公开(公告)号：US08158958B2

公开(公告)日：2012-04-17

申请号：US12732960

申请日：2010-03-26

申请人： In-Sung Kim ,  Jooon Park ,  Doo-Hoo Goo ,  Jeong-Hoon Lee ,  Chang-Min Park

发明人： In-Sung Kim ,  Jooon Park ,  Doo-Hoo Goo ,  Jeong-Hoon Lee ,  Chang-Min Park

IPC分类号： G01T1/04

CPC分类号： G03F7/70941 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/44 ,  G03F1/70 ,  G03F7/70433

摘要： A flare evaluation method includes: extracting DC flare reference data using a preliminary measurement pattern mask and a dummy mask having an open region in which a preliminary measurement pattern is formed; providing a plurality of flare gauge sets including an opaque pad, a measurement pattern, and a flare pattern, the measure pattern being disposed at an inside of the opaque pad to measure strength of a flare, the flare pattern being disposed at an outside of the opaque pad to generate the flare; and detecting a change of a photo resist measurement pattern caused by the flare pattern and the measurement pattern for each of the flare gauge sets, wherein an outer radius of the flare pattern increases by a predetermined amount depending on the flare gauge set.

摘要翻译： 闪光评估方法包括：使用初步测量图案掩模和具有形成初步测量图案的开放区域的虚拟掩模来提取DC闪光参考数据; 提供多个包括不透明衬垫，测量图案和耀斑图案的扩口仪，所述测量图案设置在所述不透明衬垫的内侧，以测量耀斑的强度，所述耀斑图案设置在所述不透明衬垫的外侧 不透明垫产生耀斑; 并且检测由每个所述火炬仪的所述火炬图案和所述测量图案引起的光致抗蚀剂测量图案的变化，其中所述耀斑图案的外半径根据所述张力计集合而增加预定量。

公开(公告)号：US20100258744A1

公开(公告)日：2010-10-14

申请号：US12732960

申请日：2010-03-26

申请人： In-Sung Kim ,  Jooon Park ,  Doo-Hoo Goo ,  Jeong-Hoon Lee ,  Chang-Min Park

发明人： In-Sung Kim ,  Jooon Park ,  Doo-Hoo Goo ,  Jeong-Hoon Lee ,  Chang-Min Park

IPC分类号： G01T1/00

CPC分类号： G03F7/70941 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/44 ,  G03F1/70 ,  G03F7/70433

摘要： A flare evaluation method includes: extracting DC flare reference data using a preliminary measurement pattern mask and a dummy mask having an open region in which a preliminary measurement pattern is formed; providing a plurality of flare gauge sets including an opaque pad, a measurement pattern, and a flare pattern, the measure pattern being disposed at an inside of the opaque pad to measure strength of a flare, the flare pattern being disposed at an outside of the opaque pad to generate the flare; and detecting a change of a photo resist measurement pattern caused by the flare pattern and the measurement pattern for each of the flare gauge sets, wherein an outer radius of the flare pattern increases by a predetermined amount depending on the flare gauge set.

摘要翻译： 闪光评估方法包括：使用初步测量图案掩模和具有形成初步测量图案的开放区域的虚拟掩模来提取DC闪光参考数据; 提供多个包括不透明衬垫，测量图案和耀斑图案的扩口仪，所述测量图案设置在所述不透明衬垫的内侧，以测量耀斑的强度，所述耀斑图案设置在所述不透明衬垫的外侧 不透明垫产生耀斑; 并且检测由每个所述火炬仪的所述火炬图案和所述测量图案引起的光致抗蚀剂测量图案的变化，其中所述耀斑图案的外半径根据所述张力计集合而增加预定量。

公开(公告)号：US20100230864A1

公开(公告)日：2010-09-16

申请号：US12719444

申请日：2010-03-08

申请人： Chang-min Park ,  Doo-Hoon Goo ,  Jeong-Ho Yeo ,  Joo-On Park ,  In-Sung Kim ,  Jeong-Hoon Lee

发明人： Chang-min Park ,  Doo-Hoon Goo ,  Jeong-Ho Yeo ,  Joo-On Park ,  In-Sung Kim ,  Jeong-Hoon Lee

IPC分类号： B29C59/16 ,  B29C59/00

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： Nanoimprint lithography templates and methods of fabricating semiconductor devices using the nanoimprint lithography templates are provided. The nanoimprint lithography template includes a transparent substrate having a first refractive index, a stamp pattern on a surface on the transparent substrate and having inclined sidewalls, and a coating layer formed on the inclined sidewalls of the stamp pattern, the coating layer having a second refractive index higher than the first refractive index.

摘要翻译： 提供纳米压印光刻模板和使用纳米压印光刻模板制造半导体器件的方法。 纳米压印光刻模板包括具有第一折射率的透明衬底，在透明衬底上的表面上具有倾斜侧壁的印模图案，以及形成在印模图案的倾斜侧壁上的涂层，该涂层具有第二折射 指数高于第一折射率。

公开(公告)号：US20100190340A1

公开(公告)日：2010-07-29

申请号：US12657750

申请日：2010-01-27

申请人： Jeong-Hoon Lee ,  Jeong-Ho Yeo ,  Joo-On Park ,  In-Sung Kim ,  Doo-Hoon Goo ,  Jin-Hong Park ,  Chang-Min Park

发明人： Jeong-Hoon Lee ,  Jeong-Ho Yeo ,  Joo-On Park ,  In-Sung Kim ,  Doo-Hoon Goo ,  Jin-Hong Park ,  Chang-Min Park

IPC分类号： H01L21/306 ,  B29C43/00 ,  C23F1/00

CPC分类号： G03F7/0002 ,  B29C43/003 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00

摘要： In a method of forming fine patterns, a photocurable coating layer is formed on a substrate. A first surface of a template makes contact with the photocurable coating layer. The first surface of the template includes at least two first patterns having a first dispersion degree of sizes, and at least one portion of the first surface of the template includes a photo attenuation member. A light is irradiated onto the photocurable coating layer through the template to form a cured coating layer including second patterns having a second dispersion degree of sizes. The second patterns are generated from the first patterns and the second dispersion degree is less than the first dispersion degree. The template is separate from the cured coating layer. A size dispersion degree of the patterns used in a nanoimprint lithography process may be adjusted by the light attenuation member, so that the fine patterns may be formed to have an improved size dispersion degree.

摘要翻译： 在形成精细图案的方法中，在基板上形成光固化涂层。 模板的第一表面与光固化涂层接触。 模板的第一表面包括具有第一分散度大小的至少两个第一图案，并且模板的第一表面的至少一部分包括光衰减构件。 通过模板将光照射到可光固化涂层上，以形成具有第二分散度尺寸的第二图案的固化涂层。 从第一图案生成第二图案，第二色散度小于第一色散度。 模板与固化涂层分开。 可以通过光衰减部件调整在纳米压印光刻工艺中使用的图案的尺寸分散度，使得精细图案可以形成为具有改进的尺寸分散度。

公开(公告)号：US08287792B2

公开(公告)日：2012-10-16

申请号：US12657750

申请日：2010-01-27

申请人： Jeong-Hoon Lee ,  Jeong-Ho Yeo ,  Joo-On Park ,  In-Sung Kim ,  Doo-Hoon Goo ,  Jin-Hong Park ,  Chang-Min Park

发明人： Jeong-Hoon Lee ,  Jeong-Ho Yeo ,  Joo-On Park ,  In-Sung Kim ,  Doo-Hoon Goo ,  Jin-Hong Park ,  Chang-Min Park

IPC分类号： B29C59/00

CPC分类号： G03F7/0002 ,  B29C43/003 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00

摘要： In a method of forming fine patterns, a photocurable coating layer is formed on a substrate. A first surface of a template makes contact with the photocurable coating layer. The first surface of the template includes at least two first patterns having a first dispersion degree of sizes, and at least one portion of the first surface of the template includes a photo attenuation member. A light is irradiated onto the photocurable coating layer through the template to form a cured coating layer including second patterns having a second dispersion degree of sizes. The second patterns are generated from the first patterns and the second dispersion degree is less than the first dispersion degree. The template is separate from the cured coating layer. A size dispersion degree of the patterns used in a nanoimprint lithography process may be adjusted by the light attenuation member, so that the fine patterns may be formed to have an improved size dispersion degree.

摘要翻译： 在形成精细图案的方法中，在基板上形成光固化涂层。 模板的第一表面与光固化涂层接触。 模板的第一表面包括具有第一分散度大小的至少两个第一图案，并且模板的第一表面的至少一部分包括光衰减构件。 通过模板将光照射到可光固化涂层上，以形成具有第二分散度尺寸的第二图案的固化涂层。 从第一图案生成第二图案，第二色散度小于第一色散度。 模板与固化涂层分开。 可以通过光衰减部件调整在纳米压印光刻工艺中使用的图案的尺寸分散度，使得精细图案可以形成为具有改进的尺寸分散度。

公开(公告)号：US08296306B1

公开(公告)日：2012-10-23

申请号：US13304800

申请日：2011-11-28

申请人： Kyu-Young Whang ,  Min Soo Kim ,  Jeong-Hoon Lee

发明人： Kyu-Young Whang ,  Min Soo Kim ,  Jeong-Hoon Lee

IPC分类号： G06F7/00

CPC分类号： G06F7/22

摘要： The present invention relates to an algorithm that retrieves only k data elements having the largest (or smallest) key values from a dataset (i.e., top-k results) in a time linearly proportional to the size of the dataset. The proposed method using the algorithm finds the top-k results using a k-sized min (or max) heap structure that maintains candidate elements of the top-k results by scanning all data elements in the dataset only once. In other words, the present invention provides a linear-time top-k sort method that finds top-k results in a time linearly proportional to the size of the dataset (i.e., O(n) time complexity), while conventional sort algorithms for finding top-k results cannot find the top-k results in a time linearly proportional to the size of the dataset (i.e., at least O(n log n) time complexity).

摘要翻译： 本发明涉及在与数据集的大小成线性比例的时间内从数据集中检索具有最大（或最小）密钥值的k个数据元素（即，top-k结果）的算法。 使用该算法的所提出的方法使用k尺寸的最小（或最大）堆结构找到top-k结果，其通过仅扫描数据集中的所有数据元素一次来维护顶部k结果的候选元素。 换句话说，本发明提供一种线性时间top-k分类方法，其以与数据集的大小成线性比例的时间（即，O（n）时间复杂度）来找到top-k结果，而传统的排序算法 找到top-k结果不能在与数据集的大小成线性比例的时间内找到top-k结果（即，至少O（n log n）时间复杂度）。

公开(公告)号：US07762093B2

公开(公告)日：2010-07-27

申请号：US11539367

申请日：2006-10-06

申请人： Jeong-Hoon Lee ,  Young-Kil Kim ,  Tae-Eun Kim

发明人： Jeong-Hoon Lee ,  Young-Kil Kim ,  Tae-Eun Kim

IPC分类号： F25B41/00 ,  F25B49/00

CPC分类号： B60H1/3216 ,  B60H2001/3241 ,  B60H2001/3261 ,  B60H2001/3275

摘要： A variable capacity air conditioner compressor is controlled by setting a car target indoor temperature; sensing car indoor and outdoor temperatures and solar radiation with sensors at predetermined car positions; calculating a vent target discharge temperature using the target temperature, sensed car temperatures and solar radiation; calculating a target evaporator temperature and blower voltage based on target discharge temperature; calculating a control duty based on the target evaporator temperature; calculating target evaporator temperature and blower voltage change rates; determining whether or not the compressor conies under a sudden variable condition based on the control duty, and target evaporator temperature and blower voltage change rates; and setting a control duty change rate maximum value to an accelerative slew rate greater than and equal to a basic slew rate when sudden and not sudden variable conditions are respectively determined.

摘要翻译： 通过设定轿厢目标室内温度来控制可变容量的空调压缩机; 在预定的汽车位置传感汽车的室内和室外温度和太阳辐射; 使用目标温度，感测到的汽车温度和太阳辐射计算排气目标排放温度; 基于目标排放温度计算目标蒸发器温度和风机电压; 基于目标蒸发器温度计算控制值; 计算目标蒸发器温度和风机电压变化率; 基于控制任务确定压缩机是否处于突然可变状态，以及目标蒸发器温度和鼓风机电压变化率; 并且当分别确定突然而不是突然的可变条件时，将控制占空比变化率最大值设定为大于等于基本压摆率的加速转换速率。

公开(公告)号：US20060086117A1

公开(公告)日：2006-04-27

申请号：US11253789

申请日：2005-10-20

申请人： Jeong-Hoon Lee ,  Tae-Eun Kim

发明人： Jeong-Hoon Lee ,  Tae-Eun Kim

IPC分类号： F25B49/00 ,  F25B1/00

CPC分类号： B60H1/3211 ,  B60H2001/3261 ,  B60H2001/3275

摘要： A vehicle air conditioner is controlled to a target control value that controls a swash-plate control value of a swash-plate variable capacity compressor. The variable control is based on temperature deviation between target evaporator temperature and actual evaporator temperature, to control compressor discharge capacity. A target evaporator temperature is set. Deviation between the target evaporator temperature and actual evaporator temperature is calculated. Control coefficients are variably set according to the magnitude of the temperature deviation. A target control value of a pressure control valve of the swash-plate variable capacity compressor is calculated using the control coefficients. The pressure control valve is controlled by the target control value.

公开(公告)号：US08685263B2

公开(公告)日：2014-04-01

申请号：US13555316

申请日：2012-07-23

申请人： Jun-Hee Lee ,  Jeong-Hoon Lee

发明人： Jun-Hee Lee ,  Jeong-Hoon Lee

IPC分类号： B44C1/22

CPC分类号： G03F7/0035

摘要： Disclosed herein is a method of fabricating a cliché capable of preventing a printing roller from touching a bottom surface of the cliché. The method of fabricating the cliché includes forming a mask thin film pattern having a multilayer structure and a photoresist pattern on a base substrate, forming a resistant reinforcement inducing layer to cover the photoresist pattern, thereby transforming the photoresist pattern into a resistant reinforced photoresist pattern, and forming groove patterns having different depths from each other by etching the base substrate using the resistant reinforced photoresist pattern and the mask thin film pattern having the multilayer structure as masks.

摘要翻译： 本文公开了一种制造能够防止印刷辊接触底漆表面的陈腔纸的方法。 制造陈腔菌的方法包括在基底基板上形成具有多层结构和光致抗蚀剂图案的掩模薄膜图案，形成覆盖光致抗蚀剂图案的耐电加强感应层，从而将光致抗蚀剂图案转变成抗电强化光致抗蚀剂图案， 以及通过使用所述耐电强化光致抗蚀剂图案和具有所述多层结构的掩模薄膜图案作为掩模，通过蚀刻所述基底基板来形成彼此具有不同深度的凹槽图案。

公开(公告)号：US08155833B2

公开(公告)日：2012-04-10

申请号：US12470513

申请日：2009-05-22

申请人： Jeong-Hoon Lee ,  Sae-Won Oh ,  Tae-Eun Kim ,  Young-Min Kim ,  Jae-Yup Kim

发明人： Jeong-Hoon Lee ,  Sae-Won Oh ,  Tae-Eun Kim ,  Young-Min Kim ,  Jae-Yup Kim

IPC分类号： G06F7/00

CPC分类号： B60H1/3225 ,  B60H1/3205 ,  F25B2500/12

摘要： The present invention relates to a method for controlling the operation of a compressor for preventing noise that occurs in case of the shortage of refrigerant flow caused by less discharge capacity of the compressor of an air conditioner for a vehicle. The compressor includes a cylinder bore for compressing a refrigerant, a piston inserted into the cylinder bore, a swash plate having a controllable slope with respect to a drive shaft, and a control valve for controlling the slope of the swash plate. The discharge capacity of the compressor is increased if it is determined that vehicle speed and accelerating rate satisfy predetermined conditions. If a low flow rate state of refrigerant of the compressor is predicted, the ECV duty is increased to prevent the compressor from entering the low flow rate state, thereby improving the workability of the compressor and solving the noise problem.

摘要翻译： 本发明涉及一种用于控制压缩机的操作的方法，该压缩机用于防止由于车辆空调的压缩机的较少的排出能力而导致制冷剂流动不足的情况下发生的噪音。 压缩机包括用于压缩制冷剂的气缸孔，插入气缸孔中的活塞，相对于驱动轴具有可控斜率的斜盘，以及用于控制斜盘斜面的控制阀。 如果确定车速和加速率满足预定条件，则压缩机的排出容量增加。 如果预测压缩机的制冷剂的低流量状态，则增加ECV负荷，以防止压缩机进入低流量状态，从而提高压缩机的可操作性并解决噪音问题。