Processing apparatus and wafer processing method
    2.
    发明授权
    Processing apparatus and wafer processing method 失效
    加工设备和晶圆加工方法

    公开(公告)号:US06946311B2

    公开(公告)日:2005-09-20

    申请号:US10853511

    申请日:2004-05-25

    Inventor: Isamu Kawashima

    Abstract: There are provide a wafer processing method comprising the steps of securing the entirety of a wafer which is provided, on its right side, with a surface protection tape adhered thereto, to a frame by a dicing tape adhered to the underside of the wafer; irradiating the dicing tape of the wafer with ultraviolet light; and detaching the surface protection tape from the right side of the wafer, wherein the order of the occurrence of an irradiating operation for irradiating the dicing tape with ultraviolet light by the ultraviolet light irradiating portion and a detaching operation for detaching the surface protection tape by the detaching portion is determined based on a relation between the adhesive force of the surface protection tape and the adhesive force of the dicing tape before and after an ultraviolet light irradiating operation carried out by the ultraviolet light irradiating portion, and a wafer processing apparatus for carrying out the method. The apparatus may further comprise a recognizing portion which reads and recognizes a recognition mark provided on at least one of the wafer and the frame. Thus, the order of the occurrence of an ultraviolet light irradiating operation and a surface protection tape detaching operation is determined.

    Abstract translation: 提供了一种晶片处理方法,包括以下步骤:通过附着在晶片的下侧的切割带将其右侧的表面保护带附着在其上的晶片的整体固定到框架上; 用紫外线照射晶片的切割带; 并且从晶片的右侧分离表面保护带,其中通过紫外光照射部分用紫外线照射切割带的照射操作的发生顺序和用于将表面保护带分离的拆卸操作 基于由紫外线照射部进行的紫外线照射操作之前和之后的表面保护带的粘合力与切割带的粘合力之间的关系确定分离部分,以及晶片处理装置,用于执行 方法。 该装置还可以包括识别部分,其读取并识别设置在晶片和框架中的至少一个上的识别标记。 因此,确定发生紫外线照射操作和表面保护带分离操作的顺序。

    Turbocharged engine with post fuel injection control
    3.
    发明授权
    Turbocharged engine with post fuel injection control 有权
    带后燃油喷射控制的涡轮增压发动机

    公开(公告)号:US09488124B2

    公开(公告)日:2016-11-08

    申请号:US12920517

    申请日:2009-03-02

    Abstract: Provided is an engine capable of performing post-injection control with a proper fuel injection amount. The engine (1) comprises an engine body (10) equipped with a turbocharger (7), an engine rotational speed sensor (21), an acceleration opening degree sensor (24), a boost sensor (23), a turbo sensor (22), and an ECU (100) for performing post-injection control. The ECU (100) recognizes the rotational speed of the engine, the supercharging pressure, the load on the engine, and the rotational speed of the supercharger, and so performs the post-injection control that the rotational speed of the supercharger becomes equal to the target rotational speed of the supercharger calculated in the ECU (100).

    Abstract translation: 提供了能够以适当的燃料喷射量进行后喷射控制的发动机。 发动机(1)包括配备有涡轮增压器(7),发动机转速传感器(21),加速度开度传感器(24),升压传感器(23),涡轮传感器(22) )和用于执行后喷射控制的ECU(100)。 ECU(100)识别发动机的转速,增压压力,发动机的负荷和增压器的转速,进行后增压器的转速等于 在ECU(100)中计算的增压器的目标转速。

    Tape adhering method and tape adhering device
    4.
    发明授权
    Tape adhering method and tape adhering device 有权
    胶带粘合方法和胶带粘合装置

    公开(公告)号:US08440040B2

    公开(公告)日:2013-05-14

    申请号:US12898568

    申请日:2010-10-05

    Abstract: A tape adhering device including: a drawing roller for drawing out a tape; a tape fixing means for fixing one portion of the tape drawn out from the drawing roller; a tape drawing means for drawing out a predetermined amount of tape, which is fixed by the tape fixing means, from the drawing roller between the tape fixing means and the drawing roller; and a tape adhering means for adhering the tape, which is located in the downstream of the tape fixing means, onto an object to be adhered under the condition that fixing operation of the tape by the tape fixing means is released.

    Abstract translation: 一种胶带粘附装置,包括:用于拉出胶带的拉丝辊; 用于固定从拉丝辊拉出的带的一部分的胶带固定装置; 用于从带固定装置和牵引辊之间的拉丝辊中抽出预定量的由胶带固定装置固定的胶带的胶带牵引装置; 以及用于将位于带固定装置的下游的带粘合到胶带粘合装置上的条带粘合装置,在被胶带固定装置的胶带的固定操作被释放的条件下粘附到待粘合的物体上。

    Engine
    5.
    发明申请
    Engine 有权
    发动机

    公开(公告)号:US20110005223A1

    公开(公告)日:2011-01-13

    申请号:US12920517

    申请日:2009-03-02

    Abstract: Provided is an engine capable of performing post-injection control with a proper fuel injection amount. The engine (1) comprises an engine body (10) equipped with a turbocharger (7), an engine rotational speed sensor (21), an acceleration opening degree sensor (24), a boost sensor (23), a turbo sensor (22), and an ECU (100) for performing post-injection control. The ECU (100) recognizes the rotational speed of the engine, the supercharging pressure, the load on the engine, and the rotational speed of the supercharger, and so performs the post-injection control that the rotational speed of the supercharger becomes equal to the target rotational speed of the supercharger calculated in the ECU (100).

    Abstract translation: 提供了能够以适当的燃料喷射量进行后喷射控制的发动机。 发动机(1)包括配备有涡轮增压器(7),发动机转速传感器(21),加速度开度传感器(24),升压传感器(23),涡轮传感器(22) )和用于执行后喷射控制的ECU(100)。 ECU(100)识别发动机的转速,增压压力,发动机的负荷和增压器的转速,进行后增压器的转速等于 在ECU(100)中计算的增压器的目标转速。

    Engine
    6.
    发明申请
    Engine 有权
    发动机

    公开(公告)号:US20100250101A1

    公开(公告)日:2010-09-30

    申请号:US12743118

    申请日:2008-11-11

    Abstract: It is an object to provide an engine that makes it possible to constantly detect the number of rotations of a supercharger with a calculation load of an ECU reduced. An engine 1 is provided with an engine base 8 comprised of a plurality of cylinders and a turbocharger 7, a crank angle sensor 4, a turbo sensor 5 that detects rotations of the turbocharger 7 as pulses, an amplifier 11 that divides the pulses by an arbitrary division ratio and calculates the divided pulses, and an ECU 10 that judges a surge condition of the turbocharger 7, wherein the ECU 10 sets a predetermined position of a piston of each cylinder in a crank angle of the engine base 8 to count start timing of the divided pulses, outputs the divided pulses counted from the count start timing to the number of predetermined rotations as a first output, and judges that, if a difference between the first outputs at every cylinder is more than a predetermined value, the turbocharger 7 is in the surge condition.

    Abstract translation: 本发明的目的是提供一种发动机,其能够以减少的ECU的计算负荷来不断地检测增压器的转数。 发动机1设置有由多个气缸构成的发动机基座8和涡轮增压器7,曲轴转角传感器4,涡轮增压器7的旋转作为脉冲的涡轮传感器5,将脉冲除以一个 任意分频比,并计算分割脉冲,以及判断涡轮增压器7的喘振状态的ECU10,其中,ECU10将各气缸的活塞的规定位置设定在发动机基座8的曲轴角度,以计数开始时刻 将从计数开始定时开始计数的分割脉冲输出为第一输出的规定转数,判断为每个气缸的第一输出之间的差大于预定值时,涡轮增压器7 处于喘振状态。

    Engine
    7.
    发明授权
    Engine 有权
    发动机

    公开(公告)号:US08402953B2

    公开(公告)日:2013-03-26

    申请号:US12743118

    申请日:2008-11-11

    Abstract: It is an object to provide an engine that makes it possible to constantly detect the number of rotations of a supercharger with a calculation load of an ECU reduced. An engine 1 is provided with an engine base 8 comprised of a plurality of cylinders and a turbocharger 7, a crank angle sensor 4, a turbo sensor 5 that detects rotations of the turbocharger 7 as pulses, an amplifier 11 that divides the pulses by an arbitrary division ratio and calculates the divided pulses, and an ECU 10 that judges a surge condition of the turbocharger 7, wherein the ECU 10 sets a predetermined position of a piston of each cylinder in a crank angle of the engine base 8 to count start timing of the divided pulses, outputs the divided pulses counted from the count start timing to the number of predetermined rotations as a first output, and judges that, if a difference between the first outputs at every cylinder is more than a predetermined value, the turbocharger 7 is in the surge condition.

    Abstract translation: 本发明的目的是提供一种发动机,其能够以减少的ECU的计算负荷来不断地检测增压器的转数。 发动机1设置有由多个气缸构成的发动机基座8和涡轮增压器7,曲轴转角传感器4,涡轮增压器7的旋转作为脉冲的涡轮传感器5,将脉冲除以一个 任意分频比,并计算分割脉冲,以及判断涡轮增压器7的喘振状态的ECU10,其中,ECU10将各气缸的活塞的规定位置设定在发动机基座8的曲轴角度,以计数开始时刻 将从计数开始定时开始计数的分割脉冲输出为第一输出的规定转数,判断为每个气缸的第一输出之间的差大于预定值时,涡轮增压器7 处于喘振状态。

    ENGINE
    8.
    发明申请
    ENGINE 有权
    发动机

    公开(公告)号:US20110023828A1

    公开(公告)日:2011-02-03

    申请号:US12921746

    申请日:2009-03-02

    Abstract: An engine in which a fluctuation in the amount of fuel injection is reduced in the entire operating tolerance of the engine. The engine (1) has an engine body (5) provided with a turbocharger (7), an engine speed sensor (21), a turbo sensor (22), a boost sensor (23), and an ECU (20) for correcting the amount of fuel injection. A control means recognizes an engine speed, a supercharging pressure, a supercharger speed, a fuel injection amount and corrects the fuel injection amount.

    Abstract translation: 在发动机的整个运行公差中,燃料喷射量的波动减小的发动机。 发动机(1)具有设置有涡轮增压器(7),发动机转速传感器(21),涡轮传感器(22),升压传感器(23)和用于校正的ECU(20)的发动机主体(5) 燃油喷射量。 控制装置识别发动机速度,增压压力,增压器速度,燃料喷射量,并校正燃料喷射量。

    CASSETTE CONVEYANCE METHOD AND CASSETTE CONVEYANCE APPARATUS
    9.
    发明申请
    CASSETTE CONVEYANCE METHOD AND CASSETTE CONVEYANCE APPARATUS 审中-公开
    CASSETTE输送方法和CASSETTE输送装置

    公开(公告)号:US20070262276A1

    公开(公告)日:2007-11-15

    申请号:US11740249

    申请日:2007-04-25

    CPC classification number: H01L21/67769

    Abstract: A cassette conveyance apparatus (10) includes: a first conveyance means (20) for conveying a first cassette (40) in a horizontal and vertical direction; and a second conveyance means (30) for conveying a second cassette (50) in a horizontal and vertical direction. In the cassette conveyance apparatus (10), the first and second cassettes are circulated between a predetermined wafer accommodation position (P1), at which a wafer (2) is accommodated in the cassette, and a predetermined cassette replacement position (P0) at which a cassette accommodating a plurality of wafers is replaced with an empty cassette. Due to the foregoing, the wafers are continuously accommodated in the cassette without stopping an operation of a pretreatment step.

    Abstract translation: 盒输送装置(10)包括:用于在水平和垂直方向上输送第一盒(40)的第一输送装置(20) 以及用于在水平和垂直方向上输送第二盒(50)的第二传送装置(30)。 在盒输送装置(10)中,第一和第二盒子在晶片(2)容纳在盒中的预定晶片容纳位置(P 1)和预定的盒更换位置(P 0)之间循环, 其中容纳多个晶片的盒被空盒替换。 由于上述原因,晶片被连续地容纳在盒中,而不停止预处理步骤的操作。

    Device for calculating the quantity of light and method thereof
    10.
    发明申请
    Device for calculating the quantity of light and method thereof 有权
    用于计算光量的装置及其方法

    公开(公告)号:US20050027490A1

    公开(公告)日:2005-02-03

    申请号:US10889673

    申请日:2004-07-12

    Inventor: Isamu Kawashima

    Abstract: A method of calculating a quantity of light by measuring, by using an adhering force measuring unit (71), the adhering force of an ultraviolet light-curable tape (11 or 21) relying upon the quantity of ultraviolet light with which the ultraviolet light-curable tape is irradiated from an ultraviolet light irradiation unit (61), and calculating, by using a calculation unit, the quantity of ultraviolet light corresponding to a predetermined adhering force, from the measured adhering force of the ultraviolet light-curable tape, and a device therefor. The predetermined adhering force may have been stored in advance in the storage unit or the predetermined adhering force may be determined in advance relying upon at least either one of the kind of the ultraviolet light-curable tape or the elapsed time of the ultraviolet light-curable tape. Then, the quantity of light necessary for the ultraviolet light-curable tape that is used is automatically calculated to avoid a problem caused by an insufficient quantity of light or an excess quantity of light.

    Abstract translation: 一种通过使用粘附力测量单元(71)测量紫外线光固化带(11或21)的粘附力的方法来计算光量,该紫外光固化带依赖于紫外光的量, 从紫外光照射单元(61)照射固化胶带,并且通过使用计算单元,根据所测量的紫外光固化胶带的粘附力,计算与预定粘合力相对应的紫外光量,以及 设备。 可以预先将预定的附着力存储在存储单元中,或者可以预先根据紫外线固化胶带的种类或紫外光固化胶带的经过时间来预先确定预定粘合力 胶带。 然后,自动计算所使用的紫外光固化带所需的光量,以避免由于光量不足或过多的光量引起的问题。

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