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公开(公告)号:US11289621B2
公开(公告)日:2022-03-29
申请号:US16768029
申请日:2018-11-26
IPC分类号: H01L21/00 , H01L33/00 , B23K26/0622 , B23K26/359 , B23K26/00 , B23K103/00
摘要: A method includes preparing a wafer including a substrate and a semiconductor structure, and irradiating an inner portion of the substrate at a predetermined depth in a thickness direction a plurality of times with laser pulses at a first time interval and a predetermined distance interval between irradiations. Each irradiation performed at the first time intervals in the step of irradiating the substrate with laser pulses includes irradiating the substrate at a first focal position in the thickness direction with a first laser pulse having a first pulse-energy; and after irradiating with the first laser pulse, irradiating the substrate with a second laser pulse performed after a second time interval, the second time interval being shorter than the first time interval and being in a range of 3 ps to 900 ps, and the second laser pulse having a second pulse-energy 0.5 to 1.5 times the first pulse-energy.
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公开(公告)号:US10353144B2
公开(公告)日:2019-07-16
申请号:US15468520
申请日:2017-03-24
申请人: IMRA America, Inc.
发明人: Liang Dong , Jun Li , Hugh McKay , Libin Fu , Andrius Marcinkevicius
摘要: Embodiments of optical fiber may include cladding features that include a material (e.g., fluorine-doped silica glass) that may produce a very low relative refractive index difference with respect to cladding material in which the cladding features are disposed. This relative refractive index difference may be characterized by (n1−n2)/n1, where n1 is the index of refraction of the cladding material in which the cladding features are included, and n2 is the index of refraction of the cladding features. In certain embodiments, the relative refractive index difference may be less than about 4.5×10−3. In various embodiments, the configuration of the cladding features including, for example, the size and spacing of the cladding features, can be selected to provide for confinement of the fundamental mode yet leakage for the second mode and higher modes, which may provide mode filtering, single mode propagation, and/or low bend loss.
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3.
公开(公告)号:US10092661B2
公开(公告)日:2018-10-09
申请号:US14187416
申请日:2014-02-24
申请人: IMRA America, Inc.
发明人: Wei Qian , Makoto Murakami , Yuki Ichikawa , Yong Che
IPC分类号: A61K49/00 , G01N21/64 , G01N33/531 , G01N33/543 , A61K9/00 , A61K9/16 , B01J13/00 , A61K41/00 , A61K47/10 , G01N21/65 , B82Y5/00 , B82Y40/00 , G01N21/35 , B82Y30/00
摘要: In the present invention, a method of producing stable bare colloidal gold nanoparticles is disclosed. The nanoparticles can subsequently be subjected to partial or full surface modification. The method comprises preparation of colloidal gold nanoparticles in a liquid by employing a top-down nanofabrication method using bulk gold as a source material. The surface modification of these nanoparticles is carried out by adding one or multiple types of ligands each containing functional groups which exhibit affinity for gold nanoparticle surfaces to produce the conjugates. Because of the high efficiency and excellent stability of the nanoparticles produced by this method, the fabricated gold nanoparticle conjugates can have surface coverage with functional ligands which can be tuned to be any percent value between 0 and 100%.
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4.
公开(公告)号:US20180284110A1
公开(公告)日:2018-10-04
申请号:US15938217
申请日:2018-03-28
申请人: IMRA AMERICA, INC.
发明人: Kristin B. CEDERQUIST , Yuki ICHIKAWA , Bing LIU , Kori Michael FETTERS , Megan GRIMA , Nusayba TABBAH
IPC分类号: G01N33/543 , G01N33/553 , G01N33/532 , G01N33/58
摘要: Disclosed is a method for enhancing the optical signal of precious metal nanoparticles by introducing linker molecules for precious metal nanoparticles to form clusters in a stable colloidal suspension. The formation of clusters according to the present disclosure not only enhances the optical signal, but also can alter the optical spectrum, providing an alternative color for use in visual-based bioassays such as lateral flow immunoassays against the white test paper strips. The formed clusters are capable of passive adsorption of a variety of biomolecules which effectively bind onto the surface, requiring a minimum modification in the bio-assay protocol from that use for standard gold nanoparticles, which is being widely-used in lateral flow immunoassays.
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公开(公告)号:US20170190000A1
公开(公告)日:2017-07-06
申请号:US15465694
申请日:2017-03-22
申请人: IMRA AMERICA, INC.
发明人: James BOVATSEK , Alan Y. ARAI , Fumiyo YOSHINO
IPC分类号: B23K26/53 , B23K26/0622 , B23K26/364 , B23K26/40 , B81C1/00 , C03B33/02 , C03B23/203 , B29C65/16 , B29C65/38 , B29C65/00 , B23K26/00 , B28D5/00
CPC分类号: B23K26/53 , B23K26/0617 , B23K26/0624 , B23K26/244 , B23K26/364 , B23K26/40 , B23K2103/50 , B28D5/0011 , B29C59/16 , B29C65/14 , B29C65/1616 , B29C65/1635 , B29C65/1638 , B29C65/1658 , B29C65/1664 , B29C65/1674 , B29C65/1696 , B29C65/38 , B29C66/1122 , B29C66/30223 , B29C66/322 , B29C66/3282 , B29C66/41 , B29C66/43 , B29C66/71 , B29C66/73366 , B29C66/7352 , B29C66/73921 , B29C66/836 , B29C66/91641 , B29C66/919 , B29C66/934 , B29C66/939 , B29C66/944 , B29C66/949 , B29K2033/12 , B29K2069/00 , B29K2995/0026 , B81B1/00 , B81C1/00119 , C03B23/20 , C03B23/203 , C03B33/0222 , C03C23/0025 , Y10T428/13 , Y10T428/15 , Y10T428/24479 , Y10T428/24802 , B29C65/00
摘要: A method for scribing transparent materials uses ultrashort laser pulses to create multiple scribe features with a single pass of the laser beam across the material, with at least one of the scribe features being formed below the surface of the material. This enables clean breaking of transparent materials at a higher speed than conventional techniques.
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公开(公告)号:US09595802B2
公开(公告)日:2017-03-14
申请号:US14223287
申请日:2014-03-24
申请人: IMRA America, Inc.
CPC分类号: H01S3/06708 , G02B6/26 , H01S3/0092 , H01S3/067 , H01S3/06704 , H01S3/06712 , H01S3/06716 , H01S3/06725 , H01S3/06729 , H01S3/06733 , H01S3/06737 , H01S3/06745 , H01S3/06783 , H01S3/08045 , H01S3/08054 , H01S3/094007 , H01S3/094019 , H01S3/094042 , H01S3/094069 , H01S3/1106 , H01S3/1109 , H01S3/1115 , H01S3/1118 , H01S3/1608 , H01S3/1618
摘要: A laser utilizes a cavity design which allows the stable generation of high peak power pulses from mode-locked multi-mode fiber lasers, greatly extending the peak power limits of conventional mode-locked single-mode fiber lasers. Mode-locking may be induced by insertion of a saturable absorber into the cavity and by inserting one or more mode-filters to ensure the oscillation of the fundamental mode in the multi-mode fiber. The probability of damage of the absorber may be minimized by the insertion of an additional semiconductor optical power limiter into the cavity.
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公开(公告)号:US20160322771A1
公开(公告)日:2016-11-03
申请号:US14056052
申请日:2013-10-17
申请人: IMRA AMERICA, INC.
发明人: Donald J. HARTER
CPC分类号: H01S3/0057 , G02B6/2932 , G02B6/29374 , H01S3/067 , H01S3/06708 , H01S3/06716 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/08013 , H01S3/094003 , H01S3/094076 , H01S3/0941 , H01S3/10046 , H01S3/11 , H01S3/1106 , H01S3/1608 , H01S3/1618 , H01S3/2308 , H01S5/0057 , H04B10/508
摘要: System for converting relatively long pulses from rep-rate variable ultrafast optical sources to shorter, high-energy pulses suitable for sources in high-energy ultrafast lasers. Fibers with positive group velocity dispersion (GVD) and self phase modulation are advantageously employed with the optical sources. These systems take advantage of the need for higher pulse energies at lower repetition rates so that such sources can be cost effective.
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公开(公告)号:US20160318122A1
公开(公告)日:2016-11-03
申请号:US15208374
申请日:2016-07-12
申请人: IMRA America, Inc.
发明人: Michiharu Ota , Alan Y. Arai , Zhenlin Liu
IPC分类号: B23K26/0622 , B23K26/06 , C03B33/10 , B23K26/402 , B23K26/364 , B23K26/382 , B23K26/082
CPC分类号: B23K26/0624 , B23K26/0604 , B23K26/082 , B23K26/36 , B23K26/364 , B23K26/38 , B23K26/382 , B23K26/40 , B23K26/402 , B23K2103/50 , B23K2103/54 , C03B33/102
摘要: In certain embodiments a method and system for laser-based material processing of a material is disclosed. In at least one preferred implementation temporally overlapping pulse series are generated with separate pulsed laser sources, for example nanosecond (NS) and ultrashort pulse (USP) sources (NS-USP). Pulses are delivered to the material as a series of spatially and temporally overlapping pulse pairs. The material can, but need not, be a transparent material. In some applications of transparent material processing, it was found the combination of pulses both substantially more material modification and high machining quality than obtainable with either individual pulse series taken alone. Other micromachining methods and arrangement are disclosed for formation of fine features on or within a substrate. Such methods and arrangements may generally be applied with a NS-USP combination, or with other sources.
摘要翻译: 在某些实施例中,公开了一种用于材料的基于激光的材料处理的方法和系统。 在至少一个优选的实施方案中,使用单独的脉冲激光源(例如纳秒(NS))和超短脉冲(USP)源(NS-USP)产生时间上重叠的脉冲序列。 脉冲作为一系列空间和时间重叠的脉冲对传送到材料。 材料可以但不一定是透明材料。 在透明材料加工的一些应用中,发现脉冲的组合比单独采用的单个脉冲系列可获得的材料变化和高加工质量要大得多。 公开了其它微加工方法和布置用于在基底上或内部形成精细特征。 这种方法和装置通常可以用NS-USP组合或与其他来源一起使用。
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公开(公告)号:US20160291247A1
公开(公告)日:2016-10-06
申请号:US15042833
申请日:2016-02-12
申请人: IMRA America, Inc.
发明人: Liang Dong , William Wong , Martin E. Fermann
CPC分类号: G02B6/02357 , G02B6/00 , G02B6/02 , G02B6/02009 , G02B6/02033 , G02B6/02361 , G02B6/02366 , G02B6/02371 , G02B6/024 , G02B6/036 , G02B6/03633 , G02B6/03694 , G02B6/24 , G02B6/26 , G02B6/262 , G02B6/32 , G02F1/0134 , H01S3/0057 , H01S3/02 , H01S3/06708 , H01S3/06729 , H01S3/06745 , H01S3/06754 , H01S3/094007 , H01S3/1618 , H01S3/2308 , H01S3/302 , H01S2302/00
摘要: Various embodiments include large cores fibers that can propagate few modes or a single mode while introducing loss to higher order modes. Some of these fibers are holey fibers that comprise cladding features such as air-holes. Additional embodiments described herein include holey rods. The rods and fibers may be used in many optical systems including optical amplification systems, lasers, short pulse generators, Q-switched lasers, etc. and may be used for example for micromachining.
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公开(公告)号:US20160099541A1
公开(公告)日:2016-04-07
申请号:US14967504
申请日:2015-12-14
申请人: IMRA AMERICA, INC.
发明人: Jingzhou XU , Gyu CHO
CPC分类号: H01S3/11 , H01S3/0057 , H01S3/0092 , H01S3/06712 , H01S3/10061 , H01S3/2308 , H01S3/2383 , H01S3/302
摘要: In at least one embodiment time separated pulse pairs are generated, followed by amplification to increase the available peak and/or average power. The pulses are characterized by a time separation that exceeds the input pulse width and with distinct polarization states. The time and polarization discrimination allows easy extraction of the pulses after amplification. In some embodiments polarization maintaining (PM) fibers and/or amplifiers are utilized which provides a compact arrangement. At least one implementation provides for seeding of a solid state amplifier or large core fiber amplifier with time delayed, polarization split pulses, with capability for recombining the time separated pulses at an amplifier output. In various implementations suitable combinations of bulk optics and fibers may be utilized. In some implementations wavelength converted pulse trains are generated. A method and system of the present invention can be used in time domain applications utilizing multiple beam paths, for example spectroscopy.
摘要翻译: 在至少一个实施例中,产生时间分离的脉冲对,随后进行放大以增加可用的峰值和/或平均功率。 脉冲的特征在于超过输入脉冲宽度并具有不同极化状态的时间间隔。 时间和极化辨别允许在放大后容易地提取脉冲。 在一些实施例中,利用了提供紧凑布置的偏振维持(PM)光纤和/或放大器。 至少一个实施例提供具有时间延迟的极化分离脉冲的固态放大器或大型核心光纤放大器的种子,具有用于在放大器输出端重组时间分离的脉冲的能力。 在各种实施方式中,可以利用本体光学和光纤的合适的组合。 在一些实现中,生成波长转换的脉冲串。 本发明的方法和系统可以用于利用多个光束路径的时域应用,例如光谱学。
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