-
公开(公告)号:US11387188B2
公开(公告)日:2022-07-12
申请号:US17091657
申请日:2020-11-06
Applicant: Intel Corporation
Inventor: Henning Braunisch , Kemal Aygun , Ajay Jain , Zhiguo Qian
IPC: H01L23/00 , H01L23/538 , H01L23/498 , H01L21/48 , H01L23/14 , H01L23/31
Abstract: Discussed generally herein are methods and devices including or providing a high density interconnect structure. A high density interconnect structure can include a stack of alternating dielectric layers and metallization layers comprising at least three metallization layers including conductive material with low k dielectric material between the conductive material, and at least two dielectric layers including first medium k dielectric material with one or more first vias extending therethrough, the at least two dielectric layers situated between two metallization layers of the at least three metallization layers, a second medium k dielectric material directly on a top surface of the stack, a second via extending through the second medium k dielectric material, the second via electrically connected to conductive material in a metallization layer of the three or more metallization layers, and a pad over the second medium k dielectric material and electrically connected to the second via.
-
公开(公告)号:US11380643B2
公开(公告)日:2022-07-05
申请号:US17009321
申请日:2020-09-01
Applicant: Intel Corporation
Inventor: Dae-Woo Kim , Ajay Jain , Neha M. Patel , Rodrick J. Hendricks , Sujit Sharan
IPC: H01L23/00 , H01L25/065 , H01L23/538
Abstract: An integrated circuit package is disclosed. The integrated circuit package comprises a first integrated circuit die and a second integrated circuit die. The integrated circuit package further includes a substrate, wherein both the first integrated circuit die and the second integrated circuit die are connected to the substrate. The substrate includes an interconnect bridge embedded within the substrate, wherein the interconnect bridge includes at least one metal trace component, wherein the metal trace component includes rounded corners on a bottom portion of the metal trace component.
-
公开(公告)号:US20210057345A1
公开(公告)日:2021-02-25
申请号:US17091657
申请日:2020-11-06
Applicant: Intel Corporation
Inventor: Henning Braunisch , Kemal Aygun , Ajay Jain , Zhiguo Qian
IPC: H01L23/538 , H01L23/00 , H01L23/498 , H01L21/48
Abstract: Discussed generally herein are methods and devices including or providing a high density interconnect structure. A high density interconnect structure can include a stack of alternating dielectric layers and metallization layers comprising at least three metallization layers including conductive material with low k dielectric material between the conductive material, and at least two dielectric layers including first medium k dielectric material with one or more first vias extending therethrough, the at least two dielectric layers situated between two metallization layers of the at least three metallization layers, a second medium k dielectric material directly on a top surface of the stack, a second via extending through the second medium k dielectric material, the second via electrically connected to conductive material in a metallization layer of the three or more metallization layers, and a pad over the second medium k dielectric material and electrically connected to the second via.
-
公开(公告)号:US10833020B2
公开(公告)日:2020-11-10
申请号:US16305752
申请日:2016-06-30
Applicant: Intel Corporation
Inventor: Henning Braunisch , Kemal Aygun , Ajay Jain , Zhiguo Qian
IPC: H01L21/48 , H01L23/538 , H01L23/498 , H01L23/00 , H01L23/14 , H01L23/31
Abstract: Discussed generally herein are methods and devices including or providing a high density interconnect structure. A high density interconnect structure can include a stack of alternating dielectric layers and metallization layers comprising at least three metallization layers including conductive material with low k dielectric material between the conductive material, and at least two dielectric layers including first medium k dielectric material with one or more first vias extending therethrough, the at least two dielectric layers situated between two metallization layers of the at least three metallization layers, a second medium k dielectric material directly on a top surface of the stack, a second via extending through the second medium k dielectric material, the second via electrically connected to conductive material in a metallization layer of the three or more metallization layers, and a pad over the second medium k dielectric material and electrically connected to the second via.
-
公开(公告)号:US11784150B2
公开(公告)日:2023-10-10
申请号:US17825739
申请日:2022-05-26
Applicant: Intel Corporation
Inventor: Dae-Woo Kim , Ajay Jain , Neha M. Patel , Rodrick J. Hendricks , Sujit Sharan
IPC: H01L23/00 , H01L25/065 , H01L23/538
CPC classification number: H01L24/16 , H01L23/538 , H01L23/5383 , H01L23/562 , H01L25/0655 , H01L2224/16227 , H01L2224/16235 , H01L2924/15192 , H01L2924/3512
Abstract: An integrated circuit package is disclosed. The integrated circuit package comprises a first integrated circuit die and a second integrated circuit die. The integrated circuit package further includes a substrate, wherein both the first integrated circuit die and the second integrated circuit die are connected to the substrate. The substrate includes an interconnect bridge embedded within the substrate, wherein the interconnect bridge includes at least one metal trace component, wherein the metal trace component includes rounded corners on a bottom portion of the metal trace component.
-
公开(公告)号:US20200168553A1
公开(公告)日:2020-05-28
申请号:US16774508
申请日:2020-01-28
Applicant: Intel Corporation
Inventor: Henning Braunisch , Kemal Aygun , Ajay Jain , Zhiguo Qian
IPC: H01L23/538 , H01L23/00 , H01L23/498 , H01L21/48
Abstract: Discussed generally herein are methods and devices including or providing a high density interconnect structure. A high density interconnect structure can include a stack of alternating dielectric layers and metallization layers comprising at least three metallization layers including conductive material with low k dielectric material between the conductive material, and at least two dielectric layers including first medium k dielectric material with one or more first vias extending therethrough, the at least two dielectric layers situated between two metallization layers of the at least three metallization layers, a second medium k dielectric material directly on a top surface of the stack, a second via extending through the second medium k dielectric material, the second via electrically connected to conductive material in a metallization layer of the three or more metallization layers, and a pad over the second medium k dielectric material and electrically connected to the second via.
-
公开(公告)号:US20190157232A1
公开(公告)日:2019-05-23
申请号:US16320680
申请日:2016-08-16
Applicant: Intel Corporation
Inventor: Dae-Wood Kim , Ajay Jain , Neha M. Patel , Rodrick J. Hendricks , Sujit Sharan
IPC: H01L23/00
CPC classification number: H01L24/16 , H01L23/538 , H01L23/5383 , H01L23/562 , H01L25/0655 , H01L2224/16227 , H01L2224/16235 , H01L2924/15192 , H01L2924/3512
Abstract: An integrated circuit package is disclosed. The integrated circuit package comprises a first integrated circuit die and a second integrated circuit die. The integrated circuit package further includes a substrate, wherein both the first integrated circuit die and the second integrated circuit die are connected to the substrate. The substrate includes an interconnect bridge embedded within the substrate, wherein the interconnect bridge includes at least one metal trace component, wherein the metal trace component includes rounded corners on a bottom portion of the metal trace component.
-
公开(公告)号:US10797014B2
公开(公告)日:2020-10-06
申请号:US16320680
申请日:2016-08-16
Applicant: Intel Corporation
Inventor: Dae-Woo Kim , Ajay Jain , Neha M. Patel , Rodrick J. Hendricks , Sujit Sharan
IPC: H01L23/00 , H01L25/065 , H01L23/538
Abstract: An integrated circuit package is disclosed. The integrated circuit package comprises a first integrated circuit die and a second integrated circuit die. The integrated circuit package further includes a substrate, wherein both the first integrated circuit die and the second integrated circuit die are connected to the substrate. The substrate includes an interconnect bridge embedded within the substrate, wherein the interconnect bridge includes at least one metal trace component, wherein the metal trace component includes rounded corners on a bottom portion of the metal trace component.
-
-
-
-
-
-
-