公开(公告)号：US20130142955A1

公开(公告)日：2013-06-06

申请号：US13737719

申请日：2013-01-09

申请人： INTERMOLECULAR, INC.

发明人： Stephen Mark Lambert ,  Dennis Mullins ,  Cuong Manh Ta ,  Peter Wing Leung

IPC分类号： B05C9/12 ,  B23P6/00 ,  B05D3/12

CPC分类号： B05C9/12 ,  B05C11/028 ,  B05D3/12 ,  B23P6/00 ,  Y10T29/49718

摘要： A doctor blade assembly for use in combination with apparatus for forming a film on a substrate. The doctor blade assembly includes a doctor blade to be mounted on a programmable robot. The doctor blade has a bottom face and spacers at opposite ends of the body of the doctor blade extending a predetermined distance down below the bottom face of the body for contacting a substrate and spacing the bottom face from the substrate. The spacers are adjustable relative to the doctor blade for adjusting the predetermined distance according to the thickness of film to be formed on the substrate. Other aspects and methods are also disclosed.

摘要翻译： 一种刮刀组件，用于与在基底上形成膜的装置组合使用。 刮刀组件包括要安装在可编程机器人上的刮刀。 刮刀具有底面，并且在刮刀主体的相对端处的间隔件在主体的底面下方延伸预定距离，用于接触基底并将底面与基底间隔开。 间隔件相对于刮刀可调节，用于根据要在基底上形成的膜的厚度调节预定距离。 还公开了其它方面和方法。

公开(公告)号：US20130295284A1

公开(公告)日：2013-11-07

申请号：US13935082

申请日：2013-07-03

申请人： Intermolecular, Inc.

发明人： Stephen Lambert ,  Dennis Mullins ,  Cuong Manh Ta

IPC分类号： B05C13/00

CPC分类号： B05C13/00 ,  B01J2219/00328 ,  B01J2219/00533 ,  B01J2219/00691 ,  B25J9/023 ,  B65G49/061 ,  B65G49/067 ,  B65G2249/02 ,  B65G2249/04 ,  B65G2249/045 ,  Y10S901/43

摘要： A substrate holder and method for using it to move a substrate. The holder comprises a frame having an inner periphery defining a first opening for receiving the substrate, and a shoulder projecting laterally inward from the inner periphery of the frame for supporting the substrate in the first frame opening. The shoulder has an inner periphery defining a second opening smaller than the first opening for receiving a substrate support. The holder and a substrate therein is moved to a position above the substrate support and then lowered to a position in which the shoulder of the holder is positioned below a top surface of the substrate support and the substrate is deposited on the top surface of the substrate support.

摘要翻译： 一种基板支架及其使用其移动基板的方法。 保持器包括框架，其具有限定用于接收基板的第一开口的内周边，以及从框架的内周侧向内突出的肩部，用于将基板支撑在第一框架开口中。 肩部具有限定比用于接收基板支撑件的第一开口小的第二开口的内周边。 保持器和其中的衬底移动到衬底支撑件上方的位置，然后下降到保持器的肩部位于衬底支撑件的顶表面下方的位置，并且衬底沉积在衬底的顶表面上 支持。