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公开(公告)号：US20180233878A1
公开(公告)日：2018-08-16
申请号：US15511826
申请日：2015-09-16
IPC分类号： H01S3/23 , H01S3/00 , G02F1/355 , G03B21/20 , H01S3/067 , H01S3/094 , H01S3/16 , G02B27/48 , H01S3/30 , G02F1/37
CPC分类号： H01S3/2391 , G02B27/48 , G02F1/3532 , G02F1/3551 , G02F1/37 , G03B21/2033 , H01S3/0092 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/08045 , H01S3/094046 , H01S3/1608 , H01S3/1618 , H01S3/2308 , H01S3/302 , H04N9/3161 , H04N9/3164 , H04N13/334 , H04N13/363
摘要： An RGB light source for a luminaire projector system includes Red, Green and Blue lasers each outputting a randomly polarized (RP) single mode (SM) light with at least a 4 nm spectral linewidth. The Green laser has a MOPFA-structured pump which outputs a pulsed pump beam at a fundamental wavelength in a 1 μm wavelength range and further includes a SHG. The SHG includes an LBO nonlinear crystal receiving the pulsed pump beam and outputting a train of pulses of BB Green light. The Red laser is configured with a QCW fiber laser pump and a frequency converter with an LBO nonlinear crystal outputting a train of pulses of red light in a 6xx nm wavelength range.
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2.发明申请PROCESS AND SYSTEM FOR UNIFORMLY CRYSTALLIZING AMORPHOUS SILICON SUBSTRATE BY FIBER LASER 审中-公开通过光纤激光器使非晶硅基板均匀结晶的工艺和系统公开(公告)号：US20160013057A1
公开(公告)日：2016-01-14
申请号：US14790170
申请日：2015-07-02
发明人： Alexey AVDOKHIN , Yuri EROKHIN , Manuel LEONARDO , Alexander LIMANOV , Igor SAMARTSEV , Michael von Dadelszen
IPC分类号： H01L21/02 , H01L21/67 , H01L29/04 , H01S3/11 , H01S3/0941 , H01S3/094 , H01S3/16 , H01L29/16 , H01S3/067
CPC分类号： H01L21/02686 , H01L21/02532 , H01S3/06745 , H01S3/06754 , H01S3/094003 , H01S3/1618
摘要： The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film irradiating pulsed beam. The fiber laser source is operative to emit a plurality of non-repetitive pulses incident on the a-Si. In particular, the fiber laser is operative to emit multiple discrete packets of film irradiating light at a burst repetition rate (BRR), and a plurality of pulses within each packet emitted at a pulse repetition rate (PRR) which is higher than the BRR. The pulse energy, pulse duration of each pulse and the PRR are controlled so that each packet has a desired packet temporal power profile (W/cm2) and packet energy sufficient to provide transformation of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packets.
摘要翻译： 本发明的用于结晶非晶硅（a-Si）膜的系统由准连续波长的光纤激光源构成，该激光源可操作地发射照射脉冲光束的膜。 光纤激光源可操作地发射入射到a-Si上的多个非重复脉冲。 特别地，光纤激光器以突发重复率（BRR）发射多个离散的薄膜照射光束的分组，并且以比BRR高的脉冲重复率（PRR）发射每个分组内的多个脉冲。 控制脉冲能量，每个脉冲的脉冲持续时间和PRR，使得每个分组具有期望的分组时间功率分布（W / cm 2）和分组能量，其足以在每个分组处提供a-Si到多晶硅（p-Si）的转变 暴露于至少一个数据包的电影的位置。
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公开(公告)号：US20230405713A1
公开(公告)日：2023-12-21
申请号：US18201306
申请日：2023-05-24
发明人： Alexander LIMANOV , Michael VON DADELSZEN , Joshua SCHOENLY , James CORDINGLEY , Manuel LEONARDO
IPC分类号： B23K26/073 , B23K26/082 , B23K26/352
CPC分类号： B23K26/073 , B23K26/0821 , B23K26/352 , H01S3/067
摘要： A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into at least one sub-beam deflected toward the surface being processed; guiding the sub-beam through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure duration and have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.
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公开(公告)号：US20210098255A1
公开(公告)日：2021-04-01
申请号：US16635097
申请日：2018-07-31
摘要： A method of fiber laser processing of thin film deposited on a substrate includes providing a laser beam from at least one fiber laser which is guided through a beam-shaping unit onto the thin film. The beam-shaping optics is configured to shape the laser beam into a line beam which irradiates a first irradiated thin film area Ab on a surface of the thin film, with the irradiated thin film area Ab being a fraction of the thin film area Af. By continuously displacing the beam shaping optics and the film relative to one another in a first direction at a distance dy between sequential irradiations, a sequence of uniform irradiated thin film areas Ab are formed on the film surface defining thus a first elongated column. Thereafter the beam shaped optics and film are displaced relative to one another at a distance dx in a second direction transverse to the first direction with the distance dx being smaller than a length of the irradiated film area Ab. With the steps performed to form respective columns, the elongated columns overlap one another covering the desired thin film area Af. The dx and dy distances are so selected that that each location of the film area Af is exposed to the shaped laser beam during a cumulative predetermined duration.
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公开(公告)号：US20210008660A1
公开(公告)日：2021-01-14
申请号：US16635877
申请日：2018-07-31
发明人： Alexander LIMANOV , Michael VON DADELSZEN , Joshua SCHOENLY , James CORDINGLEY , Manuel LEONARDO
IPC分类号： B23K26/073 , B23K26/352 , B23K26/082
摘要： A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into a plurality of sub-beams deflected towards the surface being processed; guiding the sub-beams through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure duration and have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.
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公开(公告)号：US20170294754A1
公开(公告)日：2017-10-12
申请号：US15511798
申请日：2015-09-16
CPC分类号： H01S3/0092 , G02B27/48 , G02F1/3532 , G02F1/3551 , G02F1/37 , H01S3/0675 , H01S3/06758 , H01S3/08045 , H01S3/094046 , H01S3/1618 , H01S3/2391 , H01S3/302
摘要： A broad line red light generator is configured with a single mode (SM) pulsed ytterbium (“Yb”) fiber laser pump source outputting pump light in a fundamental mode (“FM”) at a pump wavelength which is selected from a 1030-1120 nm wavelength range. The disclosed generator further includes a SM fiber Raman converter spliced to an output of the Yb fiber laser pump source. The Raman converter induces an “n” order frequency Stokes shift of the pump light to output the pump light at a Raman-shifted wavelength within 1220 and 1300 nm wavelength range with a broad spectral line of at least 10 nm. The disclosed light generator further has a single pass second harmonic generator (“SHG”) with a lithium triborate (“LBO”) nonlinear optical crystal having a spectral acceptance linewidth which is sufficient to cover the broad spectral line of the pump light. The SHG generates a SM pulsed broad-line red light with a broad spectral line of at least 4 nm.
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