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1.发明授权
公开(公告)号：US5409159A
公开(公告)日：1995-04-25
申请号：US253248
申请日：1994-06-02
申请人： Robert W. Connors , Frederick W. Giacobbe , Benjamin J. Jurcik, Jr. , Frederic Rotman , Kevin P. McKean
发明人： Robert W. Connors , Frederick W. Giacobbe , Benjamin J. Jurcik, Jr. , Frederic Rotman , Kevin P. McKean
CPC分类号： B23K3/0653 , B23K1/085
摘要： A circuit board is wave soldered as it is carried by a conveyor through a solder wave established in a solder reservoir. Disposed on both sides of the solder wave are gas plenums which discharge shield gas. Each gas plenum includes a top wall, a side wall, and a bottom wall. The side wall is spaced horizontally from the wave, and the bottom wall is submerged within the solder. The side and (optionally) top walls include orifices for directing shield gas (i) at high velocity toward the solder wave to protect the solder wave with an atmosphere of shield gas, and (ii) upwardly toward an underside of the circuit board to strip entrained air therefrom. Instead of being submerged within the solder, the bottom wall could be spaced above the solder and provided with orifices to emit shield gas downwardly between the plenum and solder reservoir to create an inert atmosphere above the solder. Dividers disposed within the plenum form sub-chambers communicating with orifices in respective walls of the plenum so that different gas velocities can be entitled from the orifices. The gas plenums can be rotatably adjustable and further adjustable either vertically or horizontally.
摘要翻译： 电路板通过由焊料储存器中建立的焊波传输通过波导焊接。 在焊波两侧设置放电保护气体的气室。 每个气室包括顶壁，侧壁和底壁。 侧壁与波浪水平隔开，底壁浸没在焊料内。 侧壁和（可选地）顶壁包括用于将屏蔽气体（i）以高速度朝向焊波引导的孔，以保护焊波与保护气体的气氛，以及（ii）向上朝向电路板的下侧以剥离 夹带空气。 代替浸没在焊料中，底壁可以在焊料上方间隔开并且具有孔，以在气室和焊料储存器之间向下发射屏蔽气体，以在焊料上方产生惰性气氛。 设置在增压室内的分隔器形成与气室的相应壁中的孔连通的子室，使得可以从孔中获得不同的气体速度。 气室可以可旋转调节，并可进一步垂直或水平调节。
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2.发明授权Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use 失效室内污水监测系统和半导体处理系统，包括吸收光谱测量系统和使用方法公开(公告)号：US06885452B2
公开(公告)日：2005-04-26
申请号：US10287512
申请日：2002-11-05
IPC分类号： C23C16/44 , G01J3/433 , G01N21/03 , G01N21/35 , G01N21/39 , H01L21/02 , G01N21/00 , G01R31/00 , G01R31/26
CPC分类号： G01N21/031 , C23C16/4412 , G01J3/433 , G01N21/3504 , G01N21/3554 , G01N21/39
摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.
摘要翻译： 提供了一种新型室流出物监测系统。 该系统包括具有连接到其上的排气管的室。 排气管线包括样品区域，其中基本上所有的室排出物也通过样品区域。 该系统还包括用于检测气相分子种类的吸收光谱测量系统。 测量系统包括通过一个或多个透光窗与样品区域光通信的光源和主检测器。 光源通过一个或多个透光窗中的一个将光束引导到样品区域中。 光束通过样品区域并通过一个或多个透光窗口之一离开样品区域。 主检测器响应离开样品区域的光束。 该系统允许原位测量室流出物中的分子气体杂质，特别是在来自半导体处理室的流出物中。 在半导体制造过程控制和危险气体泄漏检测中发现了特殊的适用性。
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公开(公告)号：US5963336A
公开(公告)日：1999-10-05
申请号：US711781
申请日：1996-09-10
IPC分类号： C23C16/44 , G01J3/433 , G01N21/03 , G01N21/35 , G01N21/39 , H01L21/02 , G01N15/06 , G01N21/00
CPC分类号： G01N21/031 , C23C16/4412 , G01J3/433 , G01N21/3504 , G01N21/3554 , G01N21/39
摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.
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公开(公告)号：US07770448B2
公开(公告)日：2010-08-10
申请号：US11458565
申请日：2006-07-19
CPC分类号： G01G23/3728 , G01G17/04
摘要： A chemical storage device and a method for monitoring chemical usage are described herein. The device and disclosed method utilize a chemical storage canister and a load cell integrated into one transportable unit. The load cell is capable of compensating for the added weight of attached dispensing devices used in the semiconductor industry. Additionally, the load cell continuously displays the weight of the chemicals as they are withdrawn from the chemical storage device. These functionalities are included in the control logic of the load cell which is incorporated into the load cell itself.
摘要翻译： 本文描述了一种用于监测化学品用途的化学储存装置和方法。 该装置和公开的方法利用集成到一个可运输单元中的化学储存罐和负载单元。 称重传感器能够补偿在半导体工业中使用的附加分配装置的附加重量。 此外，当从化学品存储装置中取出化学品时，称重传感器连续地显示化学品的重量。 这些功能包括在负载传感器本身中的负载传感器的控制逻辑中。
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公开(公告)号：US6154284A
公开(公告)日：2000-11-28
申请号：US280989
申请日：1999-03-30
IPC分类号： C23C16/44 , G01J3/433 , G01N21/03 , G01N21/35 , G01N21/39 , H01L21/02 , G01N21/00 , G01R31/00 , G01R31/26
CPC分类号： G01N21/031 , C23C16/4412 , G01J3/433 , G01N21/3504 , G01N21/3554 , G01N21/39
摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.
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6.发明授权Oxidizing oxygen-fuel burner firing for reducing NOx emissions from high temperature furnaces 失效氧化燃料燃烧器燃烧器，用于降低高温炉的NOx排放
公开(公告)号：US5954498A
公开(公告)日：1999-09-21
申请号：US31977
申请日：1998-02-26
CPC分类号： F23D14/32 , C03B5/2353 , F23C5/08 , F23D14/24 , F23M5/025 , Y02E20/344 , Y02P40/55 , Y02P40/57
摘要： Burner firing method and device are presented where an oxidizing oxygen-fuel burner is fired at an angle to the reducing air-fuel burner flame to reduce overall NOx emissions from high temperature furnaces. The oxidizing oxy-fuel burner stoichiometric equivalence ratio (oxygen/fuel) is maintained in the range of about 1.5 to about 12.5. The reducing air-fuel burner is fired at an equivalence ratio of 0.6 to 1.00 to reduce the availability of oxygen in the flame and reducing NOx emissions. The oxidizing flame from the oxy-fuel burner is oriented such that the oxidizing flame gas stream intersects the reducing air-fuel flame gas stream at or near the tail section of the air-fuel flame. The inventive methods improve furnace temperature control and thermal efficiency by eliminating some nitrogen and provide an effective burnout of CO and other hydrocarbons using the higher mixing ability of the oxidizing flame combustion products. The simultaneous air-fuel and oxy-fuel burner firing can reduce NOx emissions anywhere from 30% to 70% depending on the air-fuel burner stoichiometric ratio.
摘要翻译： 提出了一种燃烧器烧制方法和装置，其中氧化氧 - 燃料燃烧器与还原空气 - 燃料燃烧器火焰以一定角度被发射以减少来自高温炉的总体NOx排放。 氧化氧 - 燃料燃烧器的化学计量当量比（氧/燃料）保持在约1.5至约12.5的范围内。 还原空气燃料燃烧器以0.6至1.00的当量比燃烧，以减少火焰中的氧气的可用性并减少NOx排放。 来自氧燃料燃烧器的氧化火焰被定向成使得氧化火焰气流与在空气燃料火焰的尾部处或其附近的还原空气燃料火焰气流相交。 本发明的方法通过消除一些氮气来提高炉温控制和热效率，并且使用氧化火焰燃烧产物的较高混合能力来提供CO和其它烃的有效燃尽。 同时的空燃料和氧燃料燃烧器的燃烧可以根据空气 - 燃料燃烧器的化学计量比将NOx排放量减少30％至70％。
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7.发明授权公开(公告)号：US08758867B2
公开(公告)日：2014-06-24
申请号：US12212500
申请日：2008-09-17
IPC分类号： C23C16/513
CPC分类号： C23C16/45553 , C07F7/0803 , C23C16/18
摘要： Methods and compositions for depositing metal films are described herein. In general, the disclosed methods utilize precursor compounds comprising gold, silver or copper. More specifically, the disclosed precursor compounds utilize neutral ligands derived from ethylene or acetylene.
摘要翻译： 本文描述了用于沉积金属膜的方法和组合物。 通常，所公开的方法利用包含金，银或铜的前体化合物。 更具体地，所公开的前体化合物利用衍生自乙烯或乙炔的中性配体。
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8.发明授权Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use 失效室内污水监测系统和半导体处理系统，包括吸收光谱测量系统和使用方法公开(公告)号：US06493086B1
公开(公告)日：2002-12-10
申请号：US09722610
申请日：2000-11-28
IPC分类号： G01N2100
CPC分类号： G01N21/031 , C23C16/4412 , G01J3/433 , G01N21/3504 , G01N21/3554 , G01N21/39
摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.
摘要翻译： 提供了一种新型室流出物监测系统。 该系统包括具有连接到其上的排气管的室。 排气管线包括样品区域，其中基本上所有的室排出物也通过样品区域。 该系统还包括用于检测气相分子种类的吸收光谱测量系统。 测量系统包括光源和主检测器，其通过一个或多个光透射窗与样品区域光学连通。 光源通过一个或多个透光窗中的一个将光束引导到样品区域中。 光束通过样品区域并通过一个或多个透光窗口之一离开样品区域。 主检测器响应离开样品区域的光束。 该系统允许原位测量室流出物中的分子气体杂质，特别是在来自半导体处理室的流出物中。 在半导体制造过程控制和危险气体泄漏检测中发现了特殊的适用性。
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9.发明授权Oxidizing oxygen-fuel burner firing for reducing NOx emissions from high temperature furnaces 失效氧化燃料燃烧器燃烧器，用于降低高温炉的NOx排放公开(公告)号：US06171100B2
公开(公告)日：2001-01-09
申请号：US09400699
申请日：1999-09-20
IPC分类号： F23M900
CPC分类号： F23D14/32 , C03B5/2353 , F23C5/08 , F23D14/24 , F23M5/025 , Y02E20/344 , Y02P40/55 , Y02P40/57
摘要： Burner firing method and device are presented where an oxidizing oxygen-fuel burner is fired at an angle to the reducing air-fuel burner flame to reduce overall NOx emissions from high temperature furnaces. The oxidizing oxy-fuel burner stoichiometric equivalence ratio (oxygen/fuel) is maintained in the range of about 1.5 to about 12.5. The reducing air-fuel burner is fired at an equivalence ratio of 0.6 to 1.00 to reduce the availability of oxygen in the flame and reducing NOx emissions. The oxidizing flame from the oxy-fuel burner is oriented such that the oxidizing flame gas stream intersects the reducing air-fuel flame gas stream at or near the tail section of the air-fuel flame. The inventive methods improve furnace temperature control and thermal efficiency by eliminating some nitrogen and provide an effective burnout of CO and other hydrocarbons using the higher mixing ability of the oxidizing flame combustion products. The simultaneous air-fuel and oxy-fuel burner firing can reduce NOx emissions anywhere from 30% to 70% depending on the air-fuel burner stoichiometric ratio.
摘要翻译： 提出了一种燃烧器烧制方法和装置，其中氧化氧 - 燃料燃烧器与还原空气 - 燃料燃烧器火焰以一定角度被发射以减少来自高温炉的总体NOx排放。 氧化氧 - 燃料燃烧器的化学计量当量比（氧/燃料）保持在约1.5至约12.5的范围内。 还原空气燃料燃烧器以0.6至1.00的当量比燃烧，以减少火焰中的氧气的可用性并减少NOx排放。 来自氧燃料燃烧器的氧化火焰被定向成使得氧化火焰气流与在空气燃料火焰的尾部处或其附近的还原空气燃料火焰气流相交。 本发明的方法通过消除一些氮气来提高炉温控制和热效率，并且使用氧化火焰燃烧产物的较高混合能力来提供CO和其它烃的有效燃尽。 同时的空燃料和氧燃料燃烧器的燃烧可以根据空气 - 燃料燃烧器的化学计量比将NOx排放量减少30％至70％。
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