公开(公告)号：US08183152B2

公开(公告)日：2012-05-22

申请号：US12904363

申请日：2010-10-14

申请人： Jae-Hwang Sim ,  Yoon-Moon Park ,  Keon-Soo Kim ,  Min-Sung Song ,  Young-Ho Lee

发明人： Jae-Hwang Sim ,  Yoon-Moon Park ,  Keon-Soo Kim ,  Min-Sung Song ,  Young-Ho Lee

IPC分类号： H01L21/311

CPC分类号： H01L21/32139 ,  H01L21/0337 ,  H01L27/11519 ,  H01L27/11521 ,  H01L27/11524 ,  H01L27/11526 ,  H01L27/11529 ,  Y10S438/947

摘要： A method of fabricating a semiconductor device facilitates the forming of a conductive pattern of features having different widths. A conductive layer is formed on a substrate, and a mask layer is formed on the conductive layer. First spaced apart patterns are formed on the mask layer and a second pattern including first and second parallel portion is formed beside the first patterns on the mask layer. First auxiliary masks are formed over ends of the first patterns, respectively, and a second auxiliary mask is formed over the second pattern as spanning the first and second portions of the second pattern. The mask layer is then etched to form first mask patterns below the first patterns and a second mask pattern below the second pattern. The first and second patterns and the first and second auxiliary masks are removed. The conductive layer is then etched using the first and second mask patterns as an etch mask.

摘要翻译： 制造半导体器件的方法有助于形成具有不同宽度的特征的导电图案。 在基板上形成导电层，在导电层上形成掩模层。 在掩模层上形成第一间隔开的图案，并且在掩模层上的第一图案旁边形成包括第一和第二平行部分的第二图案。 第一辅助掩模分别形成在第一图案的端部上，并且第二辅助掩模形成在第二图案上，跨越第二图案的第一和第二部分。 然后蚀刻掩模层以在第一图案下方形成第一掩模图案，并在第二图案下方形成第二掩模图案。 去除第一和第二图案以及第一和第二辅助掩模。 然后使用第一和第二掩模图案作为蚀刻掩模蚀刻导电层。

公开(公告)号：US20120132976A1

公开(公告)日：2012-05-31

申请号：US13368556

申请日：2012-02-08

申请人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

发明人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

IPC分类号： H01L29/788 ,  H01L29/06

CPC分类号： H01L21/76229

摘要： A semiconductor device having a dual trench and methods of fabricating the same, a semiconductor module, an electronic circuit board, and an electronic system are provided. The semiconductor device includes a semiconductor substrate having a cell region including a cell trench and a peripheral region including a peripheral trench. The cell trench is filled with a core insulating material layer, and the peripheral trench is filled with a padding insulating material layer conformably formed on an inner surface thereof and a core insulating material layer formed on an inner surface of the padding insulating material layer. The core insulating material layer has a greater fluidity than the padding insulating material layer.

摘要翻译： 提供具有双沟槽的半导体器件及其制造方法，半导体模块，电子电路板和电子系统。 半导体器件包括具有包括单元沟道的单元区域和包括外围沟槽的周边区域的半导体衬底。 电池沟槽填充有芯绝缘材料层，并且周边沟槽填充有在内表面上顺应地形成的填充绝缘材料层和形成在填充绝缘材料层的内表面上的芯绝缘材料层。 芯绝缘材料层具有比填充绝缘材料层更大的流动性。

公开(公告)号：US08187935B2

公开(公告)日：2012-05-29

申请号：US12795025

申请日：2010-06-07

申请人： Young-Ho Lee ,  Keon-Soo Kim ,  Jae-Hwang Sim ,  Jin-Hyun Shin ,  Kyung-Hoon Min

发明人： Young-Ho Lee ,  Keon-Soo Kim ,  Jae-Hwang Sim ,  Jin-Hyun Shin ,  Kyung-Hoon Min

IPC分类号： H01L21/8247

CPC分类号： H01L21/76229 ,  H01L21/823481 ,  H01L27/1052

摘要： A method of forming an active region structure includes preparing a semiconductor substrate having a cell array region and a peripheral circuit region, forming upper cell mask patterns having a line shape in the cell array region, forming first and second peripheral mask patterns in the peripheral circuit region, the first and second peripheral mask patterns being stacked in sequence and covering the peripheral circuit region, and upper surfaces of the upper cell mask patterns forming a step difference with an upper surface of the second peripheral mask pattern, forming spacers on sidewalls of the upper cell mask patterns to expose lower portions of the upper cell mask patterns and the second peripheral mask pattern, and removing the lower portions of the upper cell mask patterns using the spacers and the first and second peripheral mask patterns as an etch mask.

摘要翻译： 形成有源区域结构的方法包括制备具有单元阵列区域和外围电路区域的半导体衬底，在单元阵列区域中形成具有线状的上层单元掩模图案，在外围电路中形成第一和第二外围掩模图案 区域，第一外围掩模图案和第二外围掩模图案依次堆叠并覆盖外围电路区域，并且上部单元掩模图案的上表面与第二外围掩模图案的上表面形成阶梯差，在第二外围掩模图案的侧壁上形成间隔物 上部单元掩模图案以暴露上部单元掩模图案和第二外围掩模图案的下部，并且使用间隔件和第一外围掩模图案和第二外围掩模图案作为蚀刻掩模去除上部单元掩模图案的下部。

公开(公告)号：US08519484B2

公开(公告)日：2013-08-27

申请号：US13368556

申请日：2012-02-08

申请人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

发明人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

IPC分类号： H01L21/70

CPC分类号： H01L21/76229

摘要： A semiconductor device having a dual trench and methods of fabricating the same, a semiconductor module, an electronic circuit board, and an electronic system are provided. The semiconductor device includes a semiconductor substrate having a cell region including a cell trench and a peripheral region including a peripheral trench. The cell trench is filled with a core insulating material layer, and the peripheral trench is filled with a padding insulating material layer conformably formed on an inner surface thereof and a core insulating material layer formed on an inner surface of the padding insulating material layer. The core insulating material layer has a greater fluidity than the padding insulating material layer.

摘要翻译： 提供具有双沟槽的半导体器件及其制造方法，半导体模块，电子电路板和电子系统。 半导体器件包括具有包括单元沟道的单元区域和包括外围沟槽的周边区域的半导体衬底。 电池沟槽填充有芯绝缘材料层，并且周边沟槽填充有在内表面上顺应地形成的填充绝缘材料层和形成在填充绝缘材料层的内表面上的芯绝缘材料层。 芯绝缘材料层具有比填充绝缘材料层更大的流动性。

公开(公告)号：US08129238B2

公开(公告)日：2012-03-06

申请号：US12951490

申请日：2010-11-22

申请人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

发明人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

IPC分类号： H01L21/8242

CPC分类号： H01L21/76229

摘要： A semiconductor device having a dual trench and methods of fabricating the same, a semiconductor module, an electronic circuit board, and an electronic system are provided. The semiconductor device includes a semiconductor substrate having a cell region including a cell trench and a peripheral region including a peripheral trench. The cell trench is filled with a core insulating material layer, and the peripheral trench is filled with a padding insulating material layer conformably formed on an inner surface thereof and a core insulating material layer formed on an inner surface of the padding insulating material layer. The core insulating material layer has a greater fluidity than the padding insulating material layer.

摘要翻译： 提供具有双沟槽的半导体器件及其制造方法，半导体模块，电子电路板和电子系统。 半导体器件包括具有包括单元沟道的单元区域和包括外围沟槽的周边区域的半导体衬底。 电池沟槽填充有芯绝缘材料层，并且周边沟槽填充有在内表面上顺应地形成的填充绝缘材料层和形成在填充绝缘材料层的内表面上的芯绝缘材料层。 芯绝缘材料层具有比填充绝缘材料层更大的流动性。

公开(公告)号：US20110165757A1

公开(公告)日：2011-07-07

申请号：US12951490

申请日：2010-11-22

申请人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

发明人： Dong-Won Kim ,  Jae-Hwang Sim ,  Keon-Soo Kim ,  Young-Ho Lee

IPC分类号： H01L21/762

CPC分类号： H01L21/76229

摘要： A semiconductor device having a dual trench and methods of fabricating the same, a semiconductor module, an electronic circuit board, and an electronic system are provided. The semiconductor device includes a semiconductor substrate having a cell region including a cell trench and a peripheral region including a peripheral trench. The cell trench is filled with a core insulating material layer, and the peripheral trench is filled with a padding insulating material layer conformably formed on an inner surface thereof and a core insulating material layer formed on an inner surface of the padding insulating material layer. The core insulating material layer has a greater fluidity than the padding insulating material layer.

摘要翻译： 提供具有双沟槽的半导体器件及其制造方法，半导体模块，电子电路板和电子系统。 半导体器件包括具有包括单元沟道的单元区域和包括外围沟槽的周边区域的半导体衬底。 电池沟槽填充有芯绝缘材料层，并且周边沟槽填充有在内表面上顺应地形成的填充绝缘材料层和形成在填充绝缘材料层的内表面上的芯绝缘材料层。 芯绝缘材料层具有比填充绝缘材料层更大的流动性。

公开(公告)号：US20110092048A1

公开(公告)日：2011-04-21

申请号：US12795025

申请日：2010-06-07

申请人： Young-Ho Lee ,  Keon-Soo Kim ,  Jae-Hwang Sim ,  Jin-Hyun Shin ,  Kyung-Hoon Min

发明人： Young-Ho Lee ,  Keon-Soo Kim ,  Jae-Hwang Sim ,  Jin-Hyun Shin ,  Kyung-Hoon Min

IPC分类号： H01L21/762

CPC分类号： H01L21/76229 ,  H01L21/823481 ,  H01L27/1052

摘要： A method of forming an active region structure includes preparing a semiconductor substrate having a cell array region and a peripheral circuit region, forming upper cell mask patterns having a line shape in the cell array region, forming first and second peripheral mask patterns in the peripheral circuit region, the first and second peripheral mask patterns being stacked in sequence and covering the peripheral circuit region, and upper surfaces of the upper cell mask patterns forming a step difference with an upper surface of the second peripheral mask pattern, forming spacers on sidewalls of the upper cell mask patterns to expose lower portions of the upper cell mask patterns and the second peripheral mask pattern, and removing the lower portions of the upper cell mask patterns using the spacers and the first and second peripheral mask patterns as an etch mask.

摘要翻译： 形成有源区域结构的方法包括制备具有单元阵列区域和外围电路区域的半导体衬底，在单元阵列区域中形成具有线状的上层单元掩模图案，在外围电路中形成第一和第二外围掩模图案 区域，第一外围掩模图案和第二外围掩模图案依次堆叠并覆盖外围电路区域，并且上部单元掩模图案的上表面与第二外围掩模图案的上表面形成阶梯差，在第二外围掩模图案的侧壁上形成间隔物 上部单元掩模图案以暴露上部单元掩模图案和第二外围掩模图案的下部，并且使用间隔件和第一外围掩模图案和第二外围掩模图案作为蚀刻掩模去除上部单元掩模图案的下部。

公开(公告)号：US09117654B2

公开(公告)日：2015-08-25

申请号：US13470773

申请日：2012-05-14

申请人： Young-Ho Lee ,  Jae-Kwan Park ,  Jae-Hwang Sim ,  Sang-Yong Park

发明人： Young-Ho Lee ,  Jae-Kwan Park ,  Jae-Hwang Sim ,  Sang-Yong Park

IPC分类号： H01L21/467 ,  H01L27/02 ,  H01L21/033 ,  H01L21/308 ,  H01L21/3213 ,  H01L21/762 ,  H01L23/544 ,  H01L27/115 ,  H01L27/105

CPC分类号： H01L27/0207 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/3081 ,  H01L21/3086 ,  H01L21/32139 ,  H01L21/76229 ,  H01L23/544 ,  H01L27/1052 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11529 ,  H01L2924/0002 ,  H01L2924/14 ,  H01L2924/00

摘要： A method of fabricating an integrated circuit device includes forming first and second mask structures on respective first and second regions of a feature layer. Each of the first and second mask structures includes a dual mask pattern and an etch mask pattern thereon having an etch selectivity relative to the dual mask pattern. The etch mask patterns of the first and second mask structures are etched to partially remove the etch mask pattern from the second mask structure. Spacers are formed on opposing sidewalls of the first and second mask structures. The first mask structure is selectively removed from between the spacers in the first region to define a first mask pattern including the opposing sidewall spacers with a void therebetween in the first region, and a second mask pattern including the opposing sidewall spacers with the second mask structure therebetween in the second region.

摘要翻译： 制造集成电路器件的方法包括在特征层的相应的第一和第二区域上形成第一和第二掩模结构。 第一和第二掩模结构中的每一个包括双掩模图案和其上具有相对于双掩模图案的蚀刻选择性的蚀刻掩模图案。 蚀刻第一和第二掩模结构的蚀刻掩模图案以从第二掩模结构部分去除蚀刻掩模图案。 间隔件形成在第一和第二掩模结构的相对侧壁上。 第一掩模结构被选择性地从第一区域中的间隔物之间​​移除，以限定第一掩模图案，其包括在第一区域中具有空隙的相对的侧壁间隔物，以及包括与第二掩模结构相对的侧壁间隔物的第二掩模图案 在第二区域中。

公开(公告)号：US20140191405A1

公开(公告)日：2014-07-10

申请号：US14208456

申请日：2014-03-13

申请人： Young-Ho Lee ,  Jae-Hwang Sim ,  Sang-Yong Park ,  Kyung-Lyul Moon

发明人： Young-Ho Lee ,  Jae-Hwang Sim ,  Sang-Yong Park ,  Kyung-Lyul Moon

IPC分类号： H01L23/528

CPC分类号： H01L23/528 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/3086 ,  H01L21/3088 ,  H01L21/31144 ,  H01L21/76229 ,  H01L21/76816 ,  H01L21/76838 ,  H01L27/10814 ,  H01L27/10855 ,  H01L27/11519 ,  H01L27/11526 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a method of forming patterns for a semiconductor device in which fine patterns and large-width patterns are formed simultaneously and adjacent to each other. In the method, a first layer is formed on a substrate so as to cover a first region and a second region which are included in the substrate. Both a blocking pattern covering a portion of the first layer in the first region and a low-density large-width pattern covering a portion of the first layer in the second region are simultaneously formed. A plurality of sacrificial mask patterns are formed on the first layer and the blocking pattern in the first region. A plurality of spacers covering exposed sidewalls of the plurality of sacrificial mask patterns are formed. The plurality of sacrificial mask patterns are removed. The first layer in the first and second regions are simultaneously etched by using the plurality of spacers and the blocking pattern as etch masks in the first region and using the low-density large-width pattern as an etch mask in the second region.

摘要翻译： 提供一种形成半导体器件的图案的方法，其中精细图案和大幅图案同时并且彼此相邻地形成。 在该方法中，在衬底上形成第一层以覆盖包括在衬底中的第一区域和第二区域。 同时形成覆盖第一区域中的第一层的一部分的阻挡图案和覆盖第二区域中的第一层的一部分的低密度大图案。 在第一层上形成多个牺牲掩模图案，并在第一区域中形成阻挡图案。 形成覆盖多个牺牲掩模图案的暴露侧壁的多个间隔物。 去除多个牺牲掩模图案。 通过使用多个间隔物和阻挡图案作为第一区域中的蚀刻掩模并且在第二区域中使用低密度大宽度图案作为蚀刻掩模，同时蚀刻第一和第二区域中的第一层。

公开(公告)号：US08318603B2

公开(公告)日：2012-11-27

申请号：US12653588

申请日：2009-12-16

申请人： Young-Ho Lee ,  Jae-Hwang Sim ,  Sang-Yong Park ,  Kyung-Lyul Moon

发明人： Young-Ho Lee ,  Jae-Hwang Sim ,  Sang-Yong Park ,  Kyung-Lyul Moon

IPC分类号： H01L21/311

CPC分类号： H01L23/528 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/3086 ,  H01L21/3088 ,  H01L21/31144 ,  H01L21/76229 ,  H01L21/76816 ,  H01L21/76838 ,  H01L27/10814 ,  H01L27/10855 ,  H01L27/11519 ,  H01L27/11526 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a method of forming patterns for a semiconductor device in which fine patterns and large-width patterns are formed simultaneously and adjacent to each other. In the method, a first layer is formed on a substrate so as to cover a first region and a second region which are included in the substrate. Both a blocking pattern covering a portion of the first layer in the first region and a low-density large-width pattern covering a portion of the first layer in the second region are simultaneously formed. A plurality of sacrificial mask patterns are formed on the first layer and the blocking pattern in the first region. A plurality of spacers covering exposed sidewalls of the plurality of sacrificial mask patterns are formed. The plurality of sacrificial mask patterns are removed. The first layer in the first and second regions are simultaneously etched by using the plurality of spacers and the blocking pattern as etch masks in the first region and using the low-density large-width pattern as an etch mask in the second region.

摘要翻译： 提供一种形成半导体器件的图案的方法，其中精细图案和大幅图案同时并且彼此相邻地形成。 在该方法中，在衬底上形成第一层以覆盖包括在衬底中的第一区域和第二区域。 同时形成覆盖第一区域中的第一层的一部分的阻挡图案和覆盖第二区域中的第一层的一部分的低密度大图案。 在第一层上形成多个牺牲掩模图案，并在第一区域中形成阻挡图案。 形成覆盖多个牺牲掩模图案的暴露侧壁的多个间隔物。 去除多个牺牲掩模图案。 通过使用多个间隔物和阻挡图案作为第一区域中的蚀刻掩模并且在第二区域中使用低密度大宽度图案作为蚀刻掩模，同时蚀刻第一和第二区域中的第一层。