Interconnect structures for logic and memory devices and methods of fabrication

    公开(公告)号:US11430944B2

    公开(公告)日:2022-08-30

    申请号:US16358671

    申请日:2019-03-19

    Abstract: An apparatus includes a first interconnect structure above a substrate, a memory device above and coupled with the first interconnect structure in a memory region. The memory device includes a non-volatile memory element, an electrode on the non-volatile memory element, and a metallization structure on a portion of the electrode. The apparatus further includes a second interconnect structure in a logic region above the substrate, where the second interconnect structure is laterally distant from the first interconnect structure. The logic region further includes a second metallization structure coupled to the second interconnect structure and a conductive structure between the second metallization structure and the second interconnect structure. The apparatus further includes a dielectric spacer that extends from the memory device to the conductive structure.

    COPPER INTERCONNECT CLADDING
    3.
    发明申请

    公开(公告)号:US20190304918A1

    公开(公告)日:2019-10-03

    申请号:US15937527

    申请日:2018-03-27

    Abstract: An integrated circuit includes: a front end of line (FEOL) circuit including a transistor; and a back end of line circuit above the FEOL circuit and including insulator material having an interconnect feature therein. The interconnect feature includes: a core including copper; a first layer between the insulator material and the core, the first layer being distinct from the core; a second layer between the first layer and the core, the second layer being distinct from the first layer and the core, the second layer including a first metal and a second metal different from the first metal; and a capping member on the core and the second layer, the capping member including the second metal. In an embodiment, the first metal and the second metal are part of a solid solution in the second layer. In an embodiment, the first metal is ruthenium and the second metal is cobalt.

    Copper interconnect cladding
    4.
    发明授权

    公开(公告)号:US11270943B2

    公开(公告)日:2022-03-08

    申请号:US15937527

    申请日:2018-03-27

    Abstract: An integrated circuit includes: a front end of line (FEOL) circuit including a transistor; and a back end of line circuit above the FEOL circuit and including insulator material having an interconnect feature therein. The interconnect feature includes: a core including copper; a first layer between the insulator material and the core, the first layer being distinct from the core; a second layer between the first layer and the core, the second layer being distinct from the first layer and the core, the second layer including a first metal and a second metal different from the first metal; and a capping member on the core and the second layer, the capping member including the second metal. In an embodiment, the first metal and the second metal are part of a solid solution in the second layer. In an embodiment, the first metal is ruthenium and the second metal is cobalt.

    Low resistance interconnect
    5.
    发明授权

    公开(公告)号:US10446439B2

    公开(公告)日:2019-10-15

    申请号:US15769432

    申请日:2015-12-26

    Abstract: An embodiment includes an apparatus comprising: a transistor formed on a substrate; and a metal interconnect formed in a dielectric layer above the transistor, wherein: the interconnect comprises a copper layer and a barrier layer that separates the copper layer from the dielectric layer, and the barrier layer comprises tantalum and niobium. Other embodiments are described herein.

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