公开(公告)号：US20170045360A1

公开(公告)日：2017-02-16

申请号：US15304640

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Toshiaki NAKAMURA ,  Heewon JEONG ,  Masahide HAYASHI

IPC: G01C19/5726

CPC classification number: G01C19/5726 ,  H01L29/84

Abstract: The purpose of the present invention is to provide an inertial force detection device that can more accurately detect faults in a temperature sensor. Provided is an inertial force detection device configured so that in a state where an oscillating body is made to oscillate in a first direction, the amount of displacement when the oscillating body is displaced in a second direction due to the generation of angular velocity is detected as angular velocity, wherein the inertial force detection device has a means for performing control so that the oscillating body enters a state of resonance in the first direction, a temperature detection means for detecting temperature, and a means for detecting faults in the temperature detection means, and outputs a plurality of signals, which indicate the fault detection results of the three means, continuously from a single signal wire.

Abstract translation: 本发明的目的是提供一种可以更精确地检测温度传感器中的故障的惯性力检测装置。 本发明提供了一种惯性力检测装置，其被构造为使得在使振动体在第一方向上振荡的状态下，由于产生角速度而使振动体在第二方向上位移的位移量被检测为 角速度，其中惯性力检测装置具有用于执行控制的装置，使得振荡体进入第一方向的共振状态，用于检测温度的温度检测装置和用于检测温度检测装置中的故障的装置， 并且从单个信号线连续地输出表示三个装置的故障检测结果的多个信号。

公开(公告)号：US20160003650A1

公开(公告)日：2016-01-07

申请号：US14773122

申请日：2013-12-20

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Masatoshi KANAMARU ,  Takanori AONO ,  Masahide HAYASHI ,  Heewon JEONG

IPC: G01D11/24

CPC classification number: G01D11/245 ,  G01C19/5783 ,  G01P1/023

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.

Abstract translation: 为了抑制物理传感器中的真空压力气氛的变化，在真空空间中设置有测量物理量的感测部件的物理传感器包括堆叠多个基板的传感器部分和空腔基板 9，具有通过接合设置在传感器部的上表面侧或下表面侧的空间，其中，所述感测部经由设置在所述传感器部中的通气路11a与所述腔基板的空间连通。

公开(公告)号：US20150355218A1

公开(公告)日：2015-12-10

申请号：US14763020

申请日：2013-11-13

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Heewon JEONG ,  Kiyoko YAMANAKA ,  Masahide HAYASHI

IPC: G01P15/097 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P15/097 ,  G01C19/5747 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0882

Abstract: An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.

Abstract translation: 提供了在惯性传感器的实施环境中不易受温度变化和振动干扰的惯性传感器。 在本发明中，例如，如图1所示， 如图9所示，延伸部EXU设置成连接到固定部FU3，该延伸部EXU和构成质量体MS的一部分的第三区P3经由支撑梁BM3和支撑梁BM4连接， 支撑梁BM3和支撑梁BM4相对于虚线IL1相对设置。 由此，由于质量本体MS的旋转和扭转引起的不想要的模式的固有频率可以移动到高频带。

公开(公告)号：US20170219620A1

公开(公告)日：2017-08-03

申请号：US15304243

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Heewon JEONG ,  Masahide HAYASHI ,  Kiyoko YAMANAKA ,  Daisuke MAEDA

IPC: G01P15/125 ,  H01L29/84

CPC classification number: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  H01L29/84

Abstract: Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.

公开(公告)号：US20170138981A1

公开(公告)日：2017-05-18

申请号：US15129963

申请日：2015-03-25

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masahide HAYASHI ,  Heewon JEONG

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0834

Abstract: Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

公开(公告)号：US20140007685A1

公开(公告)日：2014-01-09

申请号：US13930011

申请日：2013-06-28

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Yuhua ZHANG ,  Heewon JEONG ,  Kiyoko YAMANAKA ,  Masahide HAYASHI

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

Abstract: A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different.

Abstract translation: 当向惯性传感器施加检测方向上的惯性力时，可动部件围绕旋转轴线旋转，该旋转轴线穿过支撑件。 可动部包括在施加惯性力时沿与第一区域的方向相反的方向移位的第一区域和第二区域。 第二基板包括分别与第一和第二区域相对的第一和第二检测电极。 第一检测电极和第二检测电极相对于旋转轴对称地设置。 相对于旋转轴对称地设置空腔。 在垂直于检测方向的方向和旋转轴线延伸的方向上，从旋转轴到第一区域的端部的长度以及从旋转轴到第二区域的端部的长度是不同的。

公开(公告)号：US20170233246A1

公开(公告)日：2017-08-17

申请号：US15502554

申请日：2015-06-29

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Masatoshi KANAMARU ,  Masahide HAYASHI ,  Masashi YURA ,  Heewon JEONG

IPC: B81B7/00 ,  G01C19/574

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C99/0045 ,  G01C19/574 ,  G01P15/08 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

公开(公告)号：US20170191830A1

公开(公告)日：2017-07-06

申请号：US15313242

申请日：2015-04-08

Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.

Inventor： Daisuke MAEDA ,  Heewon JEONG ,  Masahide HAYASHI

IPC: G01C19/5726 ,  G01C19/5776 ,  G01P15/125 ,  G01C19/5755

Abstract: An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

公开(公告)号：US20130340524A1

公开(公告)日：2013-12-26

申请号：US13921505

申请日：2013-06-19

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Daisuke MAEDA ,  Heewon JEONG ,  Masahide HAYASHI

IPC: G01P15/08

CPC classification number: G01P15/0888 ,  G01C19/5776 ,  G01P15/125 ,  G01P2015/0814

Abstract: In an inertial sensor, an acceleration sensor element section includes a first movable section configured to respond to acceleration applied thereto and a diagnosis electrode configured to displace the first movable section with an electrostatic force according to voltage application from a control circuit section. An angular velocity sensor element section includes a second movable section configured to respond to an angular velocity applied thereto and a driving electrode configured to displace the second movable section with an electrostatic force according to voltage application from the control circuit section. A voltage signal input to the driving electrode and a voltage signal input to the diagnosis electrode are the same voltage signal. The voltage signal input to the diagnosis electrode is a signal for detecting a mechanical failure. Carrier signal for detecting displacement of the first movable section has frequency higher than frequency of signal applied to the diagnosis electrode.

Abstract translation: 在惯性传感器中，加速度传感器元件部包括构成为响应于施加的加速度的第一可动部和构成为根据来自控制电路部的电压施加的静电力使第一可动部移位的诊断电极。 角速度传感器元件部分包括被配置为响应于施加到其上的角速度的第二可动部分和驱动电极，该驱动电极被配置为根据来自控制电路部分的电压施加的静电力使第二可移动部分移位。 输入到驱动电极的电压信号和输入到诊断电极的电压信号是相同的电压信号。 输入到诊断电极的电压信号是用于检测机械故障的信号。 用于检测第一可移动部分的位移的载波信号的频率高于施加到诊断电极的信号的频率。