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公开(公告)号：US07481544B2
公开(公告)日：2009-01-27
申请号：US11066606
申请日：2005-02-25
IPC分类号： G02B5/10
CPC分类号： G02B17/008 , G02B17/0631 , G02B17/0652 , G02B19/0019 , G02B19/0047 , G02B19/0095 , G03F7/70166 , G21K1/067
摘要： Optical relays having three or more reflector portions to allow efficient grazing angle reflections with a relatively high acceptance of light are described. Light collected by the relay can be delivered to a selected location for various applications, including semiconductor lithography. In some embodiments, the grazing angles are selected to utilize the high reflectivity of extreme ultraviolet light at low grazing angles. The three or more reflectors can be arranged with respect to a light source to provide such grazing angle reflections and high acceptance. Some collectors can have more than one shell to increase the acceptance. In some embodiments, some of the reflectors can be configured to shape the delivered light.
摘要翻译： 描述了具有三个或更多个反射器部分以允许具有相对较高的光接收的有效的掠角反射的光学继电器。 由继电器收集的光可以被传送到用于各种应用的选定位置，包括半导体光刻。 在一些实施例中，选择掠射角以在低掠射角度下利用极端紫外线的高反射率。 可以相对于光源布置三个或更多个反射器，以提供这种掠角反射和高接受度。 一些收藏家可以有多个外壳来增加验收。 在一些实施例中，一些反射器可被配置成对所传送的光进行成形。
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2.发明授权公开(公告)号：US07075720B2
公开(公告)日：2006-07-11
申请号：US10331159
申请日：2002-12-26
CPC分类号： G02B17/0892 , G02B17/08 , Y10S359/90
摘要： An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
摘要翻译： 光学系统包括多个立方晶体光学元件和一个或多个单轴双折射元件，其中立方晶体光学元件的晶格相对于彼此定向，以减少固有双折射的影响并产生具有减小的延迟的系统。 通过消除来自多个立方晶体光学元件和单轴双折射元件的延迟贡献来减小系统的净延迟。 光学系统可以用于光刻工具中以图案化诸如半导体衬底的衬底，从而制造半导体器件。
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3.发明授权Structures and methods for reducing polarization aberration in integrated circuit fabrication systems 有权用于减少集成电路制造系统中的偏振像差的结构和方法公开(公告)号：US06958864B2
公开(公告)日：2005-10-25
申请号：US10331103
申请日：2002-12-26
IPC分类号： G02B5/18 , G02B20060101 , G02B3/00 , G02B5/30 , G02B9/00 , G02B13/14 , G02B13/18 , G02B13/24 , G02B17/08 , G02B27/28 , G03F7/20 , H01L21/027
CPC分类号： G02B17/0892 , G02B17/08 , Y10S359/90
摘要： An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
摘要翻译： 光学系统包括多个立方晶体光学元件和一个或多个单轴双折射元件，其中立方晶体光学元件的晶格相对于彼此定向，以减少固有双折射的影响并产生具有减小的延迟的系统。 通过消除来自多个立方晶体光学元件和单轴双折射元件的延迟贡献来减小系统的净延迟。 光学系统可以用于光刻工具中以图案化诸如半导体衬底的衬底，从而制造半导体器件。
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公开(公告)号：US07203421B2
公开(公告)日：2007-04-10
申请号：US10262675
申请日：2002-09-30
IPC分类号： H04J14/00
CPC分类号： G02B6/2931 , G02B6/2706 , G02B6/2793 , G02B6/29313 , G02B6/29383 , G02B6/29395 , G02B6/3512 , G02B6/3548 , G02B6/356
摘要： A multi-channel optical switching system particularly usable as a programmable optical add/drop multiplexer in a multi-wavelength communication system. The switching system uses a grating operating at Littrow that separates a multi-channel optical signal into a plurality of optical channels, and combines a plurality of optical channels into a multi-channel optical signal. The system also uses a plurality of optical ports optically coupled to the grating and a selecting device to select which optical channel is directed to which of the optical ports.
摘要翻译： 一种多通道光交换系统，特别可用作多波长通信系统中的可编程光分插复用器。 开关系统使用在Littrow操作的光栅，其将多通道光信号分离成多个光通道，并将多个光通道组合成多通道光信号。 该系统还使用光学耦合到光栅的多个光学端口和选择装置来选择哪个光信道被引导到哪个光学端口。
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公开(公告)号：US07072102B2
公开(公告)日：2006-07-04
申请号：US10331101
申请日：2002-12-26
CPC分类号： G02B17/0892 , G02B17/08 , Y10S359/90
摘要： An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
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6.发明授权Structures and methods for reducing aberration in integrated circuit fabrication systems 有权用于减少集成电路制造系统中的像差的结构和方法公开(公告)号：US06970232B2
公开(公告)日：2005-11-29
申请号：US10178621
申请日：2002-06-20
CPC分类号： G02B1/08 , G02B5/3083 , G02B27/28 , G03F7/70075 , G03F7/70216 , G03F7/70966
摘要： An optical system includes multiple cubic crystalline optical elements and one or more polarization rotators in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements. In one embodiment, all cubic crystalline optical elements are oriented with identical three dimensional cubic crystalline lattice directions, a 90° polarization rotator divides the system into front and rear groups such that the net retardance of the front group is balanced by the net retardance of the rear group. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
摘要翻译： 光学系统包括多个立方晶体光学元件和一个或多个偏振旋转器，其中立方晶体光学元件的晶格相对于彼此定向以减少固有双折射的影响并产生具有减小的延迟的系统。 光学系统可以是具有高数值孔径的折射或反射折射系统，并且使用具有或低于248纳米的波长的光。 系统的净延迟小于各个光学元件的延迟贡献之和。 在一个实施例中，所有立方晶体光学元件被取向为具有相同的三维立方晶格方向，90°偏振旋转器将系统分成前组和后组，使得前组的净延迟由 后组。 光学系统可以用于光刻工具中以图案化诸如半导体衬底的衬底，从而制造半导体器件。
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公开(公告)号：US06573978B1
公开(公告)日：2003-06-03
申请号：US09236888
申请日：1999-01-26
IPC分类号： G03B2772
CPC分类号： G03F7/70075 , G03F7/70108 , G03F7/702 , G03F7/70233 , Y10T428/3154
摘要： An illumination system and condenser for use in photolithography in the extreme ultraviolet wavelength region having a first non-imaging optic element collecting electromagnetic radiation from a source and creating a desired irradiance distribution and a second non-imaging optic element receiving the electromagnetic radiation from the first non-imaging optic element and redirecting and imaging the electromagnetic radiation. The electromagnetic radiation emanating from the second non-imaging optic element is suitable for being received by other conventional optical surfaces to provide a desired irradiance distribution with a desired angular distribution and desired shape. Facets are used to provide the desired illumination over the desired illumination field. Reflective facets may be placed on the second non-imaging optic, which can reduce the number of mirrors and increase efficiency. The illumination system may be used in combination with a projection optic to project the image of a reticle or mask onto a photosensitive substrate, such as a semiconductor wafer.
摘要翻译： 一种用于在极紫外波长区域的光刻中的照明系统和聚光器，其具有从源收集电磁辐射并产生所需辐照度分布的第一非成像光学元件，以及从第一部分接收电磁辐射的第二非成像光学元件 非成像光学元件，并重定向和成像电磁辐射。 从第二非成像光学元件发出的电磁辐射适合于由其它常规光学表面接收以提供具有所需角度分布和期望形状的所需辐照度分布。 方面用于在期望的照明场上提供期望的照明。 反射面可以放置在第二非成像光学元件上，这可以减少反射镜的数量并提高效率。 照明系统可以与投影光学元件组合使用，以将掩模版或掩模的图像投射到诸如半导体晶片的感光基板上。
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公开(公告)号：US07777955B2
公开(公告)日：2010-08-17
申请号：US11442673
申请日：2006-05-26
CPC分类号： G02B6/0038 , G02B6/0008 , G02B6/0018 , G02B6/0068 , G02B6/0096 , G02B6/4298 , G02B27/0994
摘要： Various embodiments described herein comprise mixers comprising a light pipe having input and output ends and a central region therebetween. An optical path extends in a longitudinal direction from the input end through the central region to the output end. The central region of the light pipe comprises one or more rippled reflective sidewalls having a plurality of elongate ridges and valleys and sloping surfaces therebetween. Light from the input end propagating along the optical path reflects from the sloping surfaces and is redirected at a different azimuthal direction toward the output end thereby mixing the light at the output end. Illuminance and/or color mixing can therefore be provided.
摘要翻译： 本文描述的各种实施例包括具有输入和输出端的光管和其间的中心区域的混合器。 光路沿着纵向方向从输入端穿过中心区延伸到输出端。 光管的中心区域包括一个或多个波纹反射侧壁，其具有多个细长的脊和谷以及它们之间的倾斜表面。 沿着光路传播的输入端的光从倾斜表面反射，并以不同的方位角方向朝向输出端重定向，从而将输出端的光混合。 因此可以提供照度和/或混色。
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9.发明授权公开(公告)号：US07542209B2
公开(公告)日：2009-06-02
申请号：US11218325
申请日：2005-09-01
IPC分类号： G02B27/14
CPC分类号： G02B27/0081 , G02B5/30 , G02B13/22 , G02B27/0172 , G02B27/1026 , G02B27/1033 , G02B27/14 , G02B27/143 , G02B27/144 , G02B27/145 , G02B27/283 , G02B2027/011 , G02B2027/0123
摘要： One embodiment of the invention comprises a simplified light-weight head mounted displays comprising an off-axis combiner and imaging optics defining an optical path. The imaging optics comprises a lens group comprising a plurality of lenses in the optical path. The lens group has a first optical axis. Each of said plurality of lenses have optical axes collinear with the first optical axis. The imaging optics further comprises a single lens element in the optical path having a second optical axis that is different from the first optical axis. The single lens element has positive optical power and is the only lens element in the optical path between the lens group and the combiner that has an optical axis collinear with the second optical axis.
摘要翻译： 本发明的一个实施例包括简化的轻量级头戴式显示器，其包括离轴组合器和限定光路的成像光学元件。 成像光学器件包括在光路中包括多个透镜的透镜组。 透镜组具有第一光轴。 所述多个透镜中的每一个具有与第一光轴共线的光轴。 成像光学元件还包括在光路中具有不同于第一光轴的第二光轴的单个透镜元件。 单透镜元件具有正光焦度，并且是具有与第二光轴共线的光轴的透镜组和组合器之间的光路中的唯一透镜元件。
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公开(公告)号：US07360899B2
公开(公告)日：2008-04-22
申请号：US10852728
申请日：2004-05-24
CPC分类号： G03B21/14 , G02B5/02 , G02B5/30 , G02B5/3058 , G02B6/00 , G02B27/0101 , G02B27/0172 , G02B27/283 , G02B2027/0118 , G03B21/2073 , G03B21/208 , G03B33/12 , H04N9/315
摘要： Various embodiments involving structures and methods for illumination can be employed, for example, in projectors, head-mounted displays, helmet-mounted displays, back projection TVs, flat panel displays as well as other optical systems. Certain embodiments may include prism elements for illuminating, for example, a spatial light modulator. Light may be coupled to the prism in some cases using fiber optics or lightpipes. The optical system may also include a diffuser having scatter features arranged to scatter light appropriately to produce a desired luminance profile. Other embodiments are possible as well.
摘要翻译： 涉及用于照明的结构和方法的各种实施例可以用于例如投影仪，头戴显示器，头戴式显示器，背投电视，平板显示器以及其它光学系统中。 某些实施例可以包括用于照亮例如空间光调制器的棱镜元件。 在某些情况下，光可以使用光纤或光管耦合到棱镜。 光学系统还可以包括散射器，散射特征被布置为适当散射光以产生期望的亮度分布。 其他实施例也是可能的。
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