摘要:
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S110). If it is judged through the diagnosis performed in S110 that no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S130). If the processing has been completed, the processing apparatus is stopped (S140). If, on the other hand, it is judged through the diagnosis performed in S110 that an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S120). The processing apparatus is then stopped (S140).
摘要:
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S110). If it is judged through the diagnosis performed in S110 that no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S130). If the processing has been completed, the processing apparatus is stopped (S140). If, on the other hand, it is judged through the diagnosis performed in S110 that an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S120). The processing apparatus is then stopped (S140).
摘要:
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S110). If it is judged through the diagnosis performed in S110 that no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S130). If the processing has been completed, the processing apparatus is stopped (S140). If, on the other hand, it is judged through the diagnosis performed in S110 that an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S120). The processing apparatus is then stopped (S140).
摘要:
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S110). If it is judged through the diagnosis performed in S110 that no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S130). If the processing has been completed, the processing apparatus is stopped (S140). If, on the other hand, it is judged through the diagnosis performed in S110 that an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S120). The processing apparatus is then stopped (S140).
摘要:
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S110). If it is judged through the diagnosis performed in S110 that no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S130). If the processing has been completed, the processing apparatus is stopped (S140). If, on the other hand, it is judged through the diagnosis performed in S110 that an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S120). The processing apparatus is then stopped (S140).
摘要:
A semiconductor processing system includes an intermediate structure disposed between an atmospheric pressure entrance transfer chamber and a vacuum common transfer chamber. The intermediate structure includes a transfer passage for a target substrate to pass therein. The transfer passage includes a first buffer chamber a middle transfer chamber and a second buffer chamber detachably connected. An additional processing apparatus is detachably connected to the middle transfer chamber. The intermediate structure is selectively arranged in first or second state. In the first state, the additional processing apparatus performs a vacuum process, while the first buffer chamber is a load-lock chamber. In the second state, the additional processing apparatus performs an atmospheric pressure process, while the second buffer chamber is a load-lock chamber.
摘要:
It is an object of the invention to perform an accurate position input having a directivity while at the same time ensuring a high resolution, or to perform a mode switchover operation for effecting a switchover among different functions in input information and for inputting information into a plurality of target apparatus, with an acceptable operability and without any incorrect input. The information input device comprises: two plate-like input members capable of being held between fingertips or portions of two fingers of one hand so as to be slid against each other; a grasping section to be held by other fingers of the one hand; connecting portions for connecting the two plate-like input members to the grasping section; and an information creating portion for creating input information in accordance with a relative position or a relative movement between the plate-like input members. Furthermore, the grasping section is provided with a switching device for switching the mode of the input information, which is located at a position where it can be operated by one or both of the two fingers.
摘要:
The contents reproducing system includes a plurality of contents reproducing units, and the delay amount calculating unit calculates the delay amount with which each of the contents reproducing units reproduces the contents data. The delay amount is the time to delay the reproduction of the contents data, for example. The contents reproducing unit reproduces the contents data, by each of the contents reproducing units, with the delay based on the delay amount calculated by the delay amount calculating unit. By automatically controlling the delay amount of the contents data in this manner, the contents reproducing system can create a sound space with wrapped feeling and spreading feeling.
摘要:
A parts management system which is capable of preventing use of a non-conforming part. A first computer for a user has component parts for an apparatus, delivered to the user. A second computer for a manufacturer is connected via a communication network to the first computer, and has a database provided therein which includes a list having fields for a plurality of kinds of management data for the apparatus component parts in association with each of ID numbers of the apparatus component parts. In the second computer, the management data on the apparatus component parts is acquired from the first computer via the communication network, and the acquired management data is compared with management data within the database.
摘要:
A copy supporting device includes a receiving unit, a content list display unit, a first input accepting unit, a sub menu display unit, a second input accepting unit, and a relevant content extracting unit. The sub menu display unit displays, on the basis of attribute information of the designated content which is designated from the content list by the external input, a sub menu which includes items designating relevance to the designated content. The second input accepting unit accepts a designation of an item in the sub menu by the external input. The relevant content extracting unit extracts contents related to the designated content from the content list on the basis of the designated item.