公开(公告)号：US11236013B2

公开(公告)日：2022-02-01

申请号：US16040468

申请日：2018-07-19

Applicant: Intevac, Inc.

Inventor： Terry Bluck ,  Wendell Thomas Blonigan

IPC: C23C14/54 ,  C03C17/34 ,  C23C14/34 ,  C23C14/00 ,  C23C14/10 ,  C23C14/08 ,  C23C14/50 ,  C08J7/04 ,  B05D5/06 ,  B32B17/10 ,  C03C17/42 ,  G02B1/111 ,  G02B1/116

Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing section without exposing the substrate carrier to atmosphere.

公开(公告)号：US20190025469A1

公开(公告)日：2019-01-24

申请号：US16040468

申请日：2018-07-19

Applicant: Intevac, Inc.

Inventor： Terry Bluck ,  Wendell Thomas Blonigan

IPC: G02B1/116 ,  G02B1/111 ,  C03C17/42 ,  C03C17/34 ,  C08J7/04 ,  B32B17/10 ,  B05D5/06

Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing section without exposing the substrate carrier to atmosphere.

公开(公告)号：US11897811B2

公开(公告)日：2024-02-13

申请号：US17589498

申请日：2022-01-31

Applicant: INTEVAC, INC.

Inventor： Terry Bluck ,  Wendell Thomas Blonigan

IPC: C23C14/34 ,  C03C17/34 ,  C23C14/54 ,  C23C14/00 ,  C23C14/10 ,  C23C14/08 ,  C23C14/50 ,  C08J7/04 ,  C23C14/56 ,  H01J37/32 ,  B05D5/06 ,  B32B17/10 ,  C03C17/42 ,  G02B1/111 ,  G02B1/116

CPC classification number: C03C17/3417 ,  B05D5/063 ,  B32B17/10174 ,  C03C17/3441 ,  C03C17/3482 ,  C03C17/42 ,  C08J7/0423 ,  C23C14/0052 ,  C23C14/0089 ,  C23C14/081 ,  C23C14/10 ,  C23C14/3442 ,  C23C14/3464 ,  C23C14/505 ,  C23C14/548 ,  C23C14/568 ,  G02B1/111 ,  G02B1/116 ,  H01J37/32899 ,  C03C2217/734 ,  C03C2217/76

Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing section without exposing the substrate carrier to atmosphere.

公开(公告)号：US20220185726A1

公开(公告)日：2022-06-16

申请号：US17589498

申请日：2022-01-31

Applicant: INTEVAC, INC.

Inventor： Terry Bluck ,  Wendell Thomas Blonigan

IPC: C03C17/34 ,  C23C14/34 ,  C23C14/54 ,  C23C14/00 ,  C23C14/10 ,  C23C14/08 ,  C23C14/50 ,  C08J7/04 ,  B05D5/06 ,  B32B17/10 ,  C03C17/42 ,  G02B1/111 ,  G02B1/116

Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing section without exposing the substrate carrier to atmosphere.