POLISHING PAD HAVING EDGE SURFACE TREATMENT
    5.
    发明申请
    POLISHING PAD HAVING EDGE SURFACE TREATMENT 审中-公开
    具有边缘表面处理的抛光垫

    公开(公告)号:US20070015448A1

    公开(公告)日:2007-01-18

    申请号:US11428475

    申请日:2006-07-03

    IPC分类号: B24D11/00

    CPC分类号: B24B37/22

    摘要: A polishing pad has a sublayer and a polishing layer, wherein the surface of the outer peripheral edge of the sublayer can be at least partially treated to reduce the absorption or permeation of polishing fluid into the sublayer through the outer peripheral edge. The application of the surface treatment at least reduces the amount of polishing fluid absorbed by the sublayer of the polishing pad during the polishing process. The polishing pad of the present invention is useful in polishing microelectronic substrates and especially useful in chemical mechanical planarization of semiconductor wafers.

    摘要翻译: 抛光垫具有子层和抛光层,其中可以至少部分地处理子层的外周边缘的表面,以减少抛光流体通过​​外周边缘进入子层的吸收或渗透。 在抛光过程中,表面处理的应用至少减少抛光垫子层吸收的抛光液的量。 本发明的抛光垫可用于抛光微电子衬底,并且特别适用于半导体晶片的化学机械平面化。

    Polyurethane urea polishing pad
    6.
    发明申请
    Polyurethane urea polishing pad 审中-公开
    聚氨酯尿素抛光垫

    公开(公告)号:US20060089093A1

    公开(公告)日:2006-04-27

    申请号:US10974529

    申请日:2004-10-27

    IPC分类号: B29C44/00 B24D11/00

    摘要: The present invention relates to an article for altering a surface of a workpiece, or a polishing pad. In particular, the polishing pad includes a polyurethane urea material wherein at least a portion of the polyurethane urea material contains cells which are at least partially filled with gas. The polyurethane urea material can be prepared by combining polyisocyanate and/or polyurethane prepolymer, hydroxyl-containing material, amine-containing material and blowing agent. The polishing pad according to the present invention is useful for polishing articles, and is especially useful for chemical mechanical polishing or planarization of microelectronic and optical electronic devices such as but not limited to semiconductor wafers.

    摘要翻译: 本发明涉及一种用于改变工件表面或抛光垫的制品。 特别地,抛光垫包括聚氨酯脲材料,其中至少一部分聚氨酯脲材料含有至少部分填充有气体的电池。 聚氨酯脲材料可以通过将多异氰酸酯和/或聚氨酯预聚物,含羟基材料,含胺材料和发泡剂组合来制备。 根据本发明的抛光垫可用于抛光制品,并且特别适用于微电子和光电子器件的化学机械抛光或平面化,例如但不限于半导体晶片。

    Polyurethane urea polishing pad
    8.
    发明申请

    公开(公告)号:US20060254706A1

    公开(公告)日:2006-11-16

    申请号:US11489331

    申请日:2006-07-19

    IPC分类号: B29C44/04

    CPC分类号: B24B37/205 Y10T156/1057

    摘要: The present invention relates to an article for altering a surface of a workpiece, or a polishing pad having a window. In particular, the polishing pad includes a polyurethane urea material wherein the polyurethane urea material contains cells which are at least partially filled with gas. The polyurethane urea material can be prepared by combining polyisocyanate and/or polyurethane prepolymer, hydroxyl-containing material, amine-containing material and blowing agent. The polishing pad according to the present invention is useful for polishing articles, and is especially useful for chemical mechanical polishing or planarization of microelectronic and optical electronic devices such as but not limited to semiconductor wafers. The window of the polishing pad is at least partially transparent and thus, can be particularly useful with polishing or planarizing tools that are equipped with through-the-platen wafer metrology.

    Polyurethane urea polishing pad
    9.
    发明申请

    公开(公告)号:US20060089095A1

    公开(公告)日:2006-04-27

    申请号:US10974528

    申请日:2004-10-27

    IPC分类号: B24D11/00

    CPC分类号: B24B37/205 Y10T156/1057

    摘要: The present invention relates to an article for altering a surface of a workpiece, or a polishing pad having a window. In particular, the polishing pad includes a polyurethane urea material wherein the polyurethane urea material contains cells which are at least partially filled with gas. The polyurethane urea material can be prepared by combining polyisocyanate and/or polyurethane prepolymer, hydroxyl-containing material, amine-containing material and blowing agent. The polishing pad according to the present invention is useful for polishing articles, and is especially useful for chemical mechanical polishing or planarization of microelectronic and optical electronic devices such as but not limited to semiconductor wafers. The window of the polishing pad is at least partially transparent and thus, can be particularly useful with polishing or planarizing tools that are equipped with through-the-platen wafer metrology.

    Polyurethane urea polishing pad
    10.
    发明申请
    Polyurethane urea polishing pad 审中-公开
    聚氨酯尿素抛光垫

    公开(公告)号:US20060089094A1

    公开(公告)日:2006-04-27

    申请号:US10974517

    申请日:2004-10-27

    IPC分类号: B24D11/00

    摘要: The present invention relates to an article for altering a surface of a workpiece, or a polishing pad having a window. In particular, the polishing pad includes a polyurethane urea material wherein the polyurethane urea material contains cells which are at least partially filled with gas. The polyurethane urea material can be prepared by combining polyisocyanate and/or polyurethane prepolymer, hydroxyl-containing material, amine-containing material and blowing agent. The polishing pad according to the present invention is useful for polishing articles, and is especially useful for chemical mechanical polishing or planarization of microelectronic and optical electronic devices such as but not limited to semiconductor wafers. The window of the polishing pad is at least partially transparent and thus, can be particularly useful with polishing or planarizing tools that are equipped with through-the-platen wafer metrology.

    摘要翻译: 本发明涉及用于改变工件表面的制品或具有窗口的抛光垫。 特别地,抛光垫包括聚氨酯脲材料,其中聚氨酯脲材料含有至少部分填充有气体的电池。 聚氨酯脲材料可以通过混合多异氰酸酯和/或聚氨酯预聚物,含羟基的材料,含胺材料和发泡剂来制备。 根据本发明的抛光垫可用于抛光制品,并且特别适用于微电子和光电子器件的化学机械抛光或平面化,例如但不限于半导体晶片。 抛光垫的窗口至少部分是透明的,因此,可以特别有用于抛光或平面化具有通过压板晶片计量的工具。