公开(公告)号：US3539759A

公开(公告)日：1970-11-10

申请号：US3539759D

申请日：1968-11-08

Applicant: IBM

Inventor： SPIRO ANDREA ,  WHITE WILLIAM H

IPC: H01L21/673 ,  C23C16/44 ,  C23C16/458 ,  C30B25/12 ,  C30B31/00 ,  C30B31/14 ,  C30B35/00 ,  E04B9/20 ,  F27D3/12 ,  H01L21/205 ,  H01L21/22 ,  H01L31/10 ,  H05B5/00 ,  H05B9/00

CPC classification number: C30B25/12 ,  C30B31/00 ,  C30B35/00 ,  E04B9/20

公开(公告)号：US3650042A

公开(公告)日：1972-03-21

申请号：US3650042D

申请日：1969-05-19

Applicant: IBM

Inventor： BOERGER FRANK E ,  WHITE WILLIAM H

IPC: C23C14/56 ,  C23C16/54 ,  C23F1/00 ,  C30B31/10 ,  C30B31/16 ,  F26B25/00

CPC classification number: H01L21/67173 ,  C23C14/56 ,  C23C16/54 ,  C23F1/00 ,  C30B31/106 ,  C30B31/16 ,  H01L21/67109 ,  H01L21/6719

Abstract: A transition or isolation zone for accommodating continuous free flow of a tier of articles between two distinct and isolated atmospheres. The transition zone includes a series of alternate inlet and outlet compartments for a non-reactive gas wherein the compartments contain inlet and outlet openings interconnecting with each other and the indicated atmospheres. The cross sections of the openings are complementary to the cross section of the tier of articles to provide a restricted orifice-size clearance therebetween, whereby the orifice phenomena can be employed by correlation of pressures to control the flow of gas and conversely to substantially completely isolate the indicated atmospheres without any measurable cross-migration therebetween.

Abstract translation: 用于在两个不同和隔离的气氛之间容纳一层物品的连续自由流动的过渡或隔离区。 过渡区域包括用于非反应性气体的一系列替代的入口和出口隔室，其中隔室包含彼此互相连接的引入和出口以及指示的气氛。 开口的横截面与制品层的横截面互补，以在它们之间提供限制的孔尺寸间隙，由此可以通过压力相关来采用孔眼现象来控制气体的流动，而相反地基本上完全隔离 所指示的气氛在它们之间没有任何可测量的交叉迁移。

公开(公告)号：US3301213A

公开(公告)日：1967-01-31

申请号：US23245662

申请日：1962-10-23

Applicant: IBM

Inventor： GROCHOWSKI EDWARD G ,  SCHWARTZ ROBERT S ,  WHITE WILLIAM H

IPC: C23C16/00 ,  C30B25/08 ,  C30B35/00 ,  H01L21/20

CPC classification number: C30B35/00 ,  C23C16/00 ,  C30B25/08