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    Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
    1.
    发明授权
    Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use 失效
    室内污水监测系统和半导体处理系统，包括吸收光谱测量系统和使用方法

    公开(公告)号：US06493086B1

    公开(公告)日：2002-12-10

    申请号：US09722610

    申请日：2000-11-28

    申请人： James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

    发明人： James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

    IPC分类号： G01N2100

    CPC分类号： G01N21/031 ,  C23C16/4412 ,  G01J3/433 ,  G01N21/3504 ,  G01N21/3554 ,  G01N21/39

    摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

    摘要翻译： 提供了一种新型室流出物监测系统。 该系统包括具有连接到其上的排气管的室。 排气管线包括样品区域，其中基本上所有的室排出物也通过样品区域。 该系统还包括用于检测气相分子种类的吸收光谱测量系统。 测量系统包括光源和主检测器，其通过一个或多个光透射窗与样品区域光学连通。 光源通过一个或多个透光窗中的一个将光束引导到样品区域中。 光束通过样品区域并通过一个或多个透光窗口之一离开样品区域。 主检测器响应离开样品区域的光束。 该系统允许原位测量室流出物中的分子气体杂质，特别是在来自半导体处理室的流出物中。 在半导体制造过程控制和危险气体泄漏检测中发现了特殊的适用性。

    Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
    2.
    发明授权
    Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use 失效
    室内污水监测系统和半导体处理系统，包括吸收光谱测量系统和使用方法

    公开(公告)号：US06885452B2

    公开(公告)日：2005-04-26

    申请号：US10287512

    申请日：2002-11-05

    申请人： James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

    发明人： James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik, Jr.

    IPC分类号： C23C16/44 ,  G01J3/433 ,  G01N21/03 ,  G01N21/35 ,  G01N21/39 ,  H01L21/02 ,  G01N21/00 ,  G01R31/00 ,  G01R31/26

    CPC分类号： G01N21/031 ,  C23C16/4412 ,  G01J3/433 ,  G01N21/3504 ,  G01N21/3554 ,  G01N21/39

    摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

    摘要翻译： 提供了一种新型室流出物监测系统。 该系统包括具有连接到其上的排气管的室。 排气管线包括样品区域，其中基本上所有的室排出物也通过样品区域。 该系统还包括用于检测气相分子种类的吸收光谱测量系统。 测量系统包括通过一个或多个透光窗与样品区域光通信的光源和主检测器。 光源通过一个或多个透光窗中的一个将光束引导到样品区域中。 光束通过样品区域并通过一个或多个透光窗口之一离开样品区域。 主检测器响应离开样品区域的光束。 该系统允许原位测量室流出物中的分子气体杂质，特别是在来自半导体处理室的流出物中。 在半导体制造过程控制和危险气体泄漏检测中发现了特殊的适用性。

    Purification and recovery of fluids in processing applications
    5.
    发明申请
    Purification and recovery of fluids in processing applications 审中-公开
    加工应用中液体的净化和回收

    公开(公告)号：US20050006310A1

    公开(公告)日：2005-01-13

    申请号：US10860599

    申请日：2004-06-04

    申请人： Rajat Agrawal ,  James McAndrew ,  Ikuo Hirase ,  Sylvie Lazure ,  Maurice Rignon ,  Hwa-Chi Wang ,  Nigel Betterton ,  Joseph Paganessi

    发明人： Rajat Agrawal ,  James McAndrew ,  Ikuo Hirase ,  Sylvie Lazure ,  Maurice Rignon ,  Hwa-Chi Wang ,  Nigel Betterton ,  Joseph Paganessi

    IPC分类号： B01J3/00 ,  B08B3/14 ,  B08B7/00 ,  C02F1/00

    CPC分类号： B01J3/008 ,  B08B3/14 ,  B08B7/0021 ,  Y02P20/544

    摘要： A fluid purification and recovery system includes a buffer section configured to receive a fluid delivered from a process station, where the fluid pressure is maintained within the buffer section within a predetermined range and the fluid is maintained within the buffer section in at least one of a gas state, a liquid state and a supercritical state. The system further includes a purification section disposed downstream from the buffer section to receive the fluid from the buffer section, where the purification section includes at least one purification unit that separates at least a portion of at least one component from the fluid. In one embodiment, the fluid is maintained in at least one of a liquid state and a supercritical state in both the buffer section and the purification section. In addition, the buffer section delivers the fluid to the purification with minimal or substantially no fluctuations in pressure.

    摘要翻译： 流体净化和回收系统包括缓冲部分，其构造成接收从处理站传送的流体，其中在预定范围内将流体压力保持在缓冲部分内，并且将流体保持在缓冲部分内的至少一个中 气态，液态和超临界状态。 该系统还包括设置在缓冲部分下游以从缓冲部分接收流体的净化部分，其中净化部分包括至少一个净化单元，该净化单元将至少一部分组分的至少一部分与流体分离。 在一个实施方案中，流体在缓冲部分和净化部分中保持在液体状态和超临界状态中的至少一种状态。 此外，缓冲部分以最小或基本上没有压力波动将流体输送至净化。

    Purification and transfilling of ammonia
    9.
    发明申请
    Purification and transfilling of ammonia 有权
    氨的净化和转运

    公开(公告)号：US20060005704A1

    公开(公告)日：2006-01-12

    申请号：US11009510

    申请日：2004-12-13

    申请人： Derong Zhou ,  John Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

    发明人： Derong Zhou ,  John Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

    IPC分类号： B01D53/02

    CPC分类号： B01D53/261 ,  B01D53/02 ,  C01C1/024 ,  Y10S203/17

    摘要： An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected with a condenser to facilitate removal of impurities from ammonia and condensation of gaseous ammonia to form a purified liquid ammonia product. The system further includes a storage tank to receive purified ammonia, a remote station connected with the storage tank, and a vaporizer connected with the storage tank. The vaporizer is configured to receive and vaporize liquid ammonia from the storage tank and deliver gaseous ammonia back to the storage tank so as to facilitate pumping of the ammonia to the remote station based upon a vapor pressure established within the storage tank.

    摘要翻译： 氨净化系统包括通过吸附从气态氨除去烃的除烃站，通过吸附从气态氨除去水的除湿站，以及包括与冷凝器连接的蒸馏塔以便于从氨除去杂质的蒸馏站 和气态氨的缩合形成纯化的液氨产物。 该系统还包括用于接收净化氨的储罐，与储罐连接的远程站以及与储存罐连接的蒸发器。 蒸发器被配置为从储罐接收和蒸发液氨，并将气态氨返回到储罐，以便于基于在储罐内建立的蒸汽压力将氨泵送到远程站。

    Method and apparatus for the fast detection of surface characteristics
    10.
    发明授权
    Method and apparatus for the fast detection of surface characteristics 失效
    快速检测表面特性的方法和装置

    公开(公告)号：US06392745B1

    公开(公告)日：2002-05-21

    申请号：US09593644

    申请日：2000-06-13

    申请人： Rashid Mavliev ,  Hwa-Chi Wang

    发明人： Rashid Mavliev ,  Hwa-Chi Wang

    IPC分类号： G01N100

    CPC分类号： G01N21/94 ,  G01N15/0205 ,  G01N15/065 ,  G01N21/9501

    摘要： A method and apparatus for quickly detecting the surface characteristics of a surface, such as features, anomalies or contaminants are disclosed. The method and apparatus use heterogeneous condensation of a vapor on a surface and evaporation to reveal the surface characteristics of the surface and thereby enable the detection of such features.

    摘要翻译： 公开了用于快速检测表面的表面特性（例如特征，异常或污染物）的方法和装置。 该方法和装置使用蒸气在表面上的异质凝结和蒸发以揭示表面的表面特性，从而能够检测这些特征。