公开(公告)号：US20190252151A1

公开(公告)日：2019-08-15

申请号：US16240898

申请日：2019-01-07

Applicant: Hitachi High-Technologies Corporation

Inventor： Takanori KATO ,  Motohiro TAKAHASHI ,  Naruo WATANABE ,  Akira NISHIOKA ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Hironori OGAWA

IPC: H01J37/04 ,  H01J37/30 ,  H01J37/244 ,  H01J37/304

Abstract: Provided is a charged particle beam apparatus including: an XY stage on which a sample is placed; a charged particle beam source which irradiates the sample with a charged particle beam; a detector which detects charged particles emitted from the sample upon the irradiation with the charged particle beam; an image generator which generates an SEM image of the sample based on a detection signal output by the detector; and a controller configured to set control parameters based on a movement starting point and a movement ending point of the XY stage and control a driving unit for moving the XY stage according to the control parameters.

公开(公告)号：US20190259567A1

公开(公告)日：2019-08-22

申请号：US16240885

申请日：2019-01-07

Applicant: Hitachi High-Technologies Corporation

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Tomotaka SHIBAZAKI ,  Naruo WATANABE ,  Akira NISHIOKA ,  Takanori KATO ,  Hironori OGAWA

IPC: H01J37/20

Abstract: To provide a lightweight and highly rigid stage device that can move in X and Y directions and a Z direction, and a charged particle beam device including the stage device. A stage device includes a chuck that is loaded with a sample, an XY stage that moves in X and Y directions, and a Z stage that moves in a Z direction. The Z stage includes: an inclined part that is fixed to the XY stage and includes an inclined surface inclined with respect to an XY plane; a movement part that moves on the inclined surface; and a table that is fixed to the movement part and is provided with the a plane parallel to the XY plane.

公开(公告)号：US20200176217A1

公开(公告)日：2020-06-04

申请号：US16683340

申请日：2019-11-14

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Tomotaka SHIBAZAKI ,  Naruo WATANABE ,  Hironori OGAWA ,  Takanori KATO ,  Akira NISHIOKA

IPC: H01J37/20 ,  G01C9/06

Abstract: A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.

公开(公告)号：US20190103246A1

公开(公告)日：2019-04-04

申请号：US16122189

申请日：2018-09-05

Applicant: Hitachi High-Technologies Corporation

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Tomotaka SHIBAZAKI ,  Hironori OGAWA ,  Naruo WATANABE ,  Takanori KATO

IPC: H01J37/20 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/22 ,  H01J37/261 ,  H01J2237/20207 ,  H01J2237/20221 ,  H01J2237/20292 ,  H01J2237/2482

Abstract: The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism.The invention is directed to a sample stage device having a first table (105) that moves a sample in a first direction, a second driving mechanism (601) that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis (115) that measures the position of the first table, in the second direction.

公开(公告)号：US20180247855A1

公开(公告)日：2018-08-30

申请号：US15902639

申请日：2018-02-22

Applicant: Hitachi High-Technologies Corporation

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Naruo WATANABE ,  Hironori OGAWA ,  Takanori KATO ,  Akira NISHIOKA

IPC: H01L21/687 ,  H01J37/26

CPC classification number: H01L21/68764 ,  H01J37/26 ,  H01J2237/20278 ,  H01L21/68

Abstract: An object of the invention is to provide a stage apparatus that realizes compatibility between long stroke driving and reduction of a burden on a drive mechanism. In order to achieve the above object, there is suggested a stage apparatus including a first table that moves a sample in a first direction, a second table that moves the first table in a second direction different from the first direction, moving mechanisms that move the tables, respectively, a movable body that supports a moving mechanism, and a third moving mechanism that moves the movable body so as to follow the second table.