公开(公告)号：US07542063B2

公开(公告)日：2009-06-02

申请号：US11020670

申请日：2004-12-27

申请人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

发明人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

IPC分类号： B41J2/47

CPC分类号： H01L51/0013 ,  B23K26/066 ,  H01L51/0011 ,  H01L51/56

摘要： Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.

摘要翻译： 提供一种激光照射装置和使用其的有机发光显示器的制造方法。 激光照射装置包括位于激光发生器下方的掩模，并且掩模被图案化，使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于 扫描方向。 制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束，以在衬底上形成有机层图案。 当使用激光诱导热成像（LITI）方法形成有机层图案时，可以使用具有低能量的激光束进行转印，可以提高激光束效率，有机层可能损坏较小，并且质量 的有机层图案也可以被增强。

公开(公告)号：US20070267629A1

公开(公告)日：2007-11-22

申请号：US11751294

申请日：2007-05-21

申请人： Noh-Min KWAK ,  Tae-Min Kang ,  Jae-Ho Lee ,  Jin-Soo Kim ,  Dae-Woo Lee ,  Seong-Taek Lee

发明人： Noh-Min KWAK ,  Tae-Min Kang ,  Jae-Ho Lee ,  Jin-Soo Kim ,  Dae-Woo Lee ,  Seong-Taek Lee

IPC分类号： H01L29/08 ,  H01L35/24 ,  H01L51/40 ,  H01L51/00

CPC分类号： H01L51/0013 ,  B23K26/0676 ,  B41J2/45 ,  H01L51/56

摘要： A laser irradiation device and a method of fabricating an OLED having an increased laser efficiency. The laser irradiation device includes: a light source to produce a laser beam; a collimation lens disposed adjacent to the light source; and an asymmetrical micro lens array disposed adjacent to the collimation lens. The method includes: providing a substrate having a first electrode; providing a donor substrate for laser transfer, including a sequentially stacked a base layer, a light-to-heat conversion layer, and a transfer layer; disposing the donor substrate on the substrate so that the transfer layer faces the substrate; and irradiating a predetermined region of the base layer using a laser irradiation device having a light source, a collimation lens, and an asymmetrical micro lens array, to transfer the transfer layer onto the substrate, and forming an organic layer pattern on the substrate.

摘要翻译： 激光照射装置和制造具有提高的激光效率的OLED的方法。 激光照射装置包括：产生激光束的光源; 准直透镜，邻近于光源设置; 以及与准直透镜相邻设置的非对称微透镜阵列。 该方法包括：提供具有第一电极的基板; 提供用于激光转移的施主衬底，包括顺序堆叠的基底层，光热转换层和转印层; 将施主衬底设置在衬底上，使得转移层面向衬底; 并且使用具有光源，准直透镜和不对称微透镜阵列的激光照射装置照射基底层的预定区域，以将转印层转印到基板上，并在基板上形成有机层图案。

公开(公告)号：US07223514B2

公开(公告)日：2007-05-29

申请号：US11236494

申请日：2005-09-28

申请人： Tae-Min Kang ,  Jae-Ho Lee ,  Seong-Taek Lee ,  Jin-Soo Kim

发明人： Tae-Min Kang ,  Jae-Ho Lee ,  Seong-Taek Lee ,  Jin-Soo Kim

IPC分类号： G03F7/34 ,  G03F7/16

CPC分类号： H01L51/0013 ,  B41M5/38207 ,  B41M5/42 ,  B41M5/46 ,  B41M2205/12 ,  B41M2205/36 ,  H01L51/56 ,  Y02E10/549 ,  Y02P70/521 ,  Y10S430/136

摘要： A method of fabricating a donor substrate and a method of fabricating an organic light emitting display (OLED) using the donor substrate. The method of fabricating the donor substrate includes preparing a base substrate that includes at least one transfer region and at least one non-transfer region, forming a light-to-heat conversion layer on the base substrate and depositing a transfer layer selectively on the light-to-heat conversion layer and in the at least one transfer region of the base substrate using a shadow mask. To then make the OLED, laser induced thermal imaging is used to transfer the patterned transfer layer from the donor substrate to display regions in an acceptor substrate.

摘要翻译： 一种制造供体衬底的方法和使用该供体衬底制造有机发光显示器（OLED）的方法。 制造供体衬底的方法包括制备包括至少一个转移区域和至少一个非转移区域的基底衬底，在基底衬底上形成光热转换层，并在光上选择性地沉积转移层 使用荫罩的基板的至少一个转印区域。 为了制造OLED，使用激光诱导热成像将图案化的转印层从施主衬底转移到受主衬底中的显示区域。

公开(公告)号：US20060084006A1

公开(公告)日：2006-04-20

申请号：US11247278

申请日：2005-10-12

申请人： Tae-Min Kang ,  Seong-Taek Lee ,  Mu-Hyun Kim ,  Byung-Doo Chin ,  Myung-Won Song ,  Jae-Ho Lee ,  Jin-Soo Kim

发明人： Tae-Min Kang ,  Seong-Taek Lee ,  Mu-Hyun Kim ,  Byung-Doo Chin ,  Myung-Won Song ,  Jae-Ho Lee ,  Jin-Soo Kim

IPC分类号： G03C8/00

CPC分类号： B41M5/46 ,  B41M5/265 ,  C23C14/048 ,  H01L51/0013 ,  H01L51/56 ,  Y10S430/146

摘要： A donor substrate for use in an organic light emitting display comprises a base substrate and a transfer layer disposed on the base substrate. A selective heat generation structure is interposed between the base substrate and the transfer layer. The selective heat generation structure has a heat generation region from which heat is generated by light-to-heat conversion and a heat non-generation region contacting the heat generation region. By employing the donor substrate, it is possible to form minute transfer layer patterns with high accuracy without the need to accurately control the width of a laser beam. A fabrication method of an organic light emitting display comprises disposing the donor substrate on an acceptor substrate, irradiating a laser beam onto the donor substrate, and forming a transfer layer pattern on a pixel electrode of the acceptor substrate.

摘要翻译： 用于有机发光显示器的供体衬底包括基底和设置在基底上的转印层。 选择性发热结构插入在基底基板和转印层之间。 选择性发热结构具有通过光热转换而产生热量的发热区域和与发热区域接触的热非发生区域。 通过使用供体基板，可以高精度地形成微小的转印层图案，而无需精确地控制激光束的宽度。 有机发光显示器的制造方法包括将施主衬底设置在受主衬底上，将激光束照射到施主衬底上，以及在受主衬底的像素电极上形成转印层图案。

公开(公告)号：US20060063097A1

公开(公告)日：2006-03-23

申请号：US11020669

申请日：2004-12-27

申请人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

发明人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

IPC分类号： H01J9/227

CPC分类号： H01L51/0013

摘要： A method of fabricating an organic light emitting display is provided. The method includes repeatedly scanning a laser beam over a predetermined region of a donor substrate with multi-lines in one step using a galvanometer to form an organic layer pattern. The method of the present invention is capable of reducing process time required to form the organic layer pattern and lowering manufacturing cost by repeating multi-line scanning in one step through the laser beam using the galvanometer, when the organic layer pattern is formed using an LITI method.

摘要翻译： 提供一种制造有机发光显示器的方法。 该方法包括使用电流计在一个步骤中多次扫描在施主衬底的预定区域上的激光束，以形成有机层图案。 本发明的方法能够通过使用电流计通过激光束在一个步骤中重复多行扫描来减少形成有机层图案所需的处理时间，而当使用LITI形成有机层图案时 方法。

公开(公告)号：US07999839B2

公开(公告)日：2011-08-16

申请号：US12426821

申请日：2009-04-20

申请人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

发明人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

IPC分类号： B41J2/47

CPC分类号： H01L51/0013 ,  B23K26/066 ,  H01L51/0011 ,  H01L51/56

摘要： Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.

摘要翻译： 提供一种激光照射装置和使用其的有机发光显示器的制造方法。 激光照射装置包括位于激光发生器下方的掩模，并且掩模被图案化，使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于 扫描方向。 制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束，以在衬底上形成有机层图案。 当使用激光诱导热成像（LITI）方法形成有机层图案时，可以使用具有低能量的激光束进行转印，可以提高激光束效率，有机层可能损坏较小，并且质量 的有机层图案也可以被增强。

公开(公告)号：US07674749B2

公开(公告)日：2010-03-09

申请号：US11247278

申请日：2005-10-12

申请人： Tae-Min Kang ,  Seong-Taek Lee ,  Mu-Hyun Kim ,  Byung-Doo Chin ,  Myung-Won Song ,  Jae-Ho Lee ,  Jin-Soo Kim

发明人： Tae-Min Kang ,  Seong-Taek Lee ,  Mu-Hyun Kim ,  Byung-Doo Chin ,  Myung-Won Song ,  Jae-Ho Lee ,  Jin-Soo Kim

IPC分类号： B41M5/035 ,  B41M5/50

CPC分类号： B41M5/46 ,  B41M5/265 ,  C23C14/048 ,  H01L51/0013 ,  H01L51/56 ,  Y10S430/146

摘要： A donor substrate for use in an organic light emitting display comprises a base substrate and a transfer layer disposed on the base substrate. A selective heat generation structure is interposed between the base substrate and the transfer layer. The selective heat generation structure has a heat generation region from which heat is generated by light-to-heat conversion and a heat non-generation region contacting the heat generation region. By employing the donor substrate, it is possible to form minute transfer layer patterns with high accuracy without the need to accurately control the width of a laser beam. A fabrication method of an organic light emitting display comprises disposing the donor substrate on an acceptor substrate, irradiating a laser beam onto the donor substrate, and forming a transfer layer pattern on a pixel electrode of the acceptor substrate.

摘要翻译： 用于有机发光显示器的供体衬底包括基底和设置在基底上的转印层。 选择性发热结构插入在基底基板和转印层之间。 选择性发热结构具有通过光热转换而产生热量的发热区域和与发热区域接触的热非发生区域。 通过使用供体基板，可以高精度地形成微小的转印层图案，而无需精确地控制激光束的宽度。 有机发光显示器的制造方法包括将施主衬底设置在受主衬底上，将激光束照射到施主衬底上，以及在受主衬底的像素电极上形成转印层图案。

公开(公告)号：US20090202950A1

公开(公告)日：2009-08-13

申请号：US12426821

申请日：2009-04-20

申请人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

发明人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

IPC分类号： G03F7/20

CPC分类号： H01L51/0013 ,  B23K26/066 ,  H01L51/0011 ,  H01L51/56

摘要： Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.

摘要翻译： 提供一种激光照射装置和使用其的有机发光显示器的制造方法。 激光照射装置包括位于激光发生器下方的掩模，并且掩模被图案化，使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于 扫描方向。 制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束，以在衬底上形成有机层图案。 当使用激光诱导热成像（LITI）方法形成有机层图案时，可以使用具有低能量的激光束进行转印，可以提高激光束效率，有机层可能损坏较小，并且质量 的有机层图案也可以被增强。

公开(公告)号：US20070034866A1

公开(公告)日：2007-02-15

申请号：US11501059

申请日：2006-08-09

申请人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

发明人： Jae-Ho Lee ,  Tae-Min Kang ,  Seong-Taek Lee ,  Jin-Soo Kim

IPC分类号： H01L29/08

CPC分类号： B41M5/265 ,  B41M3/003 ,  H01L51/0013

摘要： A Laser Induced Thermal Imaging (LITI) mask and an organic electroluminescent device fabrication method using the mask provides a LITI mask in which corner regions are reinforced to improve adhesive force between a receptor substrate and a transfer layer on corners of a pixel portion of the receptor substrate, and an organic electroluminescent device fabrication method using such a LITI mask.

摘要翻译： 激光诱导热成像（LITI）掩模和使用该掩模的有机电致发光器件制造方法提供LITI掩模，其中角部区域被加强以改善受体基底与受体的像素部分的角部上的转移层之间的粘附力 底物和使用这种LITI掩模的有机电致发光器件制造方法。

公开(公告)号：US20060073406A1

公开(公告)日：2006-04-06

申请号：US11236494

申请日：2005-09-28

申请人： Tae-Min Kang ,  Jae-Ho Lee ,  Seong-Taek Lee ,  Jin-Soo Kim

发明人： Tae-Min Kang ,  Jae-Ho Lee ,  Seong-Taek Lee ,  Jin-Soo Kim

IPC分类号： G03C8/00

CPC分类号： H01L51/0013 ,  B41M5/38207 ,  B41M5/42 ,  B41M5/46 ,  B41M2205/12 ,  B41M2205/36 ,  H01L51/56 ,  Y02E10/549 ,  Y02P70/521 ,  Y10S430/136

摘要： A method of fabricating a donor substrate and a method of fabricating an organic light emitting display (OLED) using the donor substrate. The method of fabricating the donor substrate includes preparing a base substrate that includes at least one transfer region and at least one non-transfer region, forming a light-to-heat conversion layer on the base substrate and depositing a transfer layer selectively on the light-to-heat conversion layer and in the at least one transfer region of the base substrate using a shadow mask. To then make the OLED, laser induced thermal imaging is used to transfer the patterned transfer layer from the donor substrate to display regions in an acceptor substrate.

摘要翻译： 一种制造供体衬底的方法和使用该供体衬底制造有机发光显示器（OLED）的方法。 制造供体衬底的方法包括制备包括至少一个转移区域和至少一个非转移区域的基底衬底，在基底衬底上形成光热转换层，并在光上选择性地沉积转移层 使用荫罩的基板的至少一个转印区域。 为了制造OLED，使用激光诱导热成像将图案化的转印层从施主衬底转移到受主衬底中的显示区域。