Abstract:
In an engine 1 equipped with a supercharger 40 consisting of a compressor 41 having a plurality of blades 45 on a turbine shaft 42 and a turbine 42, at least one index means 44 is provided on the turbine shaft 42 or the plurality of blades 45, and a turbo angular velocity sensor 62, which detects a rotation of the index means 44 and a rotation of the plurality of blades 45 respectively, is provided and connected to an ECU 60. In the engine 1, also, a turbo angular velocity computing means, which calculates an angular velocity by obtaining a plurality of pulses per one rotation of the turbine shaft, is provided.
Abstract:
There are provide a wafer processing method comprising the steps of securing the entirety of a wafer which is provided, on its right side, with a surface protection tape adhered thereto, to a frame by a dicing tape adhered to the underside of the wafer; irradiating the dicing tape of the wafer with ultraviolet light; and detaching the surface protection tape from the right side of the wafer, wherein the order of the occurrence of an irradiating operation for irradiating the dicing tape with ultraviolet light by the ultraviolet light irradiating portion and a detaching operation for detaching the surface protection tape by the detaching portion is determined based on a relation between the adhesive force of the surface protection tape and the adhesive force of the dicing tape before and after an ultraviolet light irradiating operation carried out by the ultraviolet light irradiating portion, and a wafer processing apparatus for carrying out the method. The apparatus may further comprise a recognizing portion which reads and recognizes a recognition mark provided on at least one of the wafer and the frame. Thus, the order of the occurrence of an ultraviolet light irradiating operation and a surface protection tape detaching operation is determined.
Abstract:
Provided is an engine capable of performing post-injection control with a proper fuel injection amount. The engine (1) comprises an engine body (10) equipped with a turbocharger (7), an engine rotational speed sensor (21), an acceleration opening degree sensor (24), a boost sensor (23), a turbo sensor (22), and an ECU (100) for performing post-injection control. The ECU (100) recognizes the rotational speed of the engine, the supercharging pressure, the load on the engine, and the rotational speed of the supercharger, and so performs the post-injection control that the rotational speed of the supercharger becomes equal to the target rotational speed of the supercharger calculated in the ECU (100).
Abstract:
A tape adhering device including: a drawing roller for drawing out a tape; a tape fixing means for fixing one portion of the tape drawn out from the drawing roller; a tape drawing means for drawing out a predetermined amount of tape, which is fixed by the tape fixing means, from the drawing roller between the tape fixing means and the drawing roller; and a tape adhering means for adhering the tape, which is located in the downstream of the tape fixing means, onto an object to be adhered under the condition that fixing operation of the tape by the tape fixing means is released.
Abstract:
Provided is an engine capable of performing post-injection control with a proper fuel injection amount. The engine (1) comprises an engine body (10) equipped with a turbocharger (7), an engine rotational speed sensor (21), an acceleration opening degree sensor (24), a boost sensor (23), a turbo sensor (22), and an ECU (100) for performing post-injection control. The ECU (100) recognizes the rotational speed of the engine, the supercharging pressure, the load on the engine, and the rotational speed of the supercharger, and so performs the post-injection control that the rotational speed of the supercharger becomes equal to the target rotational speed of the supercharger calculated in the ECU (100).
Abstract:
It is an object to provide an engine that makes it possible to constantly detect the number of rotations of a supercharger with a calculation load of an ECU reduced. An engine 1 is provided with an engine base 8 comprised of a plurality of cylinders and a turbocharger 7, a crank angle sensor 4, a turbo sensor 5 that detects rotations of the turbocharger 7 as pulses, an amplifier 11 that divides the pulses by an arbitrary division ratio and calculates the divided pulses, and an ECU 10 that judges a surge condition of the turbocharger 7, wherein the ECU 10 sets a predetermined position of a piston of each cylinder in a crank angle of the engine base 8 to count start timing of the divided pulses, outputs the divided pulses counted from the count start timing to the number of predetermined rotations as a first output, and judges that, if a difference between the first outputs at every cylinder is more than a predetermined value, the turbocharger 7 is in the surge condition.
Abstract:
It is an object to provide an engine that makes it possible to constantly detect the number of rotations of a supercharger with a calculation load of an ECU reduced. An engine 1 is provided with an engine base 8 comprised of a plurality of cylinders and a turbocharger 7, a crank angle sensor 4, a turbo sensor 5 that detects rotations of the turbocharger 7 as pulses, an amplifier 11 that divides the pulses by an arbitrary division ratio and calculates the divided pulses, and an ECU 10 that judges a surge condition of the turbocharger 7, wherein the ECU 10 sets a predetermined position of a piston of each cylinder in a crank angle of the engine base 8 to count start timing of the divided pulses, outputs the divided pulses counted from the count start timing to the number of predetermined rotations as a first output, and judges that, if a difference between the first outputs at every cylinder is more than a predetermined value, the turbocharger 7 is in the surge condition.
Abstract:
An engine in which a fluctuation in the amount of fuel injection is reduced in the entire operating tolerance of the engine. The engine (1) has an engine body (5) provided with a turbocharger (7), an engine speed sensor (21), a turbo sensor (22), a boost sensor (23), and an ECU (20) for correcting the amount of fuel injection. A control means recognizes an engine speed, a supercharging pressure, a supercharger speed, a fuel injection amount and corrects the fuel injection amount.
Abstract:
A cassette conveyance apparatus (10) includes: a first conveyance means (20) for conveying a first cassette (40) in a horizontal and vertical direction; and a second conveyance means (30) for conveying a second cassette (50) in a horizontal and vertical direction. In the cassette conveyance apparatus (10), the first and second cassettes are circulated between a predetermined wafer accommodation position (P1), at which a wafer (2) is accommodated in the cassette, and a predetermined cassette replacement position (P0) at which a cassette accommodating a plurality of wafers is replaced with an empty cassette. Due to the foregoing, the wafers are continuously accommodated in the cassette without stopping an operation of a pretreatment step.
Abstract:
A method of calculating a quantity of light by measuring, by using an adhering force measuring unit (71), the adhering force of an ultraviolet light-curable tape (11 or 21) relying upon the quantity of ultraviolet light with which the ultraviolet light-curable tape is irradiated from an ultraviolet light irradiation unit (61), and calculating, by using a calculation unit, the quantity of ultraviolet light corresponding to a predetermined adhering force, from the measured adhering force of the ultraviolet light-curable tape, and a device therefor. The predetermined adhering force may have been stored in advance in the storage unit or the predetermined adhering force may be determined in advance relying upon at least either one of the kind of the ultraviolet light-curable tape or the elapsed time of the ultraviolet light-curable tape. Then, the quantity of light necessary for the ultraviolet light-curable tape that is used is automatically calculated to avoid a problem caused by an insufficient quantity of light or an excess quantity of light.