公开(公告)号：US08994023B2

公开(公告)日：2015-03-31

申请号：US13115088

申请日：2011-05-24

申请人： Hye-Young Ryu ,  Woo-Geun Lee ,  Young-Joo Choi ,  Kyoung-Jae Chung ,  Jin-Won Lee ,  Seung-Ha Choi ,  Hee-Jun Byeon ,  Pil-Sang Yun

发明人： Hye-Young Ryu ,  Woo-Geun Lee ,  Young-Joo Choi ,  Kyoung-Jae Chung ,  Jin-Won Lee ,  Seung-Ha Choi ,  Hee-Jun Byeon ,  Pil-Sang Yun

IPC分类号： H01L47/00 ,  H01L29/10 ,  H01L29/04 ,  H01L29/15 ,  H01L27/12

CPC分类号： H01L27/1214 ,  H01L27/1225 ,  H01L27/1255

摘要： A thin film transistor array substrate capable of reducing degradation of a device due to degradation of an oxide semiconductor pattern and a method of fabricating the same are provided. The thin film transistor array substrate may include an insulating substrate on which a gate electrode is formed, a gate insulating film formed on the insulating substrate, an oxide semiconductor pattern disposed on the gate insulating film, an anti-etching pattern formed on the oxide semiconductor pattern, and a source electrode and a drain electrode formed on the anti-etching pattern. The oxide semiconductor pattern may include an edge portion positioned between the source electrode and the drain electrode, and the edge portion may include at least one conductive region and at least one non-conductive region.

摘要翻译： 提供了能够降低由于氧化物半导体图案的劣化引起的器件劣化的薄膜晶体管阵列基板及其制造方法。 薄膜晶体管阵列基板可以包括其上形成有栅极的绝缘基板，形成在绝缘基板上的栅极绝缘膜，设置在栅极绝缘膜上的氧化物半导体图案，形成在氧化物半导体上的抗蚀刻图案 图案，以及形成在防蚀刻图案上的源电极和漏电极。 氧化物半导体图案可以包括位于源电极和漏电极之间的边缘部分，并且边缘部分可以包括至少一个导电区域和至少一个非导电区域。

公开(公告)号：US08598583B2

公开(公告)日：2013-12-03

申请号：US13092882

申请日：2011-04-22

申请人： Hye-Young Ryu ,  Jin-Won Lee ,  Woo-Geun Lee ,  Hee-Jun Byeon ,  Xun Zhu

发明人： Hye-Young Ryu ,  Jin-Won Lee ,  Woo-Geun Lee ,  Hee-Jun Byeon ,  Xun Zhu

IPC分类号： H01L29/786

CPC分类号： H01L27/1288 ,  H01L27/1214 ,  H01L27/1225 ,  H01L27/1248 ,  H01L27/3272 ,  H01L51/5253 ,  H01L2227/323

摘要： A thin film transistor panel includes a substrate, a light blocking layer on the substrate, a first protective film on the light blocking layer, a first electrode and a second electrode on the first protective film, an oxide semiconductor layer on a portion of the first protective film exposed between the first electrode and the second electrode, an insulating layer, a third electrode overlapping with the oxide semiconductor layer and on the insulating layer, and a fourth electrode on the insulating layer. The light blocking layer includes first sidewalls, and the first protective film includes second sidewalls. The first and the second sidewalls are disposed along substantially the same line.

公开(公告)号：US08866137B2

公开(公告)日：2014-10-21

申请号：US13365704

申请日：2012-02-03

申请人： Jin-Won Lee ,  Woo Geun Lee ,  Kap Soo Yoon ,  Ki-Won Kim ,  Hyun-Jung Lee ,  Hee-Jun Byeon ,  Ji-Soo Oh

发明人： Jin-Won Lee ,  Woo Geun Lee ,  Kap Soo Yoon ,  Ki-Won Kim ,  Hyun-Jung Lee ,  Hee-Jun Byeon ,  Ji-Soo Oh

IPC分类号： H01L29/12 ,  H01L27/12 ,  H01L29/417

CPC分类号： H01L27/1225 ,  H01L29/41733

摘要： A thin film transistor array panel includes: a gate electrode disposed on an insulation substrate; a gate insulating layer disposed on the gate electrode; a first electrode and an oxide semiconductor disposed directly on the gate insulating layer; a source electrode and a drain electrode formed on the oxide semiconductor; a passivation layer disposed on the first electrode, the source electrode, and the drain electrode; and a second electrode disposed on the passivation layer.

摘要翻译： 薄膜晶体管阵列面板包括：设置在绝缘基板上的栅电极; 设置在栅电极上的栅极绝缘层; 直接设置在栅极绝缘层上的第一电极和氧化物半导体; 形成在所述氧化物半导体上的源电极和漏电极; 设置在所述第一电极，所述源电极和所述漏电极上的钝化层; 以及设置在钝化层上的第二电极。