公开(公告)号：US20170285067A1

公开(公告)日：2017-10-05

申请号：US15468668

申请日：2017-03-24

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masafumi Watanabe ,  Hiroyoshi Yamamoto ,  Kazuo Chinone

IPC: G01Q10/02

CPC classification number: G01Q10/02 ,  G01Q10/065

Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

公开(公告)号：US10801977B2

公开(公告)日：2020-10-13

申请号：US15465910

申请日：2017-03-22

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi Nagata ,  Satoshi Nakayama ,  Keiichi Tanaka ,  Kazuo Chinone

IPC: G01N23/223

Abstract: A radiation analyzing apparatus includes a radiation irradiation unit configured to irradiate an object with a first radiation, a radiation detection unit configured to detect a second radiation generated from the object irradiated with the first radiation, a radiation converging unit configured to disposed between the object and the radiation detection unit and to converge the second radiation on the radiation detection unit, a position changing unit configured to vary a relative positional relationship between the radiation converging unit and the radiation detection unit, and a driving unit configured to change the positional relationship.

公开(公告)号：US20190033237A1

公开(公告)日：2019-01-31

申请号：US16041905

申请日：2018-07-23

Applicant: Hitachi High-Tech Science Corporation

Inventor： Satoshi Nakayama ,  Keiichi Tanaka ,  Atsushi Nagata ,  Kazuo Chinone

IPC: G01N23/2252 ,  G01T1/17

Abstract: A radiation analysis apparatus includes an excitation source unit irradiating an object, for which the radiation analysis apparatus analyzes property or a structure, with a first radiation, a radiation detection unit including three or more radiation detectors that detect a second radiation generated from the object irradiated with the first radiation, a radiation focusing unit disposed between the object and the radiation detection unit, and focusing the second radiation, a position changing unit changing a relative positional relationship between the radiation focusing unit and the radiation detection unit, and a control unit controlling the position changing unit to change the positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information indicating a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

公开(公告)号：US20170062088A1

公开(公告)日：2017-03-02

申请号：US15246041

申请日：2016-08-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Satoshi Nakayama ,  Keiichi Tanaka ,  Atsushi Nagata ,  Kazuo Chinone

IPC: G21K7/00 ,  G01N23/223

CPC classification number: G01N23/223

Abstract: An X-ray analysis device includes an electron gun, an X-ray optical member, a first detection unit and a second detection unit, and a distance changing mechanism. The X-ray optical member guides characteristic X-rays emitted from a sample to at least any one of the first detection unit or the second detection unit. The first detection unit is formed such that energy resolution is given relative priority over counting efficiency in contrast to the second detection unit. The second detection unit is formed such that counting efficiency is given relative priority over energy resolution in contrast to the first detection unit. The distance changing mechanism changes the distance between each of the first detection unit and the second detection unit and the X-ray optical member in an axial direction of an optical axis of the X-ray optical member.

Abstract translation: X射线分析装置包括电子枪，X射线光学构件，第一检测单元和第二检测单元以及距离变换机构。 X射线光学构件将从样品发射的特征X射线引导到第一检测单元或第二检测单元中的至少任一个。 第一检测单元被形成为使得与第二检测单元相比，能量分辨率相对于计数效率相对优先。 第二检测单元被形成为使得与第一检测单元相比，计数效率比能量分辨率相对优先。 距离变换机构使X射线光学构件的光轴的轴向上的第一检测单元与第二检测单元和X射线光学构件之间的距离变化。

公开(公告)号：US10151773B2

公开(公告)日：2018-12-11

申请号：US15468668

申请日：2017-03-24

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masafumi Watanabe ,  Hiroyoshi Yamamoto ,  Kazuo Chinone

IPC: G01Q60/26 ,  G01Q10/04 ,  G01Q10/02 ,  G01Q10/06

Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

公开(公告)号：US10048216B2

公开(公告)日：2018-08-14

申请号：US15016362

申请日：2016-02-05

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Keiichi Tanaka ,  Kazuo Chinone

IPC: G01N23/223 ,  G01N23/2252 ,  H01L39/10 ,  H01L39/16

Abstract: An X-ray analyzer includes: an excitation source for exciting a sample to radiate a characteristic X-ray; an X-ray detector that detects the characteristic X-ray; a collimator; at least one window that is provided between the sample and the X-ray detector and allows the characteristic X-ray to pass through; and a cooling unit that cools the window, wherein the window is laminated with one or more layer of an aluminum film and one or more layer of an insulating film, wherein a total thickness of the aluminum film of the at least one window is equal to or greater than 150 nm and is less than 300 nm, and wherein a size of the collimator is set such that a quantity of radiant heat to the X-ray detector of the atmospheric temperature when the window is not present is equal to or less than 10 μW.

公开(公告)号：US10018578B2

公开(公告)日：2018-07-10

申请号：US15246041

申请日：2016-08-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Satoshi Nakayama ,  Keiichi Tanaka ,  Atsushi Nagata ,  Kazuo Chinone

IPC: G01N23/20 ,  G01N23/223

CPC classification number: G01N23/223

Abstract: An X-ray analysis device includes an electron gun, an X-ray optical member, a first detection unit and a second detection unit, and a distance changing mechanism. The X-ray optical member guides characteristic X-rays emitted from a sample to at least any one of the first detection unit or the second detection unit. The first detection unit is formed such that energy resolution is given relative priority over counting efficiency in contrast to the second detection unit. The second detection unit is formed such that counting efficiency is given relative priority over energy resolution in contrast to the first detection unit. The distance changing mechanism changes the distance between each of the first detection unit and the second detection unit and the X-ray optical member in an axial direction of an optical axis of the X-ray optical member.

公开(公告)号：US10908104B2

公开(公告)日：2021-02-02

申请号：US16041905

申请日：2018-07-23

Applicant: Hitachi High-Tech Science Corporation

Inventor： Satoshi Nakayama ,  Keiichi Tanaka ,  Atsushi Nagata ,  Kazuo Chinone

IPC: G01N23/2252 ,  G01T1/17 ,  H01J37/02 ,  H01J37/26 ,  G01T7/00 ,  G01T1/16 ,  A61B6/00 ,  G01N23/223

Abstract: A radiation analysis apparatus includes an excitation source unit irradiating an object, for which the radiation analysis apparatus analyzes property or a structure, with a first radiation, a radiation detection unit including three or more radiation detectors that detect a second radiation generated from the object irradiated with the first radiation, a radiation focusing unit disposed between the object and the radiation detection unit, and focusing the second radiation, a position changing unit changing a relative positional relationship between the radiation focusing unit and the radiation detection unit, and a control unit controlling the position changing unit to change the positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information indicating a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

公开(公告)号：US20180275079A1

公开(公告)日：2018-09-27

申请号：US15928807

申请日：2018-03-22

Applicant: Hitachi High-Tech Science Corporation

Inventor： Keiichi Tanaka ,  Kazuo Chinone

IPC: G01N23/2252 ,  H01J37/285 ,  H01J37/244

CPC classification number: G01N23/2252 ,  G01N2223/079 ,  H01J37/244 ,  H01J37/285 ,  H01J2237/063 ,  H01J2237/24507

Abstract: The radiation analyzing apparatus irradiates an object including a plurality of elements with a first radiation, detects a plurality of rays of a second radiation emitted from the object irradiated with the first radiation, derives an energy spectrum based on a signal of each of the plurality of rays of the second radiation, detects detection energy, which is energy absorbed in a reference element that is an element used as a reference or is energy emitted from the reference element, based on the energy spectrum, and corrects the energy spectrum based on reference energy information, which is previously stored in a storage unit and indicates reference energy that is energy absorbed in the reference element or is energy emitted from the reference element, and the detection energy.