LINEAR RATIOMETRIC METAL RESISTOR-BASED TEMPERATURE SENSOR WITH REMOTE SENSING SUPPORT

    公开(公告)号:US20240393186A1

    公开(公告)日:2024-11-28

    申请号:US18324578

    申请日:2023-05-26

    Abstract: Embodiments herein relate to a temperature-sensing circuit for a semiconductor device. The circuit has a remote temperature-sensing element (RTSE) including a metal thermistor formed in a metal layer on the front side or backside of a substrate. The metal thermistor may be serpentine or spiral shaped. The RTSE communicates with a separate sense circuit at another location such as on the substrate. The RTSE can further include a thin film resistor (TFR) in an adjacent dielectric layer of the stack or within the sense circuit. The RTSE is driven alternately at opposing ends to cancel out the effects of power supply variations. An output voltage which represents a sensed temperature is obtained from a point between the metal thermistor and the TFR for processing by an analog-to-digital converter.

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