公开(公告)号：US07094634B2

公开(公告)日：2006-08-22

申请号：US10710277

申请日：2004-06-30

申请人： Huilong Zhu ,  Bruce B. Doris ,  Meikei Ieong ,  Phillip J. Oldiges ,  Min Yang

发明人： Huilong Zhu ,  Bruce B. Doris ,  Meikei Ieong ,  Phillip J. Oldiges ,  Min Yang

IPC分类号： H01L21/84 ,  H01L21/00

CPC分类号： H01L21/76254 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02538 ,  H01L21/02639 ,  H01L21/84 ,  H01L29/045 ,  H01L29/785 ,  Y10T428/249921 ,  Y10T428/249922

摘要： The present invention provides a method of forming a substantially planar SOI substrate having multiple crystallographic orientations including the steps of providing a multiple orientation surface atop a single orientation layer, the multiple orientation surface comprising a first device region contacting and having a same crystal orientation as the single orientation layer, and a second device region separated from the first device region and the single orientation layer by an insulating material, wherein the first device region and the second device region have different crystal orientations; producing a damaged interface in the single orientation layer; bonding a wafer to the multiple orientation surface; separating the single orientation layer at the damaged interface; wherein a damaged surface of said single orientation layer remains; and planarizing the damaged surface until a surface of the first device region is substantially coplanar to a surface of the second device region.

公开(公告)号：US07691482B2

公开(公告)日：2010-04-06

申请号：US11473835

申请日：2006-06-23

申请人： Huilong Zhu ,  Bruce B. Doris ,  Meikei Ieong ,  Philip J. Oldiges ,  Min Yang

发明人： Huilong Zhu ,  Bruce B. Doris ,  Meikei Ieong ,  Philip J. Oldiges ,  Min Yang

IPC分类号： B32B9/04 ,  H01L27/12

CPC分类号： H01L21/76254 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02538 ,  H01L21/02639 ,  H01L21/84 ,  H01L29/045 ,  H01L29/785 ,  Y10T428/249921 ,  Y10T428/249922

摘要： The present invention provides a method of forming a substantially planar SOI substrate having multiple crystallographic orientations including the steps of providing a multiple orientation surface atop a single orientation layer, the multiple orientation surface comprising a first device region contacting and having a same crystal orientation as the single orientation layer, and a second device region separated from the first device region and the single orientation layer by an insulating material, wherein the first device region and the second device region have different crystal orientations; producing a damaged interface in the single orientation layer; bonding a wafer to the multiple orientation surface; separating the single orientation layer at the damaged interface; wherein a damaged surface of said single orientation layer remains; and planarizing the damaged surface until a surface of the first device region is substantially coplanar to a surface of the second device region.

摘要翻译： 本发明提供一种形成具有多个结晶取向的基本上平面的SOI衬底的方法，包括以下步骤：在单个取向层的顶部提供多个取向表面，所述多个取向表面包括与第一器件区域接触并具有与 单取向层和通过绝缘材料与第一器件区域和单取向层分离的第二器件区域，其中第一器件区域和第二器件区域具有不同的晶体取向; 在单取向层产生损坏的界面; 将晶片接合到所述多个取向表面; 在损坏的界面处分离单个取向层; 其中所述单取向层的损伤表面保留; 以及平坦化损坏的表面，直到第一器件区域的表面基本上与第二器件区域的表面共面。

公开(公告)号：US07220626B2

公开(公告)日：2007-05-22

申请号：US10905978

申请日：2005-01-28

申请人： Huilong Zhu ,  Bruce B. Doris ,  Philip J. Oldiges ,  Meikei Ieong ,  Min Yang ,  Huajie Chen

发明人： Huilong Zhu ,  Bruce B. Doris ,  Philip J. Oldiges ,  Meikei Ieong ,  Min Yang ,  Huajie Chen

IPC分类号： H01L21/84

CPC分类号： H01L27/1203 ,  H01L21/823807 ,  H01L21/84 ,  H01L27/1207 ,  Y10S438/938

摘要： The present invention provides a method of forming a semiconducting substrate including the steps of providing an initial structure having first device region comprising a first orientation material and a second device region having a second orientation material; forming a first concentration of lattice modifying material atop the first orientation material; forming a second concentration of the lattice modifying material atop the second orientation material; intermixing the first concentration of lattice modifying material with the first orientation material to produce a first lattice dimension surface and the second concentration of lattice modifying material the second orientation material to produce a second lattice dimension surface; and forming a first strained semiconducting layer atop the first lattice dimension surface and a second strained semiconducting layer atop the second lattice dimension surface.

摘要翻译： 本发明提供一种形成半导体衬底的方法，包括以下步骤：提供具有包括第一取向材料的第一器件区域和具有第二取向材料的第二器件区域的初始结构; 在所述第一取向材料的顶部上形成晶格改性材料的第一浓度; 在所述第二取向材料的顶部上形成所述晶格改性材料的第二浓度; 将所述晶格修饰材料的第一浓度与所述第一取向材料混合以产生第一晶格尺寸表面，并且所述第二浓度的晶格修饰材料形成所述第二取向材料以产生第二晶格尺寸表面; 以及在所述第一晶格尺寸表面上方形成第一应变半导体层和在所述第二晶格尺寸表面顶部形成第二应变半导体层。

公开(公告)号：US07713807B2

公开(公告)日：2010-05-11

申请号：US11958877

申请日：2007-12-18

申请人： Bruce B. Doris ,  Kathryn W. Guarini ,  Meikei Ieong ,  Shreesh Narasimha ,  Kern Rim ,  Jeffrey W. Sleight ,  Min Yang

发明人： Bruce B. Doris ,  Kathryn W. Guarini ,  Meikei Ieong ,  Shreesh Narasimha ,  Kern Rim ,  Jeffrey W. Sleight ,  Min Yang

IPC分类号： H01L21/8238

CPC分类号： H01L21/76275 ,  H01L21/823807 ,  H01L21/84

摘要： An integrated semiconductor structure containing at least one device formed upon a first crystallographic surface that is optimal for that device, while another device is formed upon a second different crystallographic surface that is optimal for the other device is provided. The method of forming the integrated structure includes providing a bonded substrate including at least a first semiconductor layer of a first crystallographic orientation and a second semiconductor layer of a second different crystallographic orientation. A portion of the bonded substrate is protected to define a first device area, while another portion of the bonded substrate is unprotected. The unprotected portion of the bonded substrate is then etched to expose a surface of the second semiconductor layer and a semiconductor material is regrown on the exposed surface. Following planarization, a first semiconductor device is formed in the first device region and a second semiconductor device is formed on the regrown material.

摘要翻译： 提供包含至少一个器件的集成半导体结构，所述器件形成在对于该器件最佳的第一晶体表面上，而另一器件形成在对于另一器件最佳的第二不同晶体表面上。 形成集成结构的方法包括提供包括至少第一晶体取向的第一半导体层和第二不同晶体取向的第二半导体层的键合衬底。 键合衬底的一部分被保护以限定第一器件区域，而键合衬底的另一部分是未受保护的。 然后蚀刻键合衬底的未保护部分以暴露第二半导体层的表面，并将半导体材料重新生长在暴露表面上。 在平坦化之后，在第一器件区域中形成第一半导体器件，并且在再生长材料上形成第二半导体器件。

公开(公告)号：US07485506B2

公开(公告)日：2009-02-03

申请号：US11866786

申请日：2007-10-03

申请人： Bruce B. Doris ,  Meikei Ieong ,  Edward J. Nowak ,  Min Yang

发明人： Bruce B. Doris ,  Meikei Ieong ,  Edward J. Nowak ,  Min Yang

IPC分类号： H01L21/00

CPC分类号： H01L21/76251 ,  H01L21/76243 ,  H01L21/823807 ,  H01L21/823878 ,  H01L21/84 ,  H01L29/045 ,  H01L29/785

摘要： A hybrid substrate having a high-mobility surface for use with planar and/or multiple-gate metal oxide semiconductor field effect transistors (MOSFETs) is provided. The hybrid substrate has a first surface portion that is optimal for n-type devices, and a second surface portion that is optimal for p-type devices. Due to proper surface and wafer flat orientations in each semiconductor layers of the hybrid substrate, all gates of the devices are oriented in the same direction and all channels are located on the high mobility surface. The present invention also provides for a method of fabricating the hybrid substrate as well as a method of integrating at least one planar or multiple-gate MOSFET thereon.

摘要翻译： 提供了具有用于平面和/或多栅极金属氧化物半导体场效应晶体管（MOSFET）的高迁移率表面的混合衬底。 混合基板具有对于n型器件是最佳的第一表面部分和对于p型器件是最佳的第二表面部分。 由于混合衬底的每个半导体层中的适当的表面和晶片平坦取向，器件的所有栅极被定向在相同的方向上，并且所有沟道都位于高迁移率表面上。 本发明还提供了一种制造混合衬底的方法以及在其上集成至少一个平面或多栅极MOSFET的方法。

公开(公告)号：US07459752B2

公开(公告)日：2008-12-02

申请号：US11473757

申请日：2006-06-23

申请人： Bruce B. Doris ,  Meikei Ieong ,  Zhibin Ren ,  Paul M. Solomon ,  Min Yang

发明人： Bruce B. Doris ,  Meikei Ieong ,  Zhibin Ren ,  Paul M. Solomon ,  Min Yang

IPC分类号： H01L27/12

CPC分类号： H01L29/78696 ,  H01L29/66545 ,  H01L29/66772

摘要： Ultra thin body fully-depleted silicon-on-insulator (SOI) metal-oxide-semiconductor field-effect-transistors (MOSFETs) in which the SOI thickness changes with gate-length variations thereby minimizing the threshold voltage variations that are typically caused by SOI thickness and gate-length variations are provided. Such a SOI MOSFET may include a SOI substrate having a SOI layer in which a first portion thereof has a thickness of less than 20 nm; a gate including a gate dielectric and a gate electrode located atop the first portion of the SOI layer having the thickness, the gate electrode having an upper surface and a bottom surface that have the same length or the bottom surface has a length that is greater than the upper surface; and source and drain diffusion regions located in a second portion of the SOI layer that is adjacent to the first portion, and the second portion of the SOI layer is thicker than the first portion.

摘要翻译： 超薄体绝缘体（SOI）金属氧化物半导体场效应晶体管（MOSFET），其中SOI厚度随栅极长度变化而变化，从而最小化通常由SOI引起的阈值电压变化 提供了厚度和栅极长度的变化。 这样的SOI MOSFET可以包括具有SOI层的SOI衬底，其中第一部分的厚度小于20nm; 包括栅电介质的栅极和位于具有厚度的SOI层的第一部分顶部的栅电极，栅极具有具有相同长度或底表面的上表面和底表面，其长度大于 上表面 以及位于SOI层的与第一部分相邻的第二部分中的源极和漏极扩散区，并且SOI层的第二部分比第一部分厚。

公开(公告)号：US07091069B2

公开(公告)日：2006-08-15

申请号：US10710273

申请日：2004-06-30

申请人： Bruce B. Doris ,  Meikei Ieong ,  Zhibin Ren ,  Paul M. Solomon ,  Min Yang

发明人： Bruce B. Doris ,  Meikei Ieong ,  Zhibin Ren ,  Paul M. Solomon ,  Min Yang

IPC分类号： H01L27/01 ,  H01L21/00 ,  H01L21/356

CPC分类号： H01L29/78696 ,  H01L29/66545 ,  H01L29/66772

摘要： A method of creating ultra tin body fully-depleted SOI MOSFETs in which the SOI thickness changes with gate-length variations thereby minimizing the threshold voltage variations that are typically caused by SOI thickness and gate-length variations is provided. The method of present invention uses a replacement gate process in which nitrogen is implanted to selectively retard oxidation during formation of a recessed channel. A self-limited chemical oxide removal (COR) processing step can be used to improve the control in the recessed channel step. If the channel is doped, the inventive method is designed such that the thickness of the SOI layer is increased with shorter channel length. If the channel is undoped or counter-doped, the inventive method is designed such that the thickness of the SOI layer is decreased with shorter channel length.

摘要翻译： 提供了一种制造超薄体全耗尽SOI SOI的方法，其中SOI厚度随着栅极长度变化而变化，从而最小化通常由SOI厚度和栅极长度变化引起的阈值电压变化。 本发明的方法使用其中注入氮的替代浇口工艺，以便在形成凹陷通道期间选择性地延迟氧化。 可以使用自限制化学氧化物去除（COR）处理步骤来改善凹陷通道步骤中的控制。 如果沟道被掺杂，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的增加而增加。 如果通道是未掺杂或反掺杂的，则本发明的方法被设计成使得SOI层的厚度随着沟道长度的减小而减小。

公开(公告)号：US07329923B2

公开(公告)日：2008-02-12

申请号：US10250241

申请日：2003-06-17

申请人： Bruce B. Doris ,  Kathryn W. Guarini ,  Meikei Ieong ,  Shreesh Narasimha ,  Kern Rim ,  Jeffrey W. Sleight ,  Min Yang

发明人： Bruce B. Doris ,  Kathryn W. Guarini ,  Meikei Ieong ,  Shreesh Narasimha ,  Kern Rim ,  Jeffrey W. Sleight ,  Min Yang

IPC分类号： H01L27/01

CPC分类号： H01L21/76275 ,  H01L21/823807 ,  H01L21/84

摘要： An integrated semiconductor structure containing at least one device formed upon a first crystallographic surface that is optimal for that device, while another device is formed upon a second different crystallographic surface that is optimal for the other device is provided. The method of forming the integrated structure includes providing a bonded substrate including at least a first semiconductor layer of a first crystallographic orientation and a second semiconductor layer of a second different crystallographic orientation. A portion of the bonded substrate is protected to define a first device area, while another portion of the bonded substrate is unprotected. The unprotected portion of the bonded substrate is then etched to expose a surface of the second semiconductor layer and a semiconductor material is regrown on the exposed surface. Following planarization, a first semiconductor device is formed in the first device region and a second semiconductor device is formed on the regrown material.

摘要翻译： 提供包含至少一个器件的集成半导体结构，所述器件形成在对于该器件最佳的第一晶体表面上，而另一器件形成在对于另一器件最佳的第二不同晶体表面上。 形成集成结构的方法包括提供包括至少第一晶体取向的第一半导体层和第二不同晶体取向的第二半导体层的键合衬底。 键合衬底的一部分被保护以限定第一器件区域，而键合衬底的另一部分是未受保护的。 然后蚀刻键合衬底的未保护部分以暴露第二半导体层的表面，并将半导体材料重新生长在暴露表面上。 在平坦化之后，在第一器件区域中形成第一半导体器件，并且在再生长材料上形成第二半导体器件。

公开(公告)号：US07291886B2

公开(公告)日：2007-11-06

申请号：US10872605

申请日：2004-06-21

申请人： Bruce B. Doris ,  Meikei Ieong ,  Edward J. Nowak ,  Min Yang

发明人： Bruce B. Doris ,  Meikei Ieong ,  Edward J. Nowak ,  Min Yang

IPC分类号： H01L27/01 ,  H01L27/12

CPC分类号： H01L21/76251 ,  H01L21/76243 ,  H01L21/823807 ,  H01L21/823878 ,  H01L21/84 ,  H01L29/045 ,  H01L29/785

摘要： A hybrid substrate having a high-mobility surface for use with planar and/or multiple-gate metal oxide semiconductor field effect transistors (MOSFETs) is provided. The hybrid substrate has a first surface portion that is optimal for n-type devices, and a second surface portion that is optimal for p-type devices. Due to proper surface and wafer flat orientations in each semiconductor layers of the hybrid substrate, all gates of the devices are oriented in the same direction and all channels are located on the high mobility surface. The present invention also provides for a method of fabricating the hybrid substrate as well as a method of integrating at least one planar or multiple-gate MOSFET thereon.

摘要翻译： 提供了具有用于平面和/或多栅极金属氧化物半导体场效应晶体管（MOSFET）的高迁移率表面的混合衬底。 混合基板具有对于n型器件是最佳的第一表面部分和对于p型器件是最佳的第二表面部分。 由于混合衬底的每个半导体层中的适当的表面和晶片平坦取向，器件的所有栅极被定向在相同的方向上，并且所有沟道都位于高迁移率表面上。 本发明还提供了一种制造混合衬底的方法以及在其上集成至少一个平面或多栅极MOSFET的方法。

公开(公告)号：US06911383B2

公开(公告)日：2005-06-28

申请号：US10604097

申请日：2003-06-26

申请人： Bruce B. Doris ,  Diane C. Boyd ,  Meikei Ieong ,  Thomas S. Kanarsky ,  Jakub T. Kedzierski ,  Min Yang

发明人： Bruce B. Doris ,  Diane C. Boyd ,  Meikei Ieong ,  Thomas S. Kanarsky ,  Jakub T. Kedzierski ,  Min Yang

IPC分类号： H01L29/423 ,  H01L21/336 ,  H01L21/8234 ,  H01L21/84 ,  H01L27/08 ,  H01L27/088 ,  H01L27/12 ,  H01L29/49 ,  H01L29/786 ,  H01L21/3205

CPC分类号： H01L27/1211 ,  H01L21/845 ,  H01L29/66795 ,  H01L29/785

摘要： The present invention provides an integrated semiconductor circuit containing a planar single gated FET and a FinFET located on the same SOI substrate. Specifically, the integrated semiconductor circuit includes a FinFET and a planar single gated FET located atop a buried insulating layer of an silicon-on-insulator substrate, the planar single gated FET is located on a surface of a patterned top semiconductor layer of the silicon-on-insulator substrate and the FinFET has a vertical channel that is perpendicular to the planar single gated FET. A method of forming a method such an integrated circuit is also provided. In the method, resist imaging and a patterned hard mask are used in trimming the width of the FinFET active device region and subsequent resist imaging and etching are used in thinning the thickness of the FET device area. The trimmed active FinFET device region is formed such that it lies perpendicular to the thinned planar single gated FET device region.

摘要翻译： 本发明提供一种集成半导体电路，其包含位于同一SOI衬底上的平面单栅极FET和FinFET。 具体地，集成半导体电路包括FinFET和位于绝缘体上硅衬底的掩埋绝缘层顶上的平面单栅极FET，平面单门控FET位于硅 - 硅绝缘体的图案化顶部半导体层的表面上， 绝缘体上的衬底和FinFET具有垂直于平面单门控FET的垂直沟道。 还提供了一种形成集成电路的方法。 在该方法中，抗蚀剂成像和图案化的硬掩模用于修整FinFET有源器件区域的宽度，并且随后的抗蚀剂成像和蚀刻用于减薄FET器件区域的厚度。 经修整的有源FinFET器件区域形成为垂直于薄化的平面单栅极FET器件区域。