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    Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
    1.
    发明授权
    Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
    薄膜沉积装置及使用该有机发光显示装置的方法

    公开(公告)号：US08709161B2

    公开(公告)日：2014-04-29

    申请号：US12849193

    申请日：2010-08-03

    申请人： Ji-Sook Oh ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

    发明人： Ji-Sook Oh ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

    IPC分类号： C23C16/00

    CPC分类号： H01L51/001 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3211 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

    摘要翻译： 一种薄膜沉积设备和使用该薄膜沉积设备制造有机发光显示设备的方法。 薄膜沉积设备包括多个薄膜沉积组件，每个薄膜沉积组件包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对地设置并且包括沿第一方向布置的多个图案化狭缝; 以及在第一方向上设置在沉积源喷嘴单元和图案化缝隙片之间的阻挡板组件。 阻挡板组件包括将沉积源喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。

    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME
    2.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
    薄膜沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号：US20110033964A1

    公开(公告)日：2011-02-10

    申请号：US12849193

    申请日：2010-08-03

    申请人： Ji-Sook OH ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

    发明人： Ji-Sook OH ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

    IPC分类号： H01L21/20

    CPC分类号： H01L51/001 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3211 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

    摘要翻译： 一种薄膜沉积设备和使用该薄膜沉积设备制造有机发光显示设备的方法。 薄膜沉积设备包括多个薄膜沉积组件，每个薄膜沉积组件包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对地设置并且包括沿第一方向布置的多个图案化狭缝; 以及在第一方向上设置在沉积源喷嘴单元和图案化缝隙片之间的阻挡板组件。 阻挡板组件包括将沉积源喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。

    THIN FILM DEPOSITION APPARATUS
    3.
    发明申请
    THIN FILM DEPOSITION APPARATUS 审中-公开
    薄膜沉积装置

    公开(公告)号：US20110262625A1

    公开(公告)日：2011-10-27

    申请号：US13176701

    申请日：2011-07-05

    申请人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

    发明人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

    IPC分类号： B05D5/06 ,  B05C5/00

    CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/24

    摘要： A thin film deposition apparatus including a chamber; a deposition source accommodated in the chamber and configured to discharge a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet located opposite the deposition source nozzle unit inside the chamber and including a plurality of patterning slits arranged in a second direction perpendicular to the first direction, the patterning slit sheet being spaced apart from the substrate, and the thin film deposition apparatus being configured to perform a deposition while at least one of the substrate or the thin film deposition apparatus moves relative to the other in the first direction.

    摘要翻译： 一种薄膜沉积设备，包括：室; 沉积源，其容纳在所述室中并且构造成排出沉积材料; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 以及图案化缝隙片，其与所述腔室内的所述沉积源喷嘴单元相对，并且包括沿垂直于所述第一方向的第二方向布置的多个图案化狭缝，所述图案化缝隙片与所述衬底间隔开，并且所述薄膜沉积设备 被配置为在所述基板或所述薄膜沉积装置中的至少一个在所述第一方向上相对于另一个移动时执行沉积。

    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME
    5.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME 有权
    薄膜沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号：US20110052791A1

    公开(公告)日：2011-03-03

    申请号：US12869830

    申请日：2010-08-27

    申请人： Chang-Mog JO ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

    发明人： Chang-Mog JO ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

    IPC分类号： C23C16/52 ,  B05C11/00 ,  B05D3/00 ,  B05D5/00

    CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

    摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME
    7.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME 审中-公开
    薄膜沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号：US20130298829A1

    公开(公告)日：2013-11-14

    申请号：US13943221

    申请日：2013-07-16

    申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

    发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

    IPC分类号： H01L33/00

    CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus inclues a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

    摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中，所述第一循环单元在通过所述沉积单元时通过所述室。

    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
    8.
    发明授权
    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 有权
    薄膜沉积装置，使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置

    公开(公告)号：US08921831B2

    公开(公告)日：2014-12-30

    申请号：US12836760

    申请日：2010-07-15

    申请人： Jong-Heon Kim ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Hee-Cheol Kang ,  Ji-Sook Oh

    发明人： Jong-Heon Kim ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Hee-Cheol Kang ,  Ji-Sook Oh

    IPC分类号： H01L51/05 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00

    CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.

    摘要翻译： 一种薄膜沉积设备，包括：薄膜沉积组件，其包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 以及阻挡板组件，其包括沿着所述第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，并且将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子 - 沉积空间，其中每个阻挡板与图案化缝隙片分离。

    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME
    9.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 审中-公开
    薄膜沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号：US20110053301A1

    公开(公告)日：2011-03-03

    申请号：US12868099

    申请日：2010-08-25

    申请人： Hee-Cheol KANG ,  Jong-Heon Kim ,  Ji-Sook Oh ,  Sang-Soo Kim

    发明人： Hee-Cheol KANG ,  Jong-Heon Kim ,  Ji-Sook Oh ,  Sang-Soo Kim

    IPC分类号： H01L51/30

    CPC分类号： C23C14/50 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56

    摘要： A thin film deposition apparatus that is suitable for production of large-sized substrates with fine patterns includes: an electrostatic chuck including a body that contacts a substrate that constitutes a deposition target and including a supporting surface supporting the substrate, an electrode installed in the body to generate an electrostatic force on the supporting surface, and a battery that is electrically connected to the electrode in the body; a plurality of chambers that are maintained in vacuum states; at least one thin film deposition assembly disposed in one of the plurality of chambers, separated by a predetermined distance from the substrate, and forming a thin film on the substrate supported by the electrostatic chuck; and a carrier moving the electrostatic chuck through the chambers.

    摘要翻译： 适合于生产具有精细图案的大尺寸基板的薄膜沉积装置包括：静电卡盘，其包括与构成沉积靶的基板接触并包括支撑基板的支撑表面的主体，安装在主体中的电极 在所述支撑面上产生静电力，以及与所述电极电连接的电池; 维持在真空状态的多个室; 至少一个薄膜沉积组件，其设置在与所述基板隔开预定距离的多个室之一中，并且在由所述静电卡盘支撑的所述基板上形成薄膜; 以及将静电卡盘移动通过室的载体。