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公开(公告)号：US08878929B2
公开(公告)日：2014-11-04
申请号：US12787728
申请日：2010-05-26
申请人： Ho Kim , Kwang-Ill Kho , Hee-Wook You , Jae-Myeong Song
发明人： Ho Kim , Kwang-Ill Kho , Hee-Wook You , Jae-Myeong Song
CPC分类号： G01B11/22 , G01B11/2531 , G01S17/36 , G01S17/89 , G06T7/521
摘要： A three dimensional shape measurement apparatus includes m projecting sections, each of which includes a light source and a grating element, and, while moving the grating element by n times, projects a grating pattern light onto a measurement target for each movement, wherein the ‘n’ and the ‘m’ are natural numbers greater than or equal to 2, an imaging section photographing a grating pattern image reflected by the measurement target, and a control section controlling that, while photographing the grating pattern image by using one of the m projecting sections, a grating element of at least another projecting section is moved. Thus, measurement time may be reduced.
摘要翻译： 三维形状测量装置包括m个投影部分，每个投影部分包括光源和光栅元件，并且在将光栅元件移动n次的同时，将光栅图案光投射到每次移动的测量目标上，其中“ n'和'm'是大于或等于2的自然数，拍摄由测量对象反射的光栅图案图像的成像部分，以及控制部，控制在通过使用m 投影部分，至少另一个突出部分的光栅元件被移动。 因此，可以减少测量时间。
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公开(公告)号：US09256912B2
公开(公告)日：2016-02-09
申请号：US12779599
申请日：2010-05-13
申请人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
发明人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
CPC分类号： G06T1/0007 , G01B11/0608 , G01B11/2509 , G01J3/50 , G01N21/8806 , G01N21/95684 , G01N2021/95638 , G01N2021/95646 , G01N2201/0635 , G06T7/0008 , G06T7/521 , G06T2207/10024 , G06T2207/10152 , G06T2207/30152
摘要： In order to measure a measurement target on a PCB, height information of the PCB is acquired by using a first image photographed by illuminating a grating pattern light onto the PCB. Then, a first area protruding on the PCB by greater than a reference height is determined as the measurement target by using the height information. Thereafter, color information of the PCB is acquired by using a second image photographed by illuminating light onto the PCB. Then, the first color information of the first area determined as the measurement target out of the color information of the PCB is set as reference color information. Thereafter, the reference color information is compared with color information of an area except for the first area to judge whether the measurement target is formed in the area except for the first area. Thus, the measurement target may be accurately measured.
摘要翻译： 为了测量PCB上的测量目标，通过使用通过将光栅图案光照射到PCB上拍摄的第一图像来获取PCB的高度信息。 然后，通过使用高度信息，将在PCB上突出大于参考高度的第一区域确定为测量目标。 此后，通过使用通过将光照射到PCB上拍摄的第二图像来获取PCB的颜色信息。 然后，将作为PCB的颜色信息中的测量对象确定的第一区域的第一颜色信息设置为参考颜色信息。 此后，将参考颜色信息与除了第一区域之外的区域的颜色信息进行比较，以判断在除了第一区域之外的区域中是否形成测量对象。 因此，可以精确地测量测量对象。
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3.发明申请公开(公告)号：US20110254949A1
公开(公告)日：2011-10-20
申请号：US13084949
申请日：2011-04-12
申请人： Hee-Wook You
发明人： Hee-Wook You
IPC分类号： H04N7/18
CPC分类号： H04N5/2354 , G01N21/8806 , G01N21/95684 , H04N5/2351 , H04N13/254
摘要： In order to establish a lighting intensity of an inspection apparatus, an inspection board is installed in an inspection apparatus. Then, a width of a histogram of a captured image acquired through a camera of the inspection apparatus is adjusted to avoid from a dark region and a bright region. Thereafter, a lighting intensity of the inspection apparatus is adjusted by adjusting the histogram to be near a middle of a graph. Thus, a setting time of an inspection condition stored in a job file may be reduced to increase the user's convenience, and measurement error due to mis-establishment may be reduced to enhance inspection precision.
摘要翻译： 为了建立检查装置的照明强度，将检查基板安装在检查装置中。 然后，调整通过检查装置的照相机获取的拍摄图像的直方图的宽度，以避免暗区和亮区。 此后，通过将直方图调整为靠近图形的中间部分来调整检查装置的照明强度。 因此，可以减少存储在作业文件中的检查条件的设定时间，以增加用户的便利性，并且可以减少由于错误建立引起的测量误差，从而提高检查精度。
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4.发明授权公开(公告)号：US09124810B2
公开(公告)日：2015-09-01
申请号：US13084949
申请日：2011-04-12
申请人： Hee-Wook You
发明人： Hee-Wook You
IPC分类号： H04N7/18 , H04N5/235 , G01N21/88 , G01N21/956 , H04N13/02
CPC分类号： H04N5/2354 , G01N21/8806 , G01N21/95684 , H04N5/2351 , H04N13/254
摘要： In order to establish a lighting intensity of an inspection apparatus, an inspection board is installed in an inspection apparatus. Then, a width of a histogram of a captured image acquired through a camera of the inspection apparatus is adjusted to avoid from a dark region and a bright region. Thereafter, a lighting intensity of the inspection apparatus is adjusted by adjusting the histogram to be near a middle of a graph. Thus, a setting time of an inspection condition stored in a job file may be reduced to increase the user's convenience, and measurement error due to mis-establishment may be reduced to enhance inspection precision.
摘要翻译： 为了建立检查装置的照明强度，将检查基板安装在检查装置中。 然后，调整通过检查装置的照相机获取的拍摄图像的直方图的宽度，以避免暗区和亮区。 此后，通过将直方图调整为靠近图形的中间部分来调整检查装置的照明强度。 因此，可以减少存储在作业文件中的检查条件的设定时间，以增加用户的便利性，并且可以减少由于错误建立引起的测量误差，从而提高检查精度。
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公开(公告)号：US08644590B2
公开(公告)日：2014-02-04
申请号：US13619161
申请日：2012-09-14
申请人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
发明人： Joong-Ki Jeong , Min-Young Kim , Hee-Wook You
CPC分类号： G06T1/0007 , G01B11/0608 , G01B11/2509 , G01J3/50 , G01N21/8806 , G01N21/95684 , G01N2021/95638 , G01N2021/95646 , G01N2201/0635 , G06T7/0008 , G06T7/521 , G06T2207/10024 , G06T2207/10152 , G06T2207/30152
摘要： In order to measure a measurement target on a PCB, height information of the PCB is acquired by using a first image photographed by illuminating a grating pattern light onto the PCB. Then, a first area protruding on the PCB by greater than a reference height is determined as the measurement target by using the height information. Thereafter, color information of the PCB is acquired by using a second image photographed by illuminating light onto the PCB. Then, the first color information of the first area determined as the measurement target out of the color information of the PCB is set as reference color information. Thereafter, the reference color information is compared with color information of an area except for the first area to judge whether the measurement target is formed in the area except for the first area. Thus, the measurement target may be accurately measured.
摘要翻译： 为了测量PCB上的测量目标，通过使用通过将光栅图案光照射到PCB上拍摄的第一图像来获取PCB的高度信息。 然后，通过使用高度信息，将在PCB上突出大于参考高度的第一区域确定为测量目标。 此后，通过使用通过将光照射到PCB上拍摄的第二图像来获取PCB的颜色信息。 然后，将作为PCB的颜色信息中的测量对象确定的第一区域的第一颜色信息设置为参考颜色信息。 此后，将参考颜色信息与除了第一区域之外的区域的颜色信息进行比较，以判断在除了第一区域之外的区域中是否形成测量对象。 因此，可以精确地测量测量对象。
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公开(公告)号：US09885669B2
公开(公告)日：2018-02-06
申请号：US13977499
申请日：2011-12-29
申请人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
发明人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
CPC分类号： G01N21/9501 , G01B11/0608 , G01B11/25 , H05K13/08
摘要： A method of inspecting a substrate is disclosed. The method is performed by a substrate-inspecting apparatus having at least one projecting module projecting a patterned light onto a substrate fixed on a stage and an inspecting module with a camera capturing an image, and inspecting a plurality of inspection regions of the substrate step by step. The method comprises, setting an inspection order of the inspecting regions according to a lengthwise direction of the substrate, estimating height displacement of a target inspection region by using a tendency information regarding at least one previous inspection region that is already inspected, adjusting height of the inspecting module by using the estimated height displacement of the target inspection region, and inspecting the target inspection region by using the inspecting module of which height is adjusted. Therefore, inspection time is reduced.
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公开(公告)号：US20140009601A1
公开(公告)日：2014-01-09
申请号：US13977499
申请日：2011-12-29
申请人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
发明人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01B11/0608 , G01B11/25 , H05K13/08
摘要： A method of inspecting a substrate is disclosed. The method is performed by a substrate-inspecting apparatus having at least one projecting module projecting a patterned light onto a substrate fixed on a stage and an inspecting module with a camera capturing an image, and inspecting a plurality of inspection regions of the substrate step by step. The method comprises, setting an inspection order of the inspecting regions according to a lengthwise direction of the substrate, estimating height displacement of a target inspection region by using a tendency information regarding at least one previous inspection region that is already inspected, adjusting height of the inspecting module by using the estimated height displacement of the target inspection region, and inspecting the target inspection region by using the inspecting module of which height is adjusted. Therefore, inspection time is reduced.
摘要翻译： 公开了一种检查基板的方法。 该方法由具有至少一个投影模块的基板检查装置执行，所述至少一个投影模块将图案化的光投影到固定在平台上的基板上，以及具有拍摄图像的相机的检查模块，并且通过以下步骤检查基板步骤的多个检查区域： 步。 该方法包括：根据基板的长度方向设定检查区域的检查顺序，通过使用关于已经检查的至少一个以前检查区域的倾向信息来估计目标检查区域的高度位移，调整高度 通过使用目标检查区域的估计高度位移来检查模块，并且使用调整了哪个高度的检查模块来检查目标检查区域。 因此，检查时间缩短。
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