公开(公告)号：US09529012B2

公开(公告)日：2016-12-27

申请号：US14151843

申请日：2014-01-10

Applicant: Industrial Technology Research Institute

Inventor： Shih-Chieh Lin ,  Chao-Ta Huang ,  Chung-Yuan Su ,  Yu-Wen Hsu

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0814 ,  G01P2015/0857

Abstract: A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.

Abstract translation: 提供了具有叉指弹簧的微机电装置，其包括基板，至少一个第一质量块，可动电极，固定电极，锚和叉指弹簧。 可移动电极沿轴向设置在质量块上。 固定电极沿着轴向设置在基板上，可动电极和固定电极之间具有临界间隙。 交叉弹簧沿着轴向连接质量块和锚固件。 叉指弹簧包括第一折叠部分，第一连接部分，第二折叠部分和第二连接部分。 每个第一折叠部分包括两个第一跨度和第一头部。 每个第二折叠部分包括两个第二跨度和第二头部。 第一跨度的宽度和第二跨度的宽度分别大于临界间隙。

公开(公告)号：US20140245832A1

公开(公告)日：2014-09-04

申请号：US14151843

申请日：2014-01-10

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Shih-Chieh Lin ,  Chao-Ta Huang ,  Chung-Yuan Su ,  Yu-Wen Hsu

IPC: G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0814 ,  G01P2015/0857

Abstract: A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.

Abstract translation: 提供了具有叉指弹簧的微机电装置，其包括基板，至少一个第一质量块，可动电极，固定电极，锚和叉指弹簧。 可移动电极沿轴向设置在质量块上。 固定电极沿着轴向设置在基板上，可动电极和固定电极之间具有临界间隙。 交叉弹簧沿着轴向连接质量块和锚固件。 叉指弹簧包括第一折叠部分，第一连接部分，第二折叠部分和第二连接部分。 每个第一折叠部分包括两个第一跨度和第一头部。 每个第二折叠部分包括两个第二跨度和第二头部。 第一跨度的宽度和第二跨度的宽度分别大于临界间隙。

公开(公告)号：US10570958B1

公开(公告)日：2020-02-25

申请号：US16208576

申请日：2018-12-04

Applicant: Industrial Technology Research Institute

Inventor： Ta-Hua Lai ,  Jung-Huang Liao ,  Shih-Chieh Lin

IPC: F16C32/06 ,  F16C23/02 ,  F16C29/02 ,  F16K47/14

Abstract: A hydrostatic bearing assembly including a bearing and two membrane throttles is provided. The bearing is adapted to be movably disposed on a slide rail and includes two sub-bearing portions that are disposed opposite to each other on two opposite sides of the slide rail. The two membrane throttles are adapted to be connected to a pump. The pump is adapted to supply a fluid through the two membrane throttles to flow between the two sub-bearing portions and the slide rail, and each of the membrane throttles includes a casing and a throttling membrane piece. At least one of the casing and the corresponding sub-bearing portion includes a chamber, an inlet and an outlet communicating with the chamber, and an outlet surface, wherein the pump is adapted to be connected to the inlet, and the slide rail is adapted to be disposed adjacent to the outlet. The throttling membrane piece is being positioned in the chamber covers on the outlet surface.