公开(公告)号：US09362083B2

公开(公告)日：2016-06-07

申请号：US14420942

申请日：2013-07-08

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki ,  Kohtaro Hosoya ,  Masanari Furiki

IPC: H01J37/18 ,  H01J37/26 ,  H01J37/16 ,  H01J37/28 ,  H01J37/20

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/1825 ,  H01J2237/2448 ,  H01J2237/2602 ,  H01J2237/2605

Abstract: There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the apparatus being intended to let a dry sample be observed as it is getting saturated with an introduced liquid and to prevent a charged particle beam from getting scattered by an unwanted liquid introduced between a diaphragm and the sample. This invention provides a structure including an inlet-outlet part (300) that brings in and out a desired liquid or gas in the direction of the underside or the side of the sample (6), the structure being arranged so that the sample (6) is irradiated with a primary charged particle beam while the sample (6) and the diaphragm (10) are kept out of contact with each other.

Abstract translation: 提供了具有允许在气体气氛或液体状态下观察样品的功能的带电粒子束装置，该装置旨在使干燥的样品在被引入的液体饱和时被观察，并且防止 带电粒子束由于在膜片和样品之间引入的不需要的液体而被散射。 本发明提供了一种结构，其包括入口 - 出口部分（300），该入口 - 出口部分（300）沿着样品（6）的下侧或侧面的方向引入和排出所需的液体或气体，该结构被布置成使得样品 ）在样品（6）和隔膜（10）彼此不接触的同时用初级带电粒子束照射。

公开(公告)号：US20150221470A1

公开(公告)日：2015-08-06

申请号：US14420942

申请日：2013-07-08

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki ,  Kohtaro Hosoya ,  Masanari Furiki

IPC: H01J37/18 ,  H01J37/26

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/1825 ,  H01J2237/2448 ,  H01J2237/2602 ,  H01J2237/2605

Abstract: There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the apparatus being intended to let a dry sample be observed as it is getting saturated with an introduced liquid and to prevent a charged particle beam from getting scattered by an unwanted liquid introduced between a diaphragm and the sample. This invention provides a structure including an inlet-outlet part (300) that brings in and out a desired liquid or gas in the direction of the underside or the side of the sample (6), the structure being arranged so that the sample (6) is irradiated with a primary charged particle beam while the sample (6) and the diaphragm (10) are kept out of contact with each other.

Abstract translation: 提供了具有允许在气体气氛或液体状态下观察样品的功能的带电粒子束装置，该装置旨在使干燥的样品在被引入的液体饱和时被观察，并且防止 带电粒子束由于在膜片和样品之间引入的不需要的液体而被散射。 本发明提供了一种结构，其包括入口 - 出口部分（300），该入口 - 出口部分（300）沿着样品（6）的下侧或侧面的方向引入和排出所需的液体或气体，该结构被布置成使得样品 ）在样品（6）和隔膜（10）彼此不接触的同时用初级带电粒子束照射。