Method for measurement of weight during a CVI/CVD process
    2.
    发明授权
    Method for measurement of weight during a CVI/CVD process 有权
    在CVI / CVD过程中测量重量的方法

    公开(公告)号:US07476419B2

    公开(公告)日:2009-01-13

    申请号:US11698227

    申请日:2007-01-25

    IPC分类号: C23C16/26 G01G19/00

    摘要: A method of chemical vapor infiltration and deposition includes stacking a number of porous structures in a stack in a furnace. The stack has a center opening region extending through the porous structures and an outer region extending along the porous structures. A first portion of a reactant gas is introduced to the center opening region. A second portion of the reactant gas is introduced to the outer region. The first portion and the second portion are controlled proportions thereby introducing predetermined portions of the reactant gas to both the center opening region and the outer region. The change in weight of the entire furnace, including contents, is measured during the chemical vapor infiltration and deposition process. The rate of weight change is monitored.

    摘要翻译: 化学气相渗透和沉积的方法包括在炉中堆叠多个多孔结构体。 堆叠具有延伸穿过多孔结构的中心开口区域和沿着多孔结构延伸的外部区域。 将反应气体的第一部分引入中心开口区域。 反应气体的第二部分被引入外部区域。 第一部分和第二部分是受控比例,从而将反应气体的预定部分引入中心开口区域和外部区域。 在化学气相渗透和沉积过程中测量整个炉的重量变化(包括含量)。 监测体重变化率。

    Positioning device for RAM testing system
    3.
    发明授权
    Positioning device for RAM testing system 失效
    RAM测试系统定位装置

    公开(公告)号:US06937352B1

    公开(公告)日:2005-08-30

    申请号:US10959682

    申请日:2004-10-06

    摘要: The invention is a device for positioning a hand-held RAM inspection system for measuring the thickness of a RAM coating. In detail, the invention includes a housing containing the RAM coating inspection system, the housing having a longitudinal axis. Three laser distance-measuring devices are circularly mounted on the housing at 120 degrees from each other; the laser distance measuring devices are for determining the required distance and orientation of the RAM inspection system from the RAM coating surface. An electrical controller circuit is coupled to the three lasers and the RAM inspection system for triggering the RAM inspection system to measure the RAM material when the three lasers indicate that the housing is at the proper distance and orientation to the RAM coating surface.

    摘要翻译: 本发明是用于定位用于测量RAM涂层的厚度的手持式RAM检查系统的装置。 详细地,本发明包括一个包含RAM涂层检查系统的壳体,该壳体具有纵向轴线。 三个激光测距装置以120度相对于壳体圆周地安装; 激光距离测量装置用于从RAM涂覆表面确定RAM检查系统所需的距离和取向。 电气控制器电路耦合到三个激光器和RAM检查系统,用于触发RAM检查系统以在三个激光器指示壳体处于与RAM涂层表面相适应的距离和取向时测量RAM材料。