公开(公告)号：US07397557B2

公开(公告)日：2008-07-08

申请号：US11145873

申请日：2005-06-06

申请人： Hwan J. Jeong ,  Andrew V. Hill ,  Mark S. Wang

发明人： Hwan J. Jeong ,  Andrew V. Hill ,  Mark S. Wang

IPC分类号： G01N21/00 ,  G02B27/46

CPC分类号： G01N21/95623

摘要： Serrated Fourier filters and inspection systems are provided. One Fourier filter includes one or more blocking elements configured to block a portion of light from a wafer. The Fourier filter also includes periodic serrations formed on edges of the one or more blocking elements. The periodic serrations define a transition region of the one or more blocking elements. The periodic serrations are configured to vary transmission across the transition region such that variations in the transmission across the transition region are substantially smooth. One inspection system includes a Fourier filter configured as described above and a detector that is configured to detect light transmitted by the Fourier filter. Signals generated by the detector can be used to detect the defects on the wafer.

摘要翻译： 提供锯齿傅立叶滤波器和检测系统。 一个傅立叶滤波器包括被配置为阻挡来自晶片的一部分光的一个或多个阻挡元件。 傅立叶滤波器还包括形成在一个或多个阻挡元件的边缘上的周期性锯齿。 周期性锯齿限定了一个或多个阻挡元件的过渡区域。 周期性锯齿被配置为改变穿过过渡区域的传输，使得跨越过渡区域的透射率的变化基本上是平滑的。 一个检查系统包括如上所述构造的傅里叶滤波器和被配置为检测由傅里叶滤波器发送的光的检测器。 由检测器产生的信号可用于检测晶片上的缺陷。

公开(公告)号：US20130278942A1

公开(公告)日：2013-10-24

申请号：US13454870

申请日：2012-04-24

申请人： Hwan J. Jeong ,  Silvio J. Rabello ,  Thomas Andre Casavant

发明人： Hwan J. Jeong ,  Silvio J. Rabello ,  Thomas Andre Casavant

IPC分类号： G01B11/14

CPC分类号： G03F7/70633

摘要： A dark field diffraction based overlay metrology device illuminates an overlay target that has at least three pads for an axis, the three pads having different programmed offsets. The overlay target may be illuminated using two obliquely incident beams of light from opposite azimuth angles or using normally incident light. Two dark field images of the overlay target are collected using ±1st diffraction orders to produce at least six independent signals. For example, the +1st diffraction order may be collected from one obliquely incident beam of light and the −1st diffraction order may be collected from the other obliquely incident beam of light. Alternatively, the ±1st diffraction orders may be separately detected from the normally incident light to produce the two dark field images of the overlay target. The six independent signals from the overlay target are used to determine an overlay error for the sample along the axis.

摘要翻译： 基于暗场衍射的覆盖测量装置照亮具有用于轴的至少三个焊盘的覆盖目标，所述三个焊盘具有不同的编程偏移。 可以使用来自相反方位角的两个倾斜入射光束或使用正常入射的光照亮覆盖目标。 使用±1衍射级收集覆盖目标的两个暗场图像以产生至少六个独立信号。 例如，可以从一个倾斜入射光束收集+ 1衍射级，并且可以从另一个倾斜入射光束收集第一衍射级。 或者，可以从正常入射光单独地检测±1衍射级，以产生覆盖目标的两个暗视场图像。 来自覆盖目标的六个独立信号用于确定沿着轴的样本的覆盖误差。

公开(公告)号：US06907167B2

公开(公告)日：2005-06-14

申请号：US09765544

申请日：2001-01-19

申请人： Hwan J. Jeong ,  Xing Chen

发明人： Hwan J. Jeong ,  Xing Chen

IPC分类号： H04J14/02 ,  G20B6/42

CPC分类号： H04J14/02 ,  G02B6/2934 ,  G02B6/29349 ,  G02B6/29353 ,  G02B6/29358 ,  G02B6/29386 ,  H04J14/0208 ,  H04J14/0213

摘要： An optical interleaver is described, comprising a splitting element for splitting an incident beam into a first optical signal directed along a first path and a second optical signal directed along a second path, a first resonant element positioned along the first path, a second resonant element positioned along the second path, and a combining element positioned to receive and to interferometrically combine the outputs of the first and second resonant to produce the output signal. The optical interleaver may be implemented using a free-space configuration using a beamsplitter and a plurality of resonant cavities such as asymmetric Fabry-Perot resonators or Michelson-Gires-Tournois resonators. In an alternative preferred embodiment, the optical interleaver may be implemented in a Mach-Zender-style configuration using couplers and fiber ring resonators.

摘要翻译： 描述了一种光学交织器，其包括用于将入射光束分成沿着第一路径定向的第一光信号和沿着第二路径引导的第二光信号的分离元件，沿着第一路径定位的第一谐振元件，第二谐振元件 以及组合元件，其被定位成接收和干涉地组合第一和第二谐振的输出以产生输出信号。 光交错器可以使用使用分束器和多个谐振腔的自由空间配置来实现，例如非对称法布里 - 珀罗谐振器或迈克尔逊 - 雷尔 - 波尔诺斯谐振器。 在替代的优选实施例中，光交错器可以使用耦合器和光纤环形谐振器以马赫 - 祖德式配置来实现。

公开(公告)号：US06381077B1

公开(公告)日：2002-04-30

申请号：US09543609

申请日：2000-04-05

申请人： Hwan J. Jeong ,  David A. Markle

发明人： Hwan J. Jeong ,  David A. Markle

IPC分类号： G03B2742

CPC分类号： G02B17/008 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70358

摘要： A simple −1X, catadioptric projection relay system (e.g., a modified Wynne-Dyson relay) is combined with a linear scanning and object and image indexing systems to provide good imagery over a useful field which is two or more times wider than the field size of the projection system and arbitrarily long. The projection system has opposed and parallel object and image planes and produces an image in which object and image vectors in one direction are parallel and in a normal direction are opposed. The reticle and substrate are clamped and scanned together in the parallel direction and are indexed in the normal direction by equal and opposite amounts between scans. An example shows how a 2.5 micron resolution, i-line projection system with a 300 mm wide field could be used to expose a 550 mm wide substrate In two scans to yield a very high throughput.

摘要翻译： 一个简单的-1X，反射折射投影中继系统（例如，修改后的Wynne-Dyson继电器）与线性扫描和物体和图像索引系统相结合，可以在比场尺寸宽两倍或更多倍的有用领域提供良好的图像 的投影系统和任意长。 投影系统具有相对和平行的对象和图像平面，并产生一个方向上的物体和图像矢量平行并且在正常方向相反的图像。 将掩模版和基板沿着平行方向夹持并扫描在一起，并且在正常方向上通过扫描之间相等和相反的量进行索引。 一个例子展示了如何使用宽度为300 mm的2.5 mm分辨率的i线投影系统来曝光550 mm宽的基板。在两次扫描中，可以获得非常高的吞吐量。

公开(公告)号：US5822066A

公开(公告)日：1998-10-13

申请号：US806663

申请日：1997-02-26

申请人： Hwan J. Jeong ,  David A. Markle

发明人： Hwan J. Jeong ,  David A. Markle

IPC分类号： G01B9/02 ,  G01B11/255

CPC分类号： G01B11/255 ,  G01B9/02024 ,  G01B9/02039 ,  G01B9/02049 ,  G01B9/02065 ,  G01B9/02074 ,  G01B2290/70

摘要： This invention includes a pin mirror arranged to receive light, preferably from a laser source. The pin mirror has a reflective surface that diffracts and reflects the received light to generate a diffraction-limited spherical wavefront. The pin mirror can reflect the wavefront in a predetermined direction by angling the pin mirror's reflective surface with respect to the direction of travel of the light incident to the pin mirror. The capability of the pin mirror to generate a diffraction-limited spherical wavefront and to direct the wavefront in a predetermined direction provides the capability to test objects or systems with relatively high numerical apertures, and yet allows for a reduction in the number and criticality of the properties of optical elements that would otherwise be required in an interferometer. The invention also includes several embodiments of interferometers that incorporate one or more pin mirrors to generate probe and reference beams used to generate an interference pattern indicative of one or more characteristics of a test object or system.

摘要翻译： 本发明包括布置成接收来自激光源的光的针镜。 针镜具有衍射和反射接收的光以产生衍射极限球面波前的反射表面。 针镜可以相对于入射到针镜的光的行进方向通过使针镜的反射表面倾斜来在预定方向上反射波前。 针反射镜产生衍射极限球面波前并沿预定方向引导波阵面的能力提供了测试具有相对较高数值孔径的物体或系统的能力，并且允许降低数字和数值孔径的数量和关键性 否则在干涉仪中需要的光学元件的特性。 本发明还包括干涉仪的几个实施例，其包括一个或多个针镜以产生用于产生指示测试对象或系统的一个或多个特性的干涉图案的探针和参考光束。

公开(公告)号：US09304410B2

公开(公告)日：2016-04-05

申请号：US14143139

申请日：2013-12-30

申请人： David A. Markle ,  Rudolf H. Hendel ,  John S. Petersen ,  Hwan J. Jeong

发明人： David A. Markle ,  Rudolf H. Hendel ,  John S. Petersen ,  Hwan J. Jeong

IPC分类号： G03B27/32 ,  G03B27/54 ,  G03C5/00 ,  G03F7/20

CPC分类号： G03F7/7045 ,  G03F7/70191 ,  G03F7/70291 ,  G03F7/70375 ,  G03F7/70383 ,  G03F7/70408 ,  G03F7/70466

摘要： Direct-write lithography apparatus and methods are disclosed in which a transducer image and an image of crossed interference fringe patterns are superimposed on a photoresist layer supported by a substrate. The transducer image has an exposure wavelength and contains bright spots, each corresponding to an activated pixel. The interference image has an inhibition wavelength and contains dark spots where the null points in the crossed interference fringes coincide. The dark spots are aligned with and trim the peripheries of the corresponding bright spot to form sub-resolution photoresist pixels having a size smaller than would be formed in the absence of the dark spots.

公开(公告)号：US20110075928A1

公开(公告)日：2011-03-31

申请号：US12924244

申请日：2010-09-23

申请人： Hwan J. Jeong ,  David A. Markle

发明人： Hwan J. Jeong ,  David A. Markle

IPC分类号： G06K9/00 ,  G01B9/02 ,  G06K9/40

CPC分类号： G02B27/58 ,  A61B6/5282

摘要： High-resolution, common-path interferometric imaging systems and methods are described, wherein a light source generates and directs light toward a sample. An optical imaging system collects the resultant substantially scattered component and substantially unscattered component. A variable phase shifting system is used to adjust the relative phase of the scattered and unscattered light components. The interfered components are sensed by an image sensing system. The process is repeated multiple times with different phase shifts to form corresponding multiple electronic signals representative of raw sample images. The raw sample images are then processed by a signal processor to form a processed image, where each image pixel has an amplitude and a phase. This picture can be displayed directly using some combination of brightness and color to represent amplitude and phase. Multiple processed images, each corresponding to a different illumination azimuth angle, can be combined to substantially extend the resolution. The technique permits the optical aberrations in the imaging system to be measured and removed from each picture. The addition of phase and amplitude to microscopic images is expected to extend both the depth and breadth of the many applications of optical microscopy.

摘要翻译： 描述了高分辨率，共轨干涉成像系统和方法，其中光源产生并将光引导到样品。 光学成像系统收集所得到的基本上分散的部件和基本上未散射的部件。 可变相移系统用于调节散射和未散射的光分量的相对相位。 受干扰的部件由图像感测系统感测。 该过程以不同的相移重复多次，以形成代表原始样本图像的相应的多个电子信号。 然后，原始样本图像由信号处理器处理以形成经处理的图像，其中每个图像像素具有振幅和相位。 该图片可以直接使用亮度和颜色的一些组合来显示振幅和相位。 可以组合各自对应于不同照明方位角的多个经处理的图像，以基本上扩展分辨率。 该技术允许从每个图像测量和去除成像系统中的光学像差。 相位和幅度对显微镜图像的添加有望延长光学显微镜的许多应用的深度和宽度。

公开(公告)号：US5329332A

公开(公告)日：1994-07-12

申请号：US994238

申请日：1992-12-21

申请人： David A. Markle ,  Gerald J. Alonzo ,  Hwan J. Jeong

发明人： David A. Markle ,  Gerald J. Alonzo ,  Hwan J. Jeong

IPC分类号： G03F7/20 ,  G03F9/00 ,  G03B27/42

CPC分类号： G03F7/70225 ,  G03F9/70

摘要： Disclosed is tilt-sensing means that employs a point source of alternate 1st or 2nd divergent light beams which, after passing through collimating lenses of the Half-Field Dyson projection optics of the stepper, are separately incident on and reflected from a reflective pattern disposed on the surface of a reticle and from a reflective surface of a wafer, together with two-dimensional position detection means responsive to the position of each of the reflected alternate 1st or 2nd divergent light beams, for independently sensing the angular position of the surface of the reticle and the angular position of the surface of the wafer to determine thereby whether or not the surface of the reticle and the surface of the wafer are substantially parallel to one another. This permits adjustment means of the stepper, which is responsive to the respective surfaces having been determined by the tilt-sensing means to be not parallel to one another, to angularly adjust the angular position of at least one of the reticle and the wafer to bring the respective surfaces thereof into a substantially parallel relationship with one another.

摘要翻译： 公开了倾斜感测装置，其采用交替的第一或第二发散光束的点源，其在通过步进器的半场戴森投影光学器件的准直透镜之后分别入射到设置在其上的反射图案上并从其反射 掩模版的表面和晶片的反射表面与响应于每个反射的交替的第一或第二发散光束的位置的二维位置检测装置一起用于独立地感测表面的角位置 掩模版和晶片表面的角度位置，从而确定掩模版的表面和晶片的表面是否基本上彼此平行。 这允许步进器的调节装置响应于已经由倾斜感测装置确定的各个表面彼此不平行，来对角度调节光罩和晶片中的至少一个的角位置带来 其各自的表面彼此基本平行。

公开(公告)号：US08559014B2

公开(公告)日：2013-10-15

申请号：US12924244

申请日：2010-09-23

申请人： Hwan J. Jeong ,  David A. Markle

发明人： Hwan J. Jeong ,  David A. Markle

IPC分类号： G01B9/02

CPC分类号： G02B27/58 ,  A61B6/5282

摘要： High-resolution, common-path interferometric imaging systems and methods are described, wherein a light source generates and directs light toward a sample from different directions. An optical imaging system collects the resultant scattered and unscattered components. A variable phase shifting system adjusts the relative phase of the components. The interfered components are sensed by an image sensing system. The process is repeated multiple times with different phase shifts to form corresponding multiple electronic signals representative of raw sample images, which are processed by a signal processor to form a processed image. Multiple processed images, each corresponding to a different illumination azimuth angle, are combined to extend the system resolution.

摘要翻译： 描述了高分辨率，公共路径干涉成像系统和方法，其中光源从不同的方向产生并指向样品。 光学成像系统收集所得的散射和未散射的部件。 可变相移系统调整组件的相对相位。 受干扰的部件由图像感测系统感测。 该过程以不同的相移重复多次以形成表示原始样本图像的对应的多个电子信号，其由信号处理器处理以形成经处理的图像。 组合多个处理后的图像，每个对应于不同的照明方位角，以扩展系统分辨率。

公开(公告)号：US20110280038A1

公开(公告)日：2011-11-17

申请号：US13068179

申请日：2011-05-04

申请人： Hwan J. Jeong

发明人： Hwan J. Jeong

IPC分类号： F21V33/00

CPC分类号： G01N21/6458 ,  G01N21/65 ,  G01N2201/06 ,  G01N2201/0826

摘要： Illumination systems and methods that utilize the higher or outer portions of the optical solid-angle space to increase the illumination intensity are disclosed. The illumination systems and methods include introducing illumination light through at least one side surface of a transparent slide that operably supports a sample on its top surface. The light fills at least a portion of the optical solid-angle space between 1 and n, and extends out to n. Light from the filled portion of the optical solid-angle space illuminates the sample through the top surface of the transparent slide. The disclosed illumination systems and methods are suitable for use in applications, such as dark-field imaging, fluorescence imaging, Raman spectroscopy, DNA analysis and like applications requiring high-intensity illumination.

摘要翻译： 公开了利用光学立体角空间的较高或外部增加照明强度的照明系统和方法。 照明系统和方法包括通过在其顶表面上可操作地支撑样品的透明滑块的至少一个侧表面引入照明光。 光填充1和n之间的光学立体角空间的至少一部分，并延伸到n。 来自光学立体角空间的填充部分的光通过透明滑块的顶表面照射样品。 所公开的照明系统和方法适用于诸如暗场成像，荧光成像，拉曼光谱，DNA分析等需要高强度照明的应用。