公开(公告)号：US20050167052A1

公开(公告)日：2005-08-04

申请号：US10508700

申请日：2003-03-28

申请人： Hiroyuki Ishihara ,  Youichi Araki ,  Toshiki Takahashi ,  Takuya Kubo ,  Atsushi Ito ,  Yoko Ono

发明人： Hiroyuki Ishihara ,  Youichi Araki ,  Toshiki Takahashi ,  Takuya Kubo ,  Atsushi Ito ,  Yoko Ono

IPC分类号： H05H1/46 ,  B01J19/08 ,  C23C16/455 ,  C23C16/50 ,  H01J37/32 ,  H01L21/205 ,  H01L21/3065 ,  C23F1/00

CPC分类号： H01J37/32834 ,  H01J37/32633

摘要： A plasma processing device able to positively enhance a process-gas exhaust efficiency in a processing region and restrict plasma leaking. A processing container of a magnetron type parallel plate plasma processing device has a separator for separating the inside of the processing container into a processing region and an exhaust region. The separator has a plurality of gas passage holes to establish communication between the processing region and the exhaust region, and includes a non-conductive member. A conductive member is disposed on a gas passage-side surface facing the gas passage holes. A voltage V is applied by a power supply to the conductive member so that the gas passage-side surface is at a potential higher than that of a processing-region surface.

摘要翻译： 一种等离子体处理装置，其能够积极地提高处理区域中的处理气体排出效率并限制等离子体泄漏。 磁控管型平行板等离子体处理装置的处理容器具有用于将处理容器内部分离成处理区域和排气区域的分离器。 分离器具有多个气体通过孔，用于建立处理区域和排气区域之间的连通，并且包括非导电构件。 导电构件设置在面对气体通过孔的气体通道侧表面上。 通过电源将电压V施加到导电部件，使得气体通路侧表面处于比处理区域表面更高的电位。

公开(公告)号：US07109660B2

公开(公告)日：2006-09-19

申请号：US10508700

申请日：2003-03-28

申请人： Hiroyuki Ishihara ,  Youichi Araki ,  Toshiki Takahashi ,  Takuya Kubo ,  Atsushi Ito ,  Yoko Ono

发明人： Hiroyuki Ishihara ,  Youichi Araki ,  Toshiki Takahashi ,  Takuya Kubo ,  Atsushi Ito ,  Yoko Ono

IPC分类号： H01J7/24

CPC分类号： H01J37/32834 ,  H01J37/32633

摘要： A plasma processing device is able to positively enhance a process-gas exhaust efficiency in a processing region and restrict plasma leaking. A processing container of a magnetron type parallel plate plasma processing device has a separator for separating the inside of the processing container into a processing region and an exhaust region. The separator has a plurality of gas passage holes to establish communication between the processing region and the exhaust region, and consists of a non-conductive member. A conductive member is disposed on a gas passage-side surface facing the gas passage holes. A voltage V is applied by a power supply to the conductive member so that the gas passage-side surface is at a potential higher than that of a processing-region surface.

摘要翻译： 等离子体处理装置能够积极地提高处理区域中的处理气体排出效率并限制等离子体泄漏。 磁控管型平行板等离子体处理装置的处理容器具有用于将处理容器内部分离成处理区域和排气区域的分离器。 分离器具有多个气体通过孔，以在处理区域和排气区域之间建立连通，并且由不导电构件组成。 导电构件设置在面对气体通过孔的气体通道侧表面上。 通过电源将电压V施加到导电部件，使得气体通路侧表面处于比处理区域表面更高的电位。

公开(公告)号：US08488867B2

公开(公告)日：2013-07-16

申请号：US12738760

申请日：2008-10-22

申请人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Hideki Mori

发明人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Hideki Mori

IPC分类号： G06K9/00

CPC分类号： H01L22/20 ,  G01N21/9503 ,  H01L22/12

摘要： An inspection apparatus to precisely quantitatively inspect positions of formation of film layers formed on the surface of a disk-shaped substrate. It generates captured image data expressing a captured image corresponding to a field of vie based on image signals successively output from an image capturing unit capturing an image of a predetermined surface at an outer circumference part of the disk-shaped substrate and generates film layer edge position information expressing longitudinal direction positions at corresponding positions along the circumferential direction of an edge line of a film layer image pan corresponding to the film layer on the surface image with reference to, from the captured image data, longitudinal direction positions at the different positions along the circumferential direction of a boundary line between a surface image part corresponding to the predetermined surface on the captured image and its outer image part.

摘要翻译： 一种精确定量检查形成在盘状基板的表面上的膜层的形成位置的检查装置。 基于在从圆盘状基板的外周部拍摄预定面的图像的图像拍摄单元连续地输出的图像信号，生成表示对应于视野的拍摄图像的拍摄图像数据，并且生成胶片层边缘位置 参照来自拍摄图像数据的沿着沿着图像数据的不同位置的纵向位置的表面图像上对应于胶片层的胶片层图像的边缘线的圆周方向的相应位置处的纵向位置的信息， 在与捕获图像上的预定表面相对应的表面图像部分与其外部图像部分之间的边界线的圆周方向。

公开(公告)号：US08497985B2

公开(公告)日：2013-07-30

申请号：US12738768

申请日：2008-10-22

申请人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Masao Kawamura ,  Hideki Mori

发明人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Masao Kawamura ,  Hideki Mori

IPC分类号： G01N21/00 ,  G01J4/00

CPC分类号： G01N21/9503 ,  G01N21/21

摘要： A method of inspection and inspection apparatus able to use a captured image to more precisely inspect the state of film, defect parts, etc. at a surface of an object under inspection are provided.A method of inspection and inspection apparatus illuminating a surface of an object under inspection 10 by white light from an illumination unit LO while scanning the surface of the object under inspection 10 by an image capturing unit 100 to acquire a captured image and using the captured image to inspect a state of the surface of the object under inspection 10, which changes a state of polarization of light LR striking the image capturing unit 100 from an illuminated location of the object under inspection 10 and obtains a plurality of captured images based on light of different polarization states LR striking the image capturing unit 100.

摘要翻译： 提供一种能够使用拍摄图像更精确地检查被检查物体的表面处的膜，缺陷部分等的状态的检查和检查装置的方法。 一种检查和检查设备的方法，其通过由照明单元LO的白光照射被检查物体的表面，同时通过图像捕获单元100扫描被检查物体10的表面，以获取捕获的图像并使用捕获的图像 检查检查对象物10的表面状态，该状态改变从被检查对象物10的照明位置撞击到摄像单元100的光LR的偏振状态，并根据 不同的极化状态LR撞击图像拍摄单元100。

公开(公告)号：US20100310152A1

公开(公告)日：2010-12-09

申请号：US12745377

申请日：2008-11-18

申请人： Hiroshi Wakaba ,  Yoshinori Hayashi ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori ,  Shozo Kawasaki

发明人： Hiroshi Wakaba ,  Yoshinori Hayashi ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori ,  Shozo Kawasaki

IPC分类号： G06K9/00 ,  H04N7/18

CPC分类号： G01R31/2887 ,  G01N21/9501 ,  G01R31/2886 ,  G01R31/2891 ,  H01L21/6776 ,  H01L21/68728 ,  H01L22/12

摘要： A substrate surface inspection apparatus and method enabling judgment and analysis of the state of even portions of a substrate supported by supports using a captured image are provided. A support mechanism 20 is used where positions of arrangement of substrate support positions along the direction perpendicular to a scan direction by a plurality of first supports 23a to 23d are set outside the image capturing ranges of the substrate 10 by the imaging units 30a, 30b at the first relative position and inside the common image capturing range and where positions of arrangement of substrate support positions along the direction perpendicular to the scan direction by the plurality of second supports 24a to 24d are set outside the image capturing ranges of the substrate by the imaging units at the second relative position and inside the common image capturing range. The surface of the substrate 10 supported by the plurality of first supports is scanned and captured by the imaging units at the first relative position, the imaging units are moved to the second relative position, then the surface of the substrate 10 supported by the plurality of second supports is scanned and captured by the imaging units at the second relative position.

摘要翻译： 提供了一种能够使用拍摄图像判断和分析由支撑体支撑的基板的均匀部分的状态的基板表面检查装置和方法。 使用支撑机构20，其中通过多个第一支撑件23a至23d沿着垂直于扫描方向的方向的基板支撑位置的位置由成像单元30a，30b设置在基板10的图像捕获范围的外侧 第一相对位置和公共图像捕获范围内，并且通过多个第二支撑件24a至24d沿着垂直于扫描方向的方向的基板支撑位置的位置被设置在基板的图像捕获范围的外部，通过成像 单位在第二相对位置和公共图像捕获范围内。 由多个第一支撑体支撑的基板10的表面由成像单元在第一相对位置被扫描和捕获，成像单元移动到第二相对位置，然后由多个第一相对位置支撑的基板10的表面 成像单元在第二相对位置扫描和捕获第二支撑。

公开(公告)号：US20100310150A1

公开(公告)日：2010-12-09

申请号：US12745384

申请日：2008-12-01

申请人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori

发明人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori

IPC分类号： G06K9/00

CPC分类号： G01N21/9501 ,  G06K9/469

摘要： A feature analysis apparatus which enables visual confirmation of features of an inspected object and which enables limitations on the degree of freedom of classification based on the features to made relatively smaller is provided. It acquires inspected object information of an inspected object (S1), analyzes the inspection information to determine values of feature parameters of each of the plurality of layers (S2 to S5), uses values of the plurality of feature parameters and their corresponding directions for each of the plurality of layers to generate a single parameter vector (S2 to S5), converts the parameter vector to a layer vector which is a 3D vector in a predetermined (S2 to S5), and couples the plurality of layer vectors obtained for the plurality of layers in the order of the layers and generates a set of coordinate values of the plurality of nodes obtained in the 3D space as feature information of the inspected object (S6).

摘要翻译： 本发明提供一种特征分析装置，其能够可视化地确认被检查物体的特征，并且能够基于特征相对较小地限制分类自由度。 获取检查对象的被检查对象信息（S1），分析检查信息以确定多个层中的每个层的特征参数的值（S2至S5），使用多个特征参数的值及其对应的每个 以生成单个参数向量（S2至S5），将参数矢量转换为预定（S2至S5）中的3D矢量的层向量，并且将获得的多个层向量耦合到多个 并且生成在3D空间中获得的多个节点的一组坐标值作为被检查对象的特征信息（S6）。

公开(公告)号：US20100245810A1

公开(公告)日：2010-09-30

申请号：US12738768

申请日：2008-10-22

申请人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Masao Kawamura ,  Hideki Mori

发明人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Masao Kawamura ,  Hideki Mori

IPC分类号： G01N21/01

CPC分类号： G01N21/9503 ,  G01N21/21

摘要： A method of inspection and inspection apparatus able to use a captured image to more precisely inspect the state of film, defect parts, etc. at a surface of an object under inspection are provided.A method of inspection and inspection apparatus illuminating a surface of an object under inspection 10 by white light from an illumination unit LO while scanning the surface of the object under inspection 10 by an image capturing unit 100 to acquire a captured image and using the captured image to inspect a state of the surface of the object under inspection 10, which changes a state of polarization of light LR striking the image capturing unit 100 from an illuminated location of the object under inspection 10 and obtains a plurality of captured images based on light of different polarization states LR striking the image capturing unit 100.

摘要翻译： 提供一种能够使用拍摄图像更精确地检查被检查物体的表面处的膜，缺陷部分等的状态的检查和检查装置的方法。 一种检查和检查设备的方法，其通过由照明单元LO的白光照射被检查物体的表面，同时通过图像捕获单元100扫描被检查物体10的表面，以获取捕获的图像并使用捕获的图像 检查检查对象物10的表面状态，该状态改变从被检查对象物10的照明位置撞击到摄像单元100的光LR的偏振状态，并根据 不同的极化状态LR撞击图像拍摄单元100。

公开(公告)号：US08700498B2

公开(公告)日：2014-04-15

申请号：US12745384

申请日：2008-12-01

申请人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori

发明人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori

IPC分类号： G06Q10/00

CPC分类号： G01N21/9501 ,  G06K9/469

摘要： A feature analysis apparatus which enables visual confirmation of features of an inspected object and which enables limitations on the degree of freedom of classification based on the features to made relatively smaller is provided. It acquires inspected object information of an inspected object (S1), analyzes the inspection information to determine values of feature parameters of each of the plurality of layers (S2 to S5), uses values of the plurality of feature parameters and their corresponding directions for each of the plurality of layers to generate a single parameter vector (S2 to S5), converts the parameter vector to a layer vector which is a 3D vector in a predetermined (S2 to S5), and couples the plurality of layer vectors obtained for the plurality of layers in the order of the layers and generates a set of coordinate values of the plurality of nodes obtained in the 3D space as feature information of the inspected object (S6).

摘要翻译： 本发明提供一种特征分析装置，其能够可视化地确认被检查物体的特征，并且能够基于特征相对较小地限制分类的自由度。 获取检查对象的被检查对象信息（S1），分析检查信息以确定多个层中的每个层的特征参数的值（S2至S5），使用多个特征参数的值及其对应的每个 以生成单个参数向量（S2至S5），将参数矢量转换为预定（S2至S5）中的3D矢量的层向量，并且将获得的多个层向量耦合到多个 并且生成在3D空间中获得的多个节点的一组坐标值作为被检查对象的特征信息（S6）。

公开(公告)号：US08508246B2

公开(公告)日：2013-08-13

申请号：US12745377

申请日：2008-11-18

申请人： Hiroshi Wakaba ,  Yoshinori Hayashi ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori ,  Shozo Kawasaki

发明人： Hiroshi Wakaba ,  Yoshinori Hayashi ,  Koichi Miyazono ,  Yoko Ono ,  Hideki Mori ,  Shozo Kawasaki

IPC分类号： G01R31/01 ,  G01R31/00 ,  G01R31/308 ,  G01R31/28

CPC分类号： G01R31/2887 ,  G01N21/9501 ,  G01R31/2886 ,  G01R31/2891 ,  H01L21/6776 ,  H01L21/68728 ,  H01L22/12

摘要： A substrate surface inspection apparatus and method enabling judgment and analysis of the state of even portions of a substrate supported by supports using a captured image are provided. A support mechanism 20 is used where positions of arrangement of substrate support positions along the direction perpendicular to a scan direction by a plurality of first supports 23a to 23d are set outside the image capturing ranges of the substrate 10 by the imaging units 30a, 30b at the first relative position and inside the common image capturing range and where positions of arrangement of substrate support positions along the direction perpendicular to the scan direction by the plurality of second supports 24a to 24d are set outside the image capturing ranges of the substrate by the imaging units at the second relative position and inside the common image capturing range. The surface of the substrate 10 supported by the plurality of first supports is scanned and captured by the imaging units at the first relative position, the imaging units are moved to the second relative position, then the surface of the substrate 10 supported by the plurality of second supports is scanned and captured by the imaging units at the second relative position.

摘要翻译： 提供了一种能够使用拍摄图像判断和分析由支撑体支撑的基板的均匀部分的状态的基板表面检查装置和方法。 使用支撑机构20，其中通过多个第一支撑件23a至23d沿着垂直于扫描方向的方向的基板支撑位置的位置由成像单元30a，30b设置在基板10的图像捕获范围的外侧 第一相对位置和公共图像捕获范围内，并且通过多个第二支撑件24a至24d沿着垂直于扫描方向的方向的基板支撑位置的位置被设置在基板的图像捕获范围的外部，通过成像 单位在第二相对位置和公共图像捕获范围内。 由多个第一支撑体支撑的基板10的表面由成像单元在第一相对位置被扫描和捕获，成像单元移动到第二相对位置，然后由多个第一相对位置支撑的基板10的表面 成像单元在第二相对位置扫描和捕获第二支撑。

公开(公告)号：US20100246934A1

公开(公告)日：2010-09-30

申请号：US12738760

申请日：2008-10-22

申请人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Hideki Mori

发明人： Yoshinori Hayashi ,  Hiroshi Wakaba ,  Yoko Ono ,  Koichi Miyazono ,  Hideki Mori

IPC分类号： G06K9/00

CPC分类号： H01L22/20 ,  G01N21/9503 ,  H01L22/12

摘要： An inspection apparatus of a disk-shaped substrate able to precisely quantitatively inspect positions of formation of film layers formed on the surface of a disk-shaped substrate is provided, that is, an inspection apparatus of a disk-shaped substrate on which film layers are formed designed to generate captured image data expressing a captured image corresponding to a field of view based on image signals successively output from an image capturing unit capturing an image of a predetermined surface at an outer circumference part of the disk-shaped substrate and to generate film layer edge position information Y4E24 (θ) expressing longitudinal direction positions at corresponding positions (θ) along the circumferential direction of an edge line E24 of a film layer image part ISa (24) corresponding to the film layer 24 on the surface image ISa with reference to, from the captured image data, longitudinal direction positions YE15aL (θ) at the different positions (θ) along the circumferential direction of a boundary line E15a between a surface image part ISa corresponding to the predetermined surface on the captured image and its outer image part IBKL.

摘要翻译： 提供了能够精确地定量检查形成在盘状基板的表面上的膜层的形成位置的盘状基板的检查装置，即，其中膜层为 被形成为基于从在盘状基板的外周部分捕获预定表面的图像的图像捕获单元连续输出的图像信号生成表示与视场相对应的拍摄图像的拍摄图像数据，并且生成胶片 沿着与表面图像ISa上的薄膜层24相对应的薄膜层图像部分ISa（24）的边缘线E24的圆周方向的相应位置（＆amp;θ）表示纵向位置的层边缘位置信息Y4E24（＆ 参考来自拍摄图像数据的不同位置处的纵向位置YE15aL（＆amp; tas）沿着与捕获图像上的预定表面相对应的表面图像部分ISa与其外部图像部分IBKL之间的边界线E15a的圆周方向。