公开(公告)号：US12041842B2

公开(公告)日：2024-07-16

申请号：US16452530

申请日：2019-06-26

Applicant: JDI Design and Development G.K.

Inventor： Yasuharu Shinokawa ,  Kenichi Nendai ,  Shuhei Yada ,  Jun Yamaguchi

IPC: B23K26/36 ,  B23K26/00 ,  B23K26/06 ,  B23K26/08 ,  B23K26/12 ,  B23K26/362 ,  B23K26/364 ,  H10K71/00 ,  H10K71/20 ,  H10K71/40 ,  B23K103/00

CPC classification number: H10K71/421 ,  B23K26/0006 ,  B23K26/06 ,  B23K26/0876 ,  B23K26/1224 ,  B23K26/123 ,  B23K26/127 ,  B23K26/36 ,  B23K26/362 ,  B23K26/364 ,  H10K71/00 ,  H10K71/231 ,  B23K2103/30

Abstract: A patterning device performs patterning in manufacture of a display panel in which thin films including an organic film are laminated above a substrate. The patterning device includes a chamber, light transmissive plates, and a laser emitter. The chamber has a light transmissive window including a first light transmissive plate through which a laser beam is transmitted and accommodates a thin film laminated substrate. A second light transmissive plate through which the laser beam is transmitted is in the chamber between the first light transmissive plate and the thin film laminated substrate at a position spaced away from the thin film laminated substrate. The laser emitter is outside the chamber and emits the laser beam towards the thin film laminated substrate, through the first light transmissive plate and the second light transmissive plate, to irradiate and remove a portion of the thin film.