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公开(公告)号：US20090132094A1
公开(公告)日：2009-05-21
申请号：US11666124
申请日：2005-11-21
申请人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
发明人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。 更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。
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公开(公告)号：US20120070313A1
公开(公告)日：2012-03-22
申请号：US13301516
申请日：2011-11-21
申请人： George Gonnella , James Cedrone , Iraj Gashgaee
发明人： George Gonnella , James Cedrone , Iraj Gashgaee
IPC分类号： F04B49/06
CPC分类号： F04B17/03 , F04B25/00 , F04B49/065 , Y10S417/90
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
摘要翻译： 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。
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公开(公告)号：US20070128050A1
公开(公告)日：2007-06-07
申请号：US11602464
申请日：2006-11-20
申请人： James Cedrone , George Gonnella , Iraj Gashgaee
发明人： James Cedrone , George Gonnella , Iraj Gashgaee
IPC分类号： F04B3/00
CPC分类号： F04B43/04 , F04B7/0076 , F04B9/02 , F04B13/00 , F04B23/06 , F04B49/065 , F04B53/06 , F04B53/16 , F04B53/22 , F04B2201/0201 , F04B2201/0601 , F04B2205/03 , Y10T29/49236 , Y10T137/87885
摘要： Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having a motor driven feed stage pump and a motor driven dispense stage pump. The feed stage motor and the feed stage motor can include various types of motors and the pumps can be rolling diaphragm or other pumps. According to one embodiment, a dispense block defining the pump chambers and various flow passages can be formed out of a single piece of material.
摘要翻译： 本发明的实施例提供具有减小形状因素并提高可靠性和可服务性的特征的泵。 此外，本发明的实施例提供了用于温和流体处理特性的特征。 本发明的实施例可以包括具有马达驱动的进料级泵和马达驱动的分配级泵的泵。 进料级马达和进料级马达可以包括各种类型的马达，泵可以是滚动隔膜或其他泵。 根据一个实施例，可以由单件材料形成限定泵室和各种流动通道的分配块。
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公开(公告)号：US20070128048A1
公开(公告)日：2007-06-07
申请号：US11602485
申请日：2006-11-20
申请人： George Gonnella , James Cedrone , Iraj Gashgaee
发明人： George Gonnella , James Cedrone , Iraj Gashgaee
IPC分类号： F04B49/06
CPC分类号： F04B17/03 , F04B25/00 , F04B49/065 , Y10S417/90
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
摘要翻译： 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。
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公开(公告)号：US08814536B2
公开(公告)日：2014-08-26
申请号：US13554746
申请日：2012-07-20
申请人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
发明人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。
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公开(公告)号：US08678775B2
公开(公告)日：2014-03-25
申请号：US13301516
申请日：2011-11-21
申请人： George Gonnella , James Cedrone , Iraj Gashgaee
发明人： George Gonnella , James Cedrone , Iraj Gashgaee
IPC分类号： F04B35/04
CPC分类号： F04B17/03 , F04B25/00 , F04B49/065 , Y10S417/90
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
摘要翻译： 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率来减少发热，而不会不期望地损害分配泵的精确位置控制。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。
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公开(公告)号：US20120288379A1
公开(公告)日：2012-11-15
申请号：US13554746
申请日：2012-07-20
申请人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
发明人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
IPC分类号： F04B45/04
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。
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公开(公告)号：US08753097B2
公开(公告)日：2014-06-17
申请号：US12218325
申请日：2008-07-14
IPC分类号： F04B17/00
CPC分类号： B01D35/30 , B01D24/38 , B01D24/383 , B01D24/42 , B01D24/4876 , B01D29/39 , B01D29/43 , B01D35/02 , B01D39/2075 , F04B15/02 , F04B25/00 , F04B25/005 , F04B39/16 , F04B49/065 , F04B53/20 , F04B2205/14 , Y10T137/87885
摘要： Embodiments described herein provide systems and methods for high viscosity pumps including a noncompliant filter. One embodiment can include a multi-stage pump comprising an pump inlet flow path, a pump outlet flow path, a feed stage in fluid communication with the pump inlet flow path, a dispense stage in fluid communication with the feed stage and the pump outlet flow path, a noncompliant disposable filter for high viscosity fluid in a flow path between the feed stage and the dispense stage and a set of valves to selectively allow fluid flow through the multi-stage pump.
摘要翻译： 本文描述的实施例提供了包括不合格过滤器的高粘度泵的系统和方法。 一个实施例可以包括多级泵，其包括泵入口流动路径，泵出口流动路径，与泵入口流动路径流体连通的进料级，与进料级流体连通的分配级和泵出口流 路径，用于进料级和分配级之间的流动路径中的高粘度流体的不合规的一次性过滤器和一组选择性地允许流体流过多级泵的阀。
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公开(公告)号：US08651823B2
公开(公告)日：2014-02-18
申请号：US13216944
申请日：2011-08-24
申请人： James Cedrone , George Gonnella , Iraj Gashgaee
发明人： James Cedrone , George Gonnella , Iraj Gashgaee
IPC分类号： F04B35/04
CPC分类号： F04B43/04 , F04B7/0076 , F04B9/02 , F04B13/00 , F04B23/06 , F04B49/065 , F04B53/06 , F04B53/16 , F04B53/22 , F04B2201/0201 , F04B2201/0601 , F04B2205/03 , Y10T29/49236 , Y10T137/87885
摘要： Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having a motor driven feed stage pump and a motor driven dispense stage pump. The feed stage motor and the feed stage motor can include various types of motors and the pumps can be rolling diaphragm or other pumps. According to one embodiment, a dispense block defining the pump chambers and various flow passages can be formed out of a single piece of material.
摘要翻译： 本发明的实施例提供具有减小形状因素并提高可靠性和可服务性的特征的泵。 此外，本发明的实施例提供了用于温和流体处理特性的特征。 本发明的实施例可以包括具有马达驱动的进料级泵和马达驱动的分配级泵的泵。 进料级马达和进料级马达可以包括各种类型的马达，泵可以是滚动隔膜或其他泵。 根据一个实施例，可以由单件材料形成限定泵室和各种流动通道的分配块。
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公开(公告)号：US08292598B2
公开(公告)日：2012-10-23
申请号：US11666124
申请日：2005-11-21
申请人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
发明人： Marc Laverdiere , James Cedrone , George Gonnella , Iraj Gashgaee , Paul Magoon , Timothy J. King
IPC分类号： F04B49/00
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译： 本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。 更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。
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