公开(公告)号：US20110262625A1

公开(公告)日：2011-10-27

申请号：US13176701

申请日：2011-07-05

申请人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

发明人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

IPC分类号： B05D5/06 ,  B05C5/00

CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/24

摘要： A thin film deposition apparatus including a chamber; a deposition source accommodated in the chamber and configured to discharge a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet located opposite the deposition source nozzle unit inside the chamber and including a plurality of patterning slits arranged in a second direction perpendicular to the first direction, the patterning slit sheet being spaced apart from the substrate, and the thin film deposition apparatus being configured to perform a deposition while at least one of the substrate or the thin film deposition apparatus moves relative to the other in the first direction.

摘要翻译： 一种薄膜沉积设备，包括：室; 沉积源，其容纳在所述室中并且构造成排出沉积材料; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 以及图案化缝隙片，其与所述腔室内的所述沉积源喷嘴单元相对，并且包括沿垂直于所述第一方向的第二方向布置的多个图案化狭缝，所述图案化缝隙片与所述衬底间隔开，并且所述薄膜沉积设备 被配置为在所述基板或所述薄膜沉积装置中的至少一个在所述第一方向上相对于另一个移动时执行沉积。

公开(公告)号：US10246769B2

公开(公告)日：2019-04-02

申请号：US12979656

申请日：2010-12-28

申请人： Hyun-Sook Park ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

发明人： Hyun-Sook Park ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

IPC分类号： C23C14/00 ,  C23C14/24 ,  C23C14/04 ,  H01L51/00

摘要： A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.

公开(公告)号：US20110033964A1

公开(公告)日：2011-02-10

申请号：US12849193

申请日：2010-08-03

申请人： Ji-Sook OH ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

发明人： Ji-Sook OH ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

IPC分类号： H01L21/20

CPC分类号： H01L51/001 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3211 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

摘要翻译： 一种薄膜沉积设备和使用该薄膜沉积设备制造有机发光显示设备的方法。 薄膜沉积设备包括多个薄膜沉积组件，每个薄膜沉积组件包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对地设置并且包括沿第一方向布置的多个图案化狭缝; 以及在第一方向上设置在沉积源喷嘴单元和图案化缝隙片之间的阻挡板组件。 阻挡板组件包括将沉积源喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。

公开(公告)号：US08709161B2

公开(公告)日：2014-04-29

申请号：US12849193

申请日：2010-08-03

申请人： Ji-Sook Oh ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

发明人： Ji-Sook Oh ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

IPC分类号： C23C16/00

CPC分类号： H01L51/001 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3211 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

摘要翻译： 一种薄膜沉积设备和使用该薄膜沉积设备制造有机发光显示设备的方法。 薄膜沉积设备包括多个薄膜沉积组件，每个薄膜沉积组件包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对地设置并且包括沿第一方向布置的多个图案化狭缝; 以及在第一方向上设置在沉积源喷嘴单元和图案化缝隙片之间的阻挡板组件。 阻挡板组件包括将沉积源喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。

公开(公告)号：US08193011B2

公开(公告)日：2012-06-05

申请号：US13277112

申请日：2011-10-19

申请人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

发明人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

IPC分类号： H01L33/26 ,  C23C16/44 ,  H01L21/76 ,  C23C16/00

CPC分类号： C23C14/044 ,  C23C14/12 ,  C23C14/243 ,  C23C14/568 ,  H01L51/001 ,  H01L51/0081 ,  H01L51/56 ,  Y10S414/135 ,  Y10T279/23

摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.

摘要翻译： 一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。 薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人 第一个电源插头; 和第二电源插头。 静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

公开(公告)号：US20120083061A1

公开(公告)日：2012-04-05

申请号：US13277112

申请日：2011-10-19

申请人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

发明人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

IPC分类号： H01L51/56

CPC分类号： C23C14/044 ,  C23C14/12 ,  C23C14/243 ,  C23C14/568 ,  H01L51/001 ,  H01L51/0081 ,  H01L51/56 ,  Y10S414/135 ,  Y10T279/23

摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.

摘要翻译： 一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。 薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人 第一个电源插头; 和第二电源插头。 静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

公开(公告)号：US08137466B2

公开(公告)日：2012-03-20

申请号：US12862153

申请日：2010-08-24

申请人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

发明人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C14/044 ,  C23C14/12 ,  C23C14/243 ,  C23C14/568 ,  H01L51/001 ,  H01L51/0081 ,  H01L51/56 ,  Y10S414/135 ,  Y10T279/23

摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck. The carrier is used to move the electrostatic chuck to pass through the plurality of chambers. The first power source plug is installed to be attachable to and detachable from one of the power source holes in order to supply power to the electrode. The first power source plug is installed at an upstream of a path in which the electrostatic chuck is moved by the carrier. The second power source plug is installed to be attachable to and detachable from another of the power source holes in order to supply power to the electrode. The second power source plug is installed in the path to be downstream to the first power source plug with respect to the path.

摘要翻译： 一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。 薄膜沉积设备包括静电卡盘，多个腔室; 至少一个薄膜沉积组件; 承运人 第一个电源插头; 和第二电源插头。 静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。 多个室保持在真空状态。 所述至少一个薄膜沉积组件位于所述多个室中的至少一个室中，与所述衬底分离预定距离，并且用于在由所述静电吸盘支撑的所述衬底上形成薄膜。 载体用于移动静电卡盘以通过多个室。 第一电源插头被安装成可以从电源孔之一附接和拆卸，以向电极供电。 第一电源插头安装在静电卡盘由载体移动的路径的上游。 第二电源插头被安装成可以与另一个电源孔相连接和拆卸，以向电极供电。 第二电源插头安装在相对于路径到第一电源插头的下游的路径中。

公开(公告)号：US08486737B2

公开(公告)日：2013-07-16

申请号：US12856942

申请日：2010-08-16

申请人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

发明人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

IPC分类号： H01L21/00 ,  H01L21/31 ,  H01L21/469 ,  B05B15/02 ,  B05B15/04 ,  C23C16/00

CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3244 ,  H01L51/0005 ,  H01L51/56

摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.

摘要翻译： 一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理 以及使用该薄膜沉积装置制造有机发光显示装置的方法。

公开(公告)号：US20110053296A1

公开(公告)日：2011-03-03

申请号：US12856942

申请日：2010-08-16

申请人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

发明人： Yun-Mi Lee ,  Yong-Sup Choi ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Jae-Kwang Ryu ,  Young-Mook Choi

IPC分类号： H01L51/56

CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3244 ,  H01L51/0005 ,  H01L51/56

摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.

摘要翻译： 一种薄膜沉积装置及其制造方法，更具体地说涉及一种薄膜沉积装置，其能够除去沉积在图案化缝隙片上的沉积材料，而不进行额外的清洁处理 以及使用该薄膜沉积装置制造有机发光显示装置的方法。

公开(公告)号：US09450140B2

公开(公告)日：2016-09-20

申请号：US12869830

申请日：2010-08-27

申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： B05D5/06 ,  C23C16/00 ,  B05D1/32 ,  H01L21/00 ,  H01L33/00 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H01L21/67 ,  H01L21/683 ,  H01L51/00 ,  H01L51/56 ,  H01L27/32

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。