PULSED LASER MICRO-DEPOSITION PATTERN FORMATION
    1.
    发明申请
    PULSED LASER MICRO-DEPOSITION PATTERN FORMATION 审中-公开
    脉冲激光微沉积图形成

    公开(公告)号:US20140161998A1

    公开(公告)日:2014-06-12

    申请号:US14178414

    申请日:2014-02-12

    Abstract: A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.

    Abstract translation: 公开了使用脉冲激光在透明基板上形成图案的方法。 各种实施例包括超短脉冲激光器,对激光波长透明的衬底和靶板。 激光束被引导通过透明基板并聚焦在目标表面上。 目标材料被激光烧蚀并沉积在相对的基板表面上。 通过相对于目标扫描激光束来形成例如灰度图像的图案。 激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质,产生灰度的视觉效果。 在一些实施例中,可以在制造过程期间在微电子器件的一部分上形成图案。 在一些实施例中,高重复率皮秒和纳秒源被配置为产生图案。

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