolet+radiation, e.g., krypton fluoride excimer laser light (wavelength: 248 nm). Thus, high-resolution lithography can be realized. Since the photomask can be formed by approximately the same method as in the case of the conventional photomasks, it is possible to improve the yield and reduce the cost.
摘要:
In a switch device, such as a horn switch device attached to a steering wheel, a water column is prevented from being formed between contact sections of a pair of contact points facing each other.A movable member (30) and a fixed member (40) of a horn switch device (20) are disposed in an opposed manner such that the movable member (30) on an upper side can be moved toward and away from the fixed member (40) on a lower side and such that it is urged upward by urging means (50). Furthermore, at least a pair of protruding contact points (35) and (45) are formed on the movable member (30) and the fixed member (40), at positions facing each other. By bringing them into contact with each other, the members (30) and (40) are electrically connected, closing a horn circuit. A rivet (46), serving as a contact section, is attached to a tip portion of the fixed contact point (45) on the lower side, and an opening portion (36) is provided in the movable contact point (35) on the upper side, the outer peripheral side of which is made to serve as a contact section to be brought into contact with the rivet (46).
摘要:
The object of the present invention is to realize a motion vector search apparatus and method that is able to perform highly accurate motion vector searching even in images containing discontinuous motion relative to encoded images immediately before. According to the present invention, global motion vector search unit searches for a global motion vector by evaluating differences between pixels at the same location of an input image and an NR reference image in the form of an input image input one frame earlier that is held in original image memory. CPU then determines the motion vector search area based on the results of this global motion vector search, and sets that range in motion vector search unit. Motion vector search unit then searches for and determines a motion vector from previously encoded reference images held in frame memory that are the same as the encoded image held in frame memory over the motion vector search area set by CPU.
摘要:
In the motion prediction processor outputting the encoding type designating the inter-frame or intra-frame prediction coding and the motion vector in case of performing the inter-frame prediction coding, the coordinate values of the currently processed block are outputted and an offset is supplied to the address for reading out the reference region from the reference frame memory. The evaluation data for estimating the coding quantity in case of performing the inter-frame prediction coding is also outputted. An n number of the motion prediction processors are arranged and respectively associated with reference frame memories. The reference regions different from the same block are supplied to the n motion prediction processors and the motion prediction processor with the least evaluation data is selected from among the motion prediction processors whose reference regions are comprised within the picture. The motion vector outputted by the thus selected processor is corrected and outputted.
摘要:
The present invention provides a surface-protection tape for semiconductor wafers having an even thickness accuracy, excellent surface smoothness, and excellent surface sliding properties such as freedom from blocking, etc., and a substrate film for the surface-protection tape. The substrate film for the surface-protection tape for semiconductor wafers has at least one layer containing a polyethylene-based resin and satisfies the following requirements:(1) the back and front surfaces of the substrate film have a surface roughness Ra measured based on JIS B0601 of not more than 0.8 μm, and at least one surface thereof has a surface roughness Ra of not less than 0.05 μm; and(2) the difference between the maximum and minimum thicknesses of the substrate film is not more than 4 μm.The present invention also provides a surface-protection tape for semiconductor wafers comprising the substrate film and an adhesive layer.
摘要:
A decorative member can be readily attached to an airbag cover of an airbag device and attaching workability is enhanced. A decorative member 10 is attached to an attaching part 3 of an airbag cover 1, and engaging projections 13 of the decorative member 10 pass through through-holes in the airbag cover 1 to the back face 1B of the airbag cover 1. A holding member 20 is bent and pressed against the airbag cover 1 side, so that the engaging sections 21 are moved from a state where they are approached to each other between the engaging projections 13, to the direction in which the engaging sections 21 separate from each other. Consequently, the engaging sections 21 are inserted to engaging holes 13K to be engaged with the engaging projections 13. The holding member 20 allows the decorative member 10 to be attached to the airbag cover 1 through the engaging projections 13.
摘要:
An air bag cover or air bag device that secures the escape path of an air bag in an upper part of a steering wheel. Developing lines are formed in an air bag cover. When the air bag is inflated and developed, the air bag cover is divided into an upper open portion, left open portion, right open portion, and lower open portion so as to be opened. A decorative part is formed on the left open portion, and the upper open portion is difficult to be caught on a wheel part of the steering wheel.