摘要:
In a method of forming fine patterns, a photocurable coating layer is formed on a substrate. A first surface of a template makes contact with the photocurable coating layer. The first surface of the template includes at least two first patterns having a first dispersion degree of sizes, and at least one portion of the first surface of the template includes a photo attenuation member. A light is irradiated onto the photocurable coating layer through the template to form a cured coating layer including second patterns having a second dispersion degree of sizes. The second patterns are generated from the first patterns and the second dispersion degree is less than the first dispersion degree. The template is separate from the cured coating layer. A size dispersion degree of the patterns used in a nanoimprint lithography process may be adjusted by the light attenuation member, so that the fine patterns may be formed to have an improved size dispersion degree.
摘要:
In a method of forming fine patterns, a photocurable coating layer is formed on a substrate. A first surface of a template makes contact with the photocurable coating layer. The first surface of the template includes at least two first patterns having a first dispersion degree of sizes, and at least one portion of the first surface of the template includes a photo attenuation member. A light is irradiated onto the photocurable coating layer through the template to form a cured coating layer including second patterns having a second dispersion degree of sizes. The second patterns are generated from the first patterns and the second dispersion degree is less than the first dispersion degree. The template is separate from the cured coating layer. A size dispersion degree of the patterns used in a nanoimprint lithography process may be adjusted by the light attenuation member, so that the fine patterns may be formed to have an improved size dispersion degree.
摘要:
Nanoimprint lithography templates and methods of fabricating semiconductor devices using the nanoimprint lithography templates are provided. The nanoimprint lithography template includes a transparent substrate having a first refractive index, a stamp pattern on a surface on the transparent substrate and having inclined sidewalls, and a coating layer formed on the inclined sidewalls of the stamp pattern, the coating layer having a second refractive index higher than the first refractive index.
摘要:
A flare evaluation method includes: extracting DC flare reference data using a preliminary measurement pattern mask and a dummy mask having an open region in which a preliminary measurement pattern is formed; providing a plurality of flare gauge sets including an opaque pad, a measurement pattern, and a flare pattern, the measure pattern being disposed at an inside of the opaque pad to measure strength of a flare, the flare pattern being disposed at an outside of the opaque pad to generate the flare; and detecting a change of a photo resist measurement pattern caused by the flare pattern and the measurement pattern for each of the flare gauge sets, wherein an outer radius of the flare pattern increases by a predetermined amount depending on the flare gauge set.
摘要:
A flare evaluation method includes: extracting DC flare reference data using a preliminary measurement pattern mask and a dummy mask having an open region in which a preliminary measurement pattern is formed; providing a plurality of flare gauge sets including an opaque pad, a measurement pattern, and a flare pattern, the measure pattern being disposed at an inside of the opaque pad to measure strength of a flare, the flare pattern being disposed at an outside of the opaque pad to generate the flare; and detecting a change of a photo resist measurement pattern caused by the flare pattern and the measurement pattern for each of the flare gauge sets, wherein an outer radius of the flare pattern increases by a predetermined amount depending on the flare gauge set.
摘要:
The present invention relates to an algorithm that retrieves only k data elements having the largest (or smallest) key values from a dataset (i.e., top-k results) in a time linearly proportional to the size of the dataset. The proposed method using the algorithm finds the top-k results using a k-sized min (or max) heap structure that maintains candidate elements of the top-k results by scanning all data elements in the dataset only once. In other words, the present invention provides a linear-time top-k sort method that finds top-k results in a time linearly proportional to the size of the dataset (i.e., O(n) time complexity), while conventional sort algorithms for finding top-k results cannot find the top-k results in a time linearly proportional to the size of the dataset (i.e., at least O(n log n) time complexity).
摘要:
A variable capacity air conditioner compressor is controlled by setting a car target indoor temperature; sensing car indoor and outdoor temperatures and solar radiation with sensors at predetermined car positions; calculating a vent target discharge temperature using the target temperature, sensed car temperatures and solar radiation; calculating a target evaporator temperature and blower voltage based on target discharge temperature; calculating a control duty based on the target evaporator temperature; calculating target evaporator temperature and blower voltage change rates; determining whether or not the compressor conies under a sudden variable condition based on the control duty, and target evaporator temperature and blower voltage change rates; and setting a control duty change rate maximum value to an accelerative slew rate greater than and equal to a basic slew rate when sudden and not sudden variable conditions are respectively determined.
摘要:
A vehicle air conditioner is controlled to a target control value that controls a swash-plate control value of a swash-plate variable capacity compressor. The variable control is based on temperature deviation between target evaporator temperature and actual evaporator temperature, to control compressor discharge capacity. A target evaporator temperature is set. Deviation between the target evaporator temperature and actual evaporator temperature is calculated. Control coefficients are variably set according to the magnitude of the temperature deviation. A target control value of a pressure control valve of the swash-plate variable capacity compressor is calculated using the control coefficients. The pressure control valve is controlled by the target control value.
摘要:
Disclosed herein is a method of fabricating a cliché capable of preventing a printing roller from touching a bottom surface of the cliché. The method of fabricating the cliché includes forming a mask thin film pattern having a multilayer structure and a photoresist pattern on a base substrate, forming a resistant reinforcement inducing layer to cover the photoresist pattern, thereby transforming the photoresist pattern into a resistant reinforced photoresist pattern, and forming groove patterns having different depths from each other by etching the base substrate using the resistant reinforced photoresist pattern and the mask thin film pattern having the multilayer structure as masks.
摘要:
The present invention relates to a method for controlling the operation of a compressor for preventing noise that occurs in case of the shortage of refrigerant flow caused by less discharge capacity of the compressor of an air conditioner for a vehicle. The compressor includes a cylinder bore for compressing a refrigerant, a piston inserted into the cylinder bore, a swash plate having a controllable slope with respect to a drive shaft, and a control valve for controlling the slope of the swash plate. The discharge capacity of the compressor is increased if it is determined that vehicle speed and accelerating rate satisfy predetermined conditions. If a low flow rate state of refrigerant of the compressor is predicted, the ECV duty is increased to prevent the compressor from entering the low flow rate state, thereby improving the workability of the compressor and solving the noise problem.