公开(公告)号：US20230298845A1

公开(公告)日：2023-09-21

申请号：US18016764

申请日：2020-07-20

Applicant: Hitachi High-Tech Corporation

Inventor： Kazuhiro HONDA ,  Hiroyuki ITO ,  Takashi DOI ,  Soichiro MATSUNAGA

IPC: H01J37/05 ,  H01J37/12 ,  H01J37/09 ,  H01J37/244

CPC classification number: H01J37/05 ,  H01J37/12 ,  H01J37/09 ,  H01J37/244 ,  H01J2237/057 ,  H01J2237/04924 ,  H01J2237/0475 ,  H01J2237/24485

Abstract: A decelerating electrode of this energy filter comprises: an electrode pair that has an opening; and a cavity portion that provided in a rotationally symmetrical manner with the center of the opening as the optical axis. Voltages with electric potentials that are substantially the same as that of a charged particle beam are independently applied to the both sides of the decelerating electrode. When an electrical field protrudes into the cavity portion provided in the decelerating electrode, a saddle point having the same electric potential as that of incident charged particles is formed inside the decelerating electrode. The saddle point acts as a high pass filter for incident charged particles at an energy resolution of 1 mV or less. By analyzing charged particles which have been energy-separated, it is possible to measure the energy spectrum and ΔE at the high resolution of 1 mV or less. In addition, by causing the energy-separated charged particle beam to converge and scan on the sample surface with an electron lens, it is possible to obtain an SEM/STEM image with a high resolution (see FIG. 3).

公开(公告)号：US20210257178A1

公开(公告)日：2021-08-19

申请号：US17252124

申请日：2018-06-28

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi MORITA ,  Shinichi KATO ,  Hiroyuki ITO

IPC: H01J37/07 ,  H01J37/248

Abstract: Provided are a charged particle beam generator and a charged particle beam device that can improve insulation reliability as a result of reducing the high electric field generated around a connection section for a conductor. The charged particle beam generator 100 has: a plug 151 that guides high voltage from outside to a charged particle source that is in a vacuum; and a socket 251 having the charged particle source attached thereto. An electric field reduction ring 161 that electrically connects to one of a plurality of conductors that guide high voltage is embedded inside the tip of the plug 151. The plurality of conductors that guide the high voltage are arranged so as to penetrate the electric field reduction ring 161.