公开(公告)号：US20160284506A1

公开(公告)日：2016-09-29

申请号：US15075572

申请日：2016-03-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Hironori OGAWA ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Motohiro TAKAHASHI ,  Takanori KATO

IPC: H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/20221 ,  H01J2237/20285

Abstract: A stage apparatus includes a base. A table is movable relative to the base in a predetermined moving direction. A drive mechanism moves the table in the moving direction. A pressing mechanism presses the table in a direction different from the moving direction of the table. A position detection device detects a location of the table. A control device controls the pressing mechanism in accordance with table position information. The control device pinpoints a first location of the table before the table is pressed by the pressing mechanism and a second location of the table after the table is pressed by the pressing mechanism, and controls one or both of the drive mechanism and the pressing mechanism in accordance with a difference between the first and second locations of the table.

Abstract translation: 舞台装置包括底座。 桌子可以相对于基座沿预定的移动方向移动。 驱动机构沿移动方向移动台。 按压机构沿与桌子的移动方向不同的方向按压桌子。 位置检测装置检测台的位置。 控制装置根据表位置信息控制按压机构。 所述控制装置在所述工作台被所述按压机构按压之前，将所述工作台的第一位置指向所述工作台的第一位置，并且在所述工作台被所述按压机构按压之后，所述工作台的第二位置被控制，并且驱动所述驱动机构和所述按压机构 根据表的第一和第二位置之间的差异。

公开(公告)号：US20160005568A1

公开(公告)日：2016-01-07

申请号：US14747364

申请日：2015-06-23

Applicant: Hitachi High-Technologies Corporation

Inventor： Masaki MIZUOCHI ,  Akira NISHIOKA ,  Shuichi NAKAGAWA ,  Hironori OGAWA

IPC: H01J37/20 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J2237/20221 ,  H01J2237/20278

Abstract: A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.

Abstract translation: 舞台系统包括保持物体的平台，通过由流过线圈的电流产生的推力而移动舞台的线性电机机构，以及控制流过线圈的电流的控制部。 在台阶保持在静止状态的状态下流过线圈的电流大于产生大于相对于导轨的台的最大静摩擦力的推力所需的最小电流量。

公开(公告)号：US20190145490A1

公开(公告)日：2019-05-16

申请号：US16099449

申请日：2017-06-14

Applicant: Hitachi High-Technologies Corporation

Inventor： Hiroki TAKAHASHI ,  Shuichi NAKAGAWA ,  Toshihiko SHIMIZU ,  Hironori OGAWA ,  Toshihiro ARISAKA

IPC: F16F15/03 ,  H01J37/16 ,  G03F7/20 ,  F16F7/10

Abstract: The vibration-suppressing mechanism includes: a first arcuate member that has an inner wall surface shaped along an outer wall of a column of a charged particle beam device; a second arcuate member that has an inner wall surface shaped along an outer wall of a column of the charged particle beam device and is connected to the first arcuate member to form an annular member surrounding the outer wall of the column of the charged particle beam device; a fastening member fastening both the first arcuate member and the second arcuate member together; a vibration sensor attached to the arcuate member; and an actuator that operates in response to an output of the vibration sensor, and can be detached by releasing connection obtained by a connecting member.

公开(公告)号：US20150248991A1

公开(公告)日：2015-09-03

申请号：US14626041

申请日：2015-02-19

Applicant: Hitachi High-Technologies Corporation

Inventor： Hironori OGAWA ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Tsukasa SUGAWARA

IPC: H01J37/20 ,  H01J37/02 ,  G01B11/14 ,  H01J37/22

CPC classification number: H01J37/20 ,  G01B9/02021 ,  G01B9/02027 ,  G01B15/00 ,  G01N23/2204 ,  H01J2237/20292 ,  H01J2237/2817

Abstract: To attain the above object, in the present invention, proposed are a stage apparatus including a sample stage that mounts a sample, a first position detection device that detects a position of the sample stage, a second position detection device that detects a position of the sample stage when the sample stage is positioned in a part of a stage movement range that the first position detection device is capable of detecting, and a control device that adjusts an offset amount of the first position detection device on the basis of a position detection result obtained by the second position detection device, and a charged particle beam apparatus using the stage apparatus.

Abstract translation: 为了实现上述目的，在本发明中，提出了一种舞台装置，其包括安装样本的样本台，检测样品台的位置的第一位置检测装置，检测样品台的位置的第二位置检测装置 所述样品台位于所述第一位置检测装置能够检测的台架移动范围的一部分中的控制装置;以及控制装置，其基于位置检测结果来调整所述第一位置检测装置的偏移量 由第二位置检测装置获得的带电粒子束装置和使用该平台装置的带电粒子束装置。

公开(公告)号：US20190252151A1

公开(公告)日：2019-08-15

申请号：US16240898

申请日：2019-01-07

Applicant: Hitachi High-Technologies Corporation

Inventor： Takanori KATO ,  Motohiro TAKAHASHI ,  Naruo WATANABE ,  Akira NISHIOKA ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Hironori OGAWA

IPC: H01J37/04 ,  H01J37/30 ,  H01J37/244 ,  H01J37/304

Abstract: Provided is a charged particle beam apparatus including: an XY stage on which a sample is placed; a charged particle beam source which irradiates the sample with a charged particle beam; a detector which detects charged particles emitted from the sample upon the irradiation with the charged particle beam; an image generator which generates an SEM image of the sample based on a detection signal output by the detector; and a controller configured to set control parameters based on a movement starting point and a movement ending point of the XY stage and control a driving unit for moving the XY stage according to the control parameters.

公开(公告)号：US20200176217A1

公开(公告)日：2020-06-04

申请号：US16683340

申请日：2019-11-14

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Tomotaka SHIBAZAKI ,  Naruo WATANABE ,  Hironori OGAWA ,  Takanori KATO ,  Akira NISHIOKA

IPC: H01J37/20 ,  G01C9/06

Abstract: A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.

公开(公告)号：US20190108970A1

公开(公告)日：2019-04-11

申请号：US16099494

申请日：2017-06-14

Applicant: Hitachi High-Technologies Corporation

Inventor： Takanori KATO ,  Motohiro TAKAHASHI ,  Shuichi NAKAGAWA ,  Hironori OGAWA

IPC: H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28

Abstract: An object of the present invention is to provide a charged particle beam device capable of correcting an image drift caused by stage deformation or the like during imaging immediately after stage movement. In order to achieve the above object, proposed is a charged particle beam device including: a sample chamber; a sample stage arranged in the sample chamber; a charged particle beam source which releases a charged particle beam; a deflector which deflects the charged particle beam released from the charged particle beam source; a focusing lens which focuses the charged particle beam; and a control device that controls the sample stage and the deflector, in which the control device calculates a deflection signal to be supplied to the deflector based on a thrust information when driving of the sample stage and a coefficient assigned for each position of the sample stage.

公开(公告)号：US20190103246A1

公开(公告)日：2019-04-04

申请号：US16122189

申请日：2018-09-05

Applicant: Hitachi High-Technologies Corporation

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Tomotaka SHIBAZAKI ,  Hironori OGAWA ,  Naruo WATANABE ,  Takanori KATO

IPC: H01J37/20 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/22 ,  H01J37/261 ,  H01J2237/20207 ,  H01J2237/20221 ,  H01J2237/20292 ,  H01J2237/2482

Abstract: The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism.The invention is directed to a sample stage device having a first table (105) that moves a sample in a first direction, a second driving mechanism (601) that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis (115) that measures the position of the first table, in the second direction.

公开(公告)号：US20180247855A1

公开(公告)日：2018-08-30

申请号：US15902639

申请日：2018-02-22

Applicant: Hitachi High-Technologies Corporation

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Naruo WATANABE ,  Hironori OGAWA ,  Takanori KATO ,  Akira NISHIOKA

IPC: H01L21/687 ,  H01J37/26

CPC classification number: H01L21/68764 ,  H01J37/26 ,  H01J2237/20278 ,  H01L21/68

Abstract: An object of the invention is to provide a stage apparatus that realizes compatibility between long stroke driving and reduction of a burden on a drive mechanism. In order to achieve the above object, there is suggested a stage apparatus including a first table that moves a sample in a first direction, a second table that moves the first table in a second direction different from the first direction, moving mechanisms that move the tables, respectively, a movable body that supports a moving mechanism, and a third moving mechanism that moves the movable body so as to follow the second table.

公开(公告)号：US20190259567A1

公开(公告)日：2019-08-22

申请号：US16240885

申请日：2019-01-07

Applicant: Hitachi High-Technologies Corporation

Inventor： Motohiro TAKAHASHI ,  Masaki MIZUOCHI ,  Shuichi NAKAGAWA ,  Tomotaka SHIBAZAKI ,  Naruo WATANABE ,  Akira NISHIOKA ,  Takanori KATO ,  Hironori OGAWA

IPC: H01J37/20

Abstract: To provide a lightweight and highly rigid stage device that can move in X and Y directions and a Z direction, and a charged particle beam device including the stage device. A stage device includes a chuck that is loaded with a sample, an XY stage that moves in X and Y directions, and a Z stage that moves in a Z direction. The Z stage includes: an inclined part that is fixed to the XY stage and includes an inclined surface inclined with respect to an XY plane; a movement part that moves on the inclined surface; and a table that is fixed to the movement part and is provided with the a plane parallel to the XY plane.