公开(公告)号：US11227740B2

公开(公告)日：2022-01-18

申请号：US16644871

申请日：2017-09-07

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Soichiro Matsunaga ,  Yasunari Sohda ,  Souichi Katagiri ,  Makoto Sakakibara ,  Hajime Kawano ,  Takashi Doi

IPC: H01J37/063 ,  H01J37/141 ,  H01J37/244 ,  H01J37/28 ,  H01J37/248 ,  H01J37/295

Abstract: In order to provide an electron gun capable of maintaining a small spot diameter of a beam converged on a sample even when a probe current applied to the sample is increased, a magnetic field generation source 301 is provided with respect to an electron gun including: an electron source 101; an extraction electrode 102 configured to extract electrons from the electron source 101; an acceleration electrode 103 configured to accelerate the electrons extracted from the electron source 101; and a first coil 104 and a first magnetic path 201 having an opening on an electron source side, the first coil 104 and the first magnetic path 201 forming a control lens configured to converge an electron beam emitted from the acceleration electrode 103. The magnetic field generation source is provided for canceling a magnetic field, at an installation position of the electron source 101, generated by the first coil 104 and the first magnetic path 201.

公开(公告)号：US20220037107A1

公开(公告)日：2022-02-03

申请号：US17278848

申请日：2018-09-25

Applicant: Hitachi High-Tech Corporation

Inventor： Soichiro Matsunaga ,  Souichi Katagiri ,  Keigo Kasuya ,  Aki Takei ,  Hajime Kawano ,  Takashi Doi

IPC: H01J37/073 ,  H01J37/10

Abstract: To stabilize an amount of electron beam emitted from a thermoelectric field emission electron source. A thermoelectric field emission electron source includes: an electron source 301 having a needle shape; a metal wire 302 to which the electron source is fixed and configured to heat the electron source; a stem 303 fixed to an insulator and configured to energize the metal wire; a first electrode 304 having a first opening portion 304a and arranged such that a tip of the electron source protrudes from the first opening portion; a second electrode 306 having a second opening portion 306a; and an insulating body 307 configured to position the first electrode and the second electrode such that a central axis of the first opening portion and a central axis of the second opening portion coincide with each other, and provide electrical insulation between the first electrode and the second electrode, so as to provide a structure in which an amount of gas released when the first electrode is heated is reduced.

公开(公告)号：US11894211B2

公开(公告)日：2024-02-06

申请号：US17621503

申请日：2019-07-02

Applicant: Hitachi High-Tech Corporation

Inventor： Erina Kawamoto ,  Soichiro Matsunaga ,  Souichi Katagiri ,  Keigo Kasuya ,  Takashi Doi ,  Tetsuya Sawahata ,  Minoru Yamazaki

IPC: H01J37/077 ,  H01J37/075 ,  H01J37/18

CPC classification number: H01J37/077 ,  H01J37/075 ,  H01J37/18 ,  H01J2237/006

Abstract: The invention provides an electron beam apparatus that reduces a time required for an electron gun chamber to which a sputter ion pump and a non-evaporable getter pump are connected to reach an extreme high vacuum state. The electron beam apparatus includes an electron gun configured to emit an electron beam and the electron gun chamber to which the sputter ion pump and the non-evaporable getter pump are connected. The electron beam apparatus further includes a gas supply unit configured to supply at least one of hydrogen, oxygen, carbon monoxide, and carbon dioxide to the electron gun chamber.

公开(公告)号：US11929230B2

公开(公告)日：2024-03-12

申请号：US17601421

申请日：2019-04-18

Applicant: Hitachi High-Tech Corporation

Inventor： Keigo Kasuya ,  Akira Ikegami ,  Kazuhiro Honda ,  Masahiro Fukuta ,  Takashi Doi ,  Souichi Katagiri ,  Aki Takei ,  Soichiro Matsunaga

IPC: H01J37/073

CPC classification number: H01J37/073

Abstract: A large current electron beam is stably emitted from an electron gun of a charged particle beam device. The electron gun of the charged particle beam device includes: a SE tip 202; a suppressor 303 disposed rearward of a distal end of the SE tip; a cup-shaped extraction electrode 204 including a bottom surface and a cylindrical portion and enclosing the SE tip and the suppressor; and an insulator 208 holding the suppressor and the extraction electrode. A shield electrode 301 of a conductive metal having a cylindrical portion 302 is provided between the suppressor and the cylindrical portion of the extraction electrode. A voltage lower than a voltage of the SE tip is applied to the shield electrode.

公开(公告)号：US10903037B2

公开(公告)日：2021-01-26

申请号：US16572999

申请日：2019-09-17

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Keigo Kasuya ,  Shuhei Ishikawa ,  Kenji Tanimoto ,  Hajime Kawano ,  Hideo Todokoro ,  Souichi Katagiri ,  Takashi Doi ,  Soichiro Matsunaga

IPC: H01J37/075 ,  H01J37/28

Abstract: An object of the invention is to stably supply an electron beam from an electron gun, that is, to prevent variation in intensity of the electron beam. The invention provides a charged particle beam device that includes an electron gun having an electron source, an extraction electrode to which a voltage used for extracting electrons from the electron source is applied, and an acceleration electrode to which a voltage used for accelerating the electrons extracted from the electron source is applied, a first heating unit that heats the extraction electrode, and a second heating unit that heats the acceleration electrode.

公开(公告)号：US11961704B2

公开(公告)日：2024-04-16

申请号：US17595742

申请日：2019-07-02

Applicant: Hitachi High-Tech Corporation

Inventor： Naoki Akimoto ,  Takashi Doi ,  Yuzuru Mochizuki

IPC: H01J37/28 ,  H01J37/09 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/09 ,  H01J37/265 ,  H01J2237/057

Abstract: There is provided a charged particle beam system having a computer system for controlling an acceleration voltage of a charged particle beam emitted from a charged particle source, the system including: a first diaphragm group having first and second diaphragms which are diaphragms that act on the charged particle beam and have different thicknesses; and a first diaphragm switching mechanism for switching the diaphragm in the first diaphragm group, in which the computer system controls the first diaphragm switching mechanism so as to switch from the first diaphragm to the second diaphragm according to an increase or decrease of the acceleration voltage.

公开(公告)号：US11508544B2

公开(公告)日：2022-11-22

申请号：US17278848

申请日：2018-09-25

Applicant: Hitachi High-Tech Corporation

Inventor： Soichiro Matsunaga ,  Souichi Katagiri ,  Keigo Kasuya ,  Aki Takei ,  Hajime Kawano ,  Takashi Doi

IPC: H01J37/073 ,  H01J37/10

Abstract: To stabilize an emitted electron beam, a thermoelectric field emission electron source includes: an electron source having a needle shape; a metal wire to which the electron source is fixed and configured to heat the electron source; a stem fixed to an insulator and configured to energize the metal wire; a first electrode having a first opening portion and arranged such that a tip of the electron source protrudes from the first opening portion; a second electrode having a second opening portion; and an insulating body configured to position the first electrode and the second electrode such that a central axis of the first opening portion and a central axis of the second opening portion coincide with each other, and to provide electrical insulation between the first and second electrodes, so as to provide a structure that reduces an amount of gas released when the first electrode is heated.