Thermal switch for rapid thermal coupling and decoupling of devices under test

    公开(公告)号:US11592472B2

    公开(公告)日:2023-02-28

    申请号:US16417408

    申请日:2019-05-20

    Abstract: An apparatus for testing integrated circuits (ICs) , includes a first thermal contact structure having a first surface to interface with a heat source and an opposing second surface to interface with a device under test (DUT). A second thermal contact structure is above the first thermal contact structure and separated therefrom by a variable-resistance thermal interface (VRTI) structure operable to couple or decouple the first and second thermal contact structures from one another. The VRTI structure has a maximal thermal conductivity associated with a first state, and a minimal thermal conductivity associated with a second state.

    THERMAL SWITCH FOR RAPID THERMAL COUPLING AND DECOUPLING OF DEVICES UNDER TEST

    公开(公告)号:US20200371155A1

    公开(公告)日:2020-11-26

    申请号:US16417408

    申请日:2019-05-20

    Abstract: An apparatus for testing integrated circuits (ICs), comprising a first thermal contact structure having a first surface to interface with a heat source, the first surface is opposite a second surface. A second thermal contact structure is above the first thermal contact structure and separated therefrom. The second thermal contact structure has a third surface to interface with a cold mass. The third surface is opposite a fourth surface, and the fourth surface is opposite the second surface. A variable-resistance thermal interface (VRTI) structure is between the first and second thermal contact structures. The VRTI structure has a maximal thermal conductivity associated with a first state, and a minimal thermal conductivity associated with a second state.

Patent Agency Ranking