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公开(公告)号:US20200096555A1
公开(公告)日:2020-03-26
申请号:US16138949
申请日:2018-09-21
Applicant: INVENSENSE, INC.
Inventor: Omid Oliaei , Adolfo Giambastiani
IPC: G01R31/28 , G01R31/3183 , G01P15/00 , G01C19/00
Abstract: Facilitating fault detection of a system using a test input comprising a linear combination of inputs of the system is presented herein. A system can comprise a test signal component that generates, via a test procedure, a test input signal comprising a first linear combination of at least two input signals of the system, and applies the test input signal to the system during a phase of respective phases of the test procedure; and a fault detection component that detects a fault of the system based on a test output signal corresponding to the test input signal and a second linear combination of respective output signals of the system corresponding to the at least two input signals.
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公开(公告)号:US10725068B2
公开(公告)日:2020-07-28
申请号:US15363522
申请日:2016-11-29
Applicant: InvenSense, Inc.
Inventor: Giacomo Gafforelli , Luca Coronato , Adolfo Giambastiani , Federico Mazzarella , Massimiliano Musazzi , Michele Folz
IPC: G01P21/00 , G01P15/125
Abstract: A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the linear acceleration. A sense drive signal is applied at the sense electrode and an auxiliary drive signal is applied at the auxiliary electrode. The sense drive signal and the auxiliary drive signal have different frequencies. An error is identified based on a portion of a signal that is received from the accelerometer and that is responsive to the auxiliary drive signal. Compensation is performed at the accelerometer based on the identified error.
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公开(公告)号:US20240183877A1
公开(公告)日:2024-06-06
申请号:US18495096
申请日:2023-10-26
Applicant: InvenSense, Inc.
Inventor: Adolfo Giambastiani , Luca Coronato , Edoardo Belloni , Stefano Dellea , Yaoching Wang , Giacomo Gafforelli
Abstract: A MEMS accelerometer package includes multiple cavities such that a change in pressure corresponding to a breach in one or more of the cavities is readily identified based on the output of a pressure-sensitive sensor such as a MEMS resonator. One or more mitigations may be initiated in response to the identification of the change in pressure.
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公开(公告)号:US20180284188A1
公开(公告)日:2018-10-04
申请号:US15471539
申请日:2017-03-28
Applicant: INVENSENSE, INC.
Inventor: Omid Oliaei , Adolfo Giambastiani
IPC: G01R31/3183 , G06F11/25
Abstract: A fault detection system on a circuit can detect a fault on the same circuit without using a duplicate circuit. A test signal can be generated based on an input signal, and the input signal and test signal can be sent through the circuit and the resulting signals can be compared to determine if any fault is present. In an embodiment, a function can be applied to bits of the input signal and bits of the test signal such that when the signals are compared after passing through the processing block that is to be tested, if the variation between the signals is above a predetermined amount, it can be determined that a fault has occurred. In other embodiments, a first function can be applied to the input signal, and a second function can be applied to the test signal, and the resulting outputs can be compared.
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公开(公告)号:US20170168088A1
公开(公告)日:2017-06-15
申请号:US15370385
申请日:2016-12-06
Applicant: InvenSense, Inc.
Inventor: Luca Coronato , Giacomo Gafforelli , Adolfo Giambastiani , Federico Mazzarella , Massimiliano Musazzi , Michele Folz
IPC: G01P21/00 , G01P15/125
CPC classification number: G01P21/00 , G01P15/125
Abstract: An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the same sense drive frequency. Capacitance signals are sensed from each of the first capacitor and second capacitor, and a common mode component of the capacitance signals is determined. A capacitor error is identified based on the common mode component.
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公开(公告)号:US12174215B2
公开(公告)日:2024-12-24
申请号:US17102116
申请日:2020-11-23
Applicant: INVENSENSE, INC.
Inventor: Giacomo Gafforelli , Luca Coronato , Adolfo Giambastiani
IPC: G01P21/00 , B81C1/00 , G01P15/08 , G01P15/125
Abstract: A microelectromechanical (MEMS) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. Circuitry receives a sensed signal from the plurality of sense electrodes and identifies a portion of the sensed signal having the first harmonic frequency. Based on this identified portion of the sensed signal, the circuitry determines whether a residual voltage is present on the one or more proof masses or on the one or more sense electrodes, and the circuitry modifies the operation of the accelerometer when the residual voltage is determined to be present in order to compensate for the residual voltage.
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公开(公告)号:US11125580B1
公开(公告)日:2021-09-21
申请号:US16874418
申请日:2020-05-14
Applicant: INVENSENSE, INC.
Inventor: Vito Avantaggiati , Adolfo Giambastiani
IPC: G01C19/5712 , G01C25/00
Abstract: A MEMS inertial sensor may include drive electrodes that apply a drive signal to a suspended spring-mass system for measurement of an inertial linear or angular force and self-test electrodes that apply a self-test signal to the suspended spring-mass system for monitoring the characteristics of the suspended spring-mass system during operation. The self-test signal may be modulated by a spreading sequence that prevents interference with the self-test signal by vibrations and other disturbance signals. The self-test signals and drive signals may be modulated with CDMA code sequences to multiplex signals that are at least partially processed by a common sense path.
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公开(公告)号:US20210102970A1
公开(公告)日:2021-04-08
申请号:US17102116
申请日:2020-11-23
Applicant: INVENSENSE, INC.
Inventor: Giacomo Gafforelli , Luca Coronato , Adolfo Giambastiani
IPC: G01P21/00 , B81C1/00 , G01P15/125
Abstract: A microelectromechanical (MEMS) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. Circuitry receives a sensed signal from the plurality of sense electrodes and identifies a portion of the sensed signal having the first harmonic frequency. Based on this identified portion of the sensed signal, the circuitry determines whether a residual voltage is present on the one or more proof masses or on the one or more sense electrodes, and the circuitry modifies the operation of the accelerometer when the residual voltage is determined to be present in order to compensate for the residual voltage.
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公开(公告)号:US10209157B2
公开(公告)日:2019-02-19
申请号:US15258956
申请日:2016-09-07
Applicant: InvenSense, Inc.
Inventor: Luca Coronato , Giacomo Gafforelli , Adolfo Giambastiani
IPC: G01P1/02 , G01P15/08 , G01M3/26 , B81B7/00 , G01C19/5726 , G01C19/5769 , G01C19/5776 , G01C19/5783 , G01P15/125 , G01P15/18
Abstract: A microelectromechanical sensor (MEMS) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. The accelerometer is located within a cavity, and the seal for the accelerometer cavity is entirely within the gyroscope cavity. Under normal operating conditions, the accelerometer seal holds the accelerometer cavity at a higher pressure than the pressure of the enclosing gyroscope cavity. In the event that one of the gyroscope seal or the accelerometer seal is broken, the gyroscope senses the change in pressure.
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公开(公告)号:US20170167946A1
公开(公告)日:2017-06-15
申请号:US15258956
申请日:2016-09-07
Applicant: InvenSense, Inc.
Inventor: Luca Coronato , Giacomo Gafforelli , Adolfo Giambastiani
IPC: G01M3/26 , G01C19/5783 , G01C19/5776
CPC classification number: G01M3/26 , B81B7/0041 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C99/0045 , G01C19/5726 , G01C19/5769 , G01C19/5776 , G01C19/5783 , G01P1/023 , G01P15/125 , G01P15/18
Abstract: A microelectromechanical sensor (MEMS) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. The accelerometer is located within a cavity, and the seal for the accelerometer cavity is entirely within the gyroscope cavity. Under normal operating conditions, the accelerometer seal holds the accelerometer cavity at a higher pressure than the pressure of the enclosing gyroscope cavity. In the event that one of the gyroscope seal or the accelerometer seal is broken, the gyroscope senses the change in pressure.
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