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公开(公告)号：USD452552S1
公开(公告)日：2001-12-25
申请号：US29136257
申请日：2001-01-26
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公开(公告)号：US06089282A
公开(公告)日：2000-07-18
申请号：US74989
申请日：1998-05-08
CPC分类号： B01D53/00 , C01B23/001 , H01J9/52 , B01D2256/18 , Y02W30/828 , Y10T137/469
摘要： A gas recovery and reuse/recycle method is disclosed which can readily and economically recover valuable and/or environmentally hazardous gases from a manufacturing or chemical process and then return the gas to the process for reuse, and repeat this many times without significant contamination or degradation of the gas or the produced products. All gas transport, compression and storage equipment is designed and maintained so that it is non-contaminating to the process gas. Commonly the process gas will be a Group VIII gas, preferably He, Ne, Kr or Xe, or a gas which comprises a hazard to the ambient environment or beings therein, such as a carbon oxide gas, a halocarbon gas, an acid-precursor gas, a biologically hazardous gas, or a radioactive gas.
摘要翻译： 公开了一种气体回收和再利用/再循环方法，其可以容易地和经济地从制造或化学过程中回收有价值和/或对环境有害的气体，然后将气体返回到再利用过程中，并重复此次多次而没有显着的污染或降解 的气体或生产的产品。 所有气体输送，压缩和储存设备的设计和维护，使其对工艺气体无污染。 通常，工艺气体将是VIII族气体，优选He，Ne，Kr或Xe，或包含对周围环境或其中的物质的危害的气体，例如碳氧化物气体，卤代烃气体，酸前体 气体，生物危害气体或放射性气体。
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3.发明授权Self-regenerative process for contaminant removal from liquid and supercritical CO2 fluid streams 有权从液体和超临界CO2流体流中去除污染物的自我再生过程公开(公告)号：US06361696B1
公开(公告)日：2002-03-26
申请号：US09487637
申请日：2000-01-19
IPC分类号： B01D1504
CPC分类号： B01D15/00 , B01J20/18 , B01J20/186
摘要： A method for the decontamination of fluid (liquid or supercritical) carbon dioxide fluid, especially of hydrocarbon contaminants, down to ≦100 ppb concentration are described. The critical component is a high silica zeolite, preferably a high silica Y-type zeolite, ZSM-5 or a high silica mordenite, which in a variety of physical forms is capable of decontaminating such fluid CO2 to ≦100 ppb, ≦10-50 ppb, or ˜1 ppb, without being detrimentally affected by the supercritical operating environment. The high silica zeolite may be produced by the removal of alumina from a natural or synthetic zeolite while retaining the desirable zeolite structure, to a silica:alumina ratio of from 20-2000:1. Preferably the zeolite is disposed in separate quantities in at least two vessels, which operate alternately. A portion of the purified product from the operating vessel is directed to the other vessel and there used to remove accumulated contaminants from that vessel's zeolite. The process thus provides self-regeneration, in that regeneration of one vessel occurs while the other vessel decontaminates contaminated fluid carbon dioxide, so that use of the two can be alternated for substantially continual production of purified fluid carbon dioxide. The invention provides purified fluid carbon dioxide used in manufacture of such products as high purity electronic, optical, prosthetic or similar products or polymers or pharmaceuticals or in beverages.
摘要翻译： 描述了低于<100ppb浓度的流体（液体或超临界）二氧化碳流体，特别是烃污染物的去污的方法。 关键组分是高二氧化硅沸石，优选高二氧化硅Y型沸石，ZSM-5或高二氧化硅丝光沸石，其以多种物理形式能够将这种流体CO 2净化至<= 100ppb，<= 10 -50 ppb或〜1 ppb，不受超临界操作环境的不利影响。 高二氧化硅沸石可以通过从天然或合成沸石中除去氧化铝，同时保留所需的沸石结构，二氧化硅：氧化铝比为20-2000:1来制备。 优选地，沸石以分开的量设置在至少两个容器中，其交替操作。 来自操作容器的纯化产物的一部分被引导到另一个容器，并且用于从该容器的沸石中除去积聚的污染物。 因此，该方法提供自我再生，因为一个容器的再生发生，而另一个容器对污染的二氧化碳进行净化，因此可以交替使用两个容器，以便基本上连续地生产纯化的流体二氧化碳。 本发明提供用于制造高纯度电子，光学，假体或类似产品或聚合物或药物或饮料的产品的纯化流体二氧化碳。
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公开(公告)号：US06408849B1
公开(公告)日：2002-06-25
申请号：US09336060
申请日：1999-06-18
IPC分类号： A62B2302
CPC分类号： B01D53/04 , B01D53/261 , B01D2256/18 , B01D2256/26 , B01D2257/102 , B01D2257/104 , B01D2257/504 , B01D2257/80 , B01D2259/40083 , B01D2259/4533 , C01B23/0094 , C01B2210/0014 , C01B2210/0023 , C01B2210/0026 , C01B2210/0045 , C01B2210/0046 , C01B2210/0051 , C01B2210/0062 , G01R33/281 , Y02C10/08 , Y02P20/152 , Y02P30/30
摘要： A method is disclosed for providing a pure gas for use medical procedures in which the gas is contaminated with other gases during the procedure, and then separating the contaminants and recovering and reusing the decontaminated gas. The method is most advantageously used in medical imaging processes, such as magnetic resonance image (MRI), where hyperpolarized image enhancing noble gases, notably He3 or Xe129, are used for image enhancement in brain and lung imaging, and in which the contaminants are normally the exhalant gases from the imaged patient. The contaminated gas is passed through a series of drying and purification steps to remove the exhalant gases and separate the gas. The purified gas is then recovered and stored for reuse. This system prevents the loss of significant amounts of the image enhancing gases, which is important since key gases such as He3 and Xe129 are rare and expensive, and (especially He3) permanently lost once vented. Recovery of medical process gases such as those including isotopes of carbon, fluorine or phosphorus is also contemplated. High quality MR images of lung structures and processes and of brain functions can be obtained using the purified gases from this process.
摘要翻译： 公开了一种用于提供用于医疗程序的纯气体的方法，其中气体在该过程期间被其它气体污染，然后分离污染物并回收和再利用去污气体。 该方法最有利地用于医学成像过程，例如磁共振图像（MRI），其中超极化图像增强惰性气体，特别是He3或Xe129用于脑和肺成像中的图像增强，并且其中污染物通常 来自成像患者的呼出气体。 污染的气体通过一系列干燥和净化步骤以除去呼出气体并分离气体。 然后将净化的气体回收并储存以便重新使用。 该系统防止大量图像增强气体的损失，这是重要的，因为诸如He3和Xe129的关键气体是罕见且昂贵的，并且（特别是He3）一旦排空就永久地丢失。 还考虑回收诸如包括碳，氟或磷的同位素的医疗处理气体。 使用来自该过程的净化气体可以获得肺结构和过程以及脑功能的高质量MR图像。
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公开(公告)号：US06350300B1
公开(公告)日：2002-02-26
申请号：US09771335
申请日：2001-01-26
IPC分类号： B01D5304
CPC分类号： B01D53/0415 , B01D2253/1124 , B01D2257/93 , B01D2258/0216
摘要： A gas purification apparatus has a housing with an inlet end having an inlet port for gas supply to an interior chamber, and an opposite, outlet end having an outlet port for exit of purified gas from the chamber. The housing is of generally cylindrical shape with a central axis, and the inlet and outlet ports are offset from the central axis towards a lower portion of the housing. A purification medium fills at least the majority of the chamber. The internal wall of the chamber is cylindrical along part of the length of the housing extending from the outlet end, and has a rounded or part-spherical inlet portion extending from the inlet port to the cylindrical part of the internal wall.
摘要翻译： 气体净化装置具有壳体，该壳体的入口端具有用于向内部腔室供气的入口端口，相对的出口端部具有用于从腔室排出净化气体的出口。 壳体具有中心轴线的大致圆柱形形状，并且入口和出口端口从中心轴线向壳体的下部偏移。 净化介质填充至少大部分室。 室的内壁是沿着从出口端延伸的壳体的长度的一部分是圆柱形的，并且具有从入口端口延伸到内壁的圆柱形部分的圆形或部分球形入口部分。
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公开(公告)号：US08518150B2
公开(公告)日：2013-08-27
申请号：US13596922
申请日：2012-08-28
CPC分类号： B01D71/32 , B01D53/22 , B01D63/06 , B01D69/141 , B01D2258/0216 , B01D2313/18 , B01D2313/22 , Y02C20/30
摘要： Methods for the purification of steam, systems for purifying steam, methods for measuring and/or controlling steam flow rates, and uses for purified steam are provide. Also provided are substantially gas-impermeable membranes, such as perfluorinated ionomers (e.g., perfluoroethylene-sulfonic-acid/tetrafluoroethylene membranes), having a high ratio of water vapor permeation relative to gas permeation through the membrane. Also provided are methods of operation of such membranes at relatively high operating temperatures for the purification of steam and for operation of such membranes at relatively low temperature and sub-atmospheric pressures for the purification of steam. In a preferred embodiment, the system 400 for purifying steam comprises heater 404 for creating a source of a steam feed, and a purification device 416 for housing a substantially gas-impermeable membrane 424. In the operation of system 400, water, such as deionized water, is added to vessel 402 to provide a source of the steam feed.
摘要翻译： 提供蒸汽净化方法，蒸汽净化系统，测量和/或控制蒸汽流量的方法以及净化蒸汽的用途。 还提供了基本上不透气的膜，例如全氟化离聚物（例如，全氟乙烯 - 磺酸/四氟乙烯膜），其具有相对于通过膜的气体渗透的高水蒸气渗透比。 还提供了在相对高的操作温度下操作这种膜的方法，用于纯化蒸汽和在相对较低的温度和低于大气压的压力下操作这些膜以净化蒸汽。 在优选实施例中，用于净化蒸汽的系统400包括用于产生蒸汽进料源的加热器404和用于容纳基本不透气的膜424的净化装置416.在系统400的操作中，例如去离子水 水添加到容器402中以提供蒸汽进料源。
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公开(公告)号：US20110233069A1
公开(公告)日：2011-09-29
申请号：US13071346
申请日：2011-03-24
CPC分类号： C25B9/00 , C25B1/04 , C25B9/08 , C25B15/08 , Y02E60/366
摘要： An apparatus, a system and a method for electrochemical generation of hydrogen are disclosed. The apparatus may include a cathode, a polymer electrolyte membrane surrounding the cathode and a housing surrounding the polymer electrolyte membrane. The housing may include an anode electrically connected to the cathode. The system for electrochemical generation of hydrogen may include a water purifier in fluid communication with a hydrogen generating unit, an electrolyte source in fluid communication with the hydrogen generation unit and a power source electrically connected to the hydrogen generating unit. The method may include passing water and electrolyte into the hydrogen generation unit and applying a voltage between the anode and the cathode to generate hydrogen gas.
摘要翻译： 公开了用于电化学生成氢的装置，系统和方法。 该装置可以包括阴极，围绕阴极的聚合物电解质膜和围绕聚合物电解质膜的壳体。 壳体可以包括电连接到阴极的阳极。 用于电化学生成氢气的系统可以包括与氢气发生单元流体连通的净水器，与氢气发生单元流体连通的电解质源和与氢产生单元电连接的电源。 该方法可以包括使水和电解质进入氢气产生单元并且在阳极和阴极之间施加电压以产生氢气。
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公开(公告)号：US20090145847A1
公开(公告)日：2009-06-11
申请号：US12066254
申请日：2006-09-12
CPC分类号： B01D71/32 , B01D53/22 , B01D63/06 , B01D69/141 , B01D2258/0216 , B01D2313/18 , B01D2313/22 , Y02C20/30
摘要： Methods for the purification of steam, systems for purifying steam, methods for measuring and/or controlling steam flow rates, and uses for purified steam are provide. Also provided are substantially gas-impermeable membranes, such as perfluorinated ionomers (e.g., perfluoroethylene-sulfonic-acid/tetrafluoroethylene membranes), having a high ratio of water vapor permeation relative to gas permeation through the membrane. Also provided are methods of operation of such membranes at relatively high operating temperatures for the purification of steam and for operation of such membranes at relatively low temperature and sub-atmospheric pressures for the purification of steam. In a preferred embodiment, the system 400 for purifying steam comprises heater 404 for creating a source of a steam feed, and a purification device 416 for housing a substantially gas-impermeable membrane 424. In the operation of system 400, water, such as deionized water, is added to vessel 402 to provide a source of the steam feed.
摘要翻译： 提供蒸汽净化方法，蒸汽净化系统，测量和/或控制蒸汽流量的方法以及净化蒸汽的用途。 还提供了基本上不透气的膜，例如全氟化离聚物（例如，全氟乙烯 - 磺酸/四氟乙烯膜），其具有相对于通过膜的气体渗透的高水蒸气渗透比。 还提供了在相对高的操作温度下操作这种膜的方法，用于纯化蒸汽和在相对较低的温度和低于大气压的压力下操作这些膜以净化蒸汽。 在优选实施例中，用于净化蒸汽的系统400包括用于产生蒸汽进料源的加热器404和用于容纳基本不透气的膜424的净化装置416.在系统400的操作中，例如去离子水 水添加到容器402中以提供蒸汽进料源。
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9.发明授权Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system 有权平版印刷设备，气体吹扫方法和装置制造方法以及吹扫气体供应系统公开(公告)号：US07384149B2
公开(公告)日：2008-06-10
申请号：US10623180
申请日：2003-07-21
IPC分类号： G03B21/26
CPC分类号： G02B27/0006 , G03F7/70933
摘要： A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configure to pattern the projection beam according to a desired patter. The apparatus has a substrate table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system includes a purge gas mixture generator configured to generate a purge gas mixture which includes at least one purging gas and a moisture. The purge gas mixture generator has a moisturizer configured to add the moisture to the purge gas and a purge gas mixture outlet connected to the purge gas mixture generator configured to supply the purge gas mixture near the surface.
摘要翻译： 光刻投影设备包括被配置为支撑图案形成装置的支撑件，所述图案形成装置构造成根据期望的图案对投影光束进行图案化。 该装置具有构造成保持基板的基板台，配置成将图案化的光束投影到基板的目标部分上的投影系统。 该设备还具有净化气体供应系统，其构造成在光刻投影设备的部件的表面附近提供净化气体。 净化气体供应系统包括净化气体混合物发生器，其被配置为产生包括至少一个净化气体和水分的净化气体混合物。 净化气体混合物发生器具有保湿剂，其被配置为将湿气添加到净化气体中，以及净化气体混合物出口，其连接到净化气体混合物发生器，其构造成在表面附近提供净化气体混合物。
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公开(公告)号：US06391090B1
公开(公告)日：2002-05-21
申请号：US09824382
申请日：2001-04-02
IPC分类号： B01D5304
CPC分类号： G03F7/70883 , B01D53/02 , B01D53/04 , B01D53/261 , B01D53/508 , B01D53/565 , B01D53/72 , B01D2253/108 , B01D2256/10 , B01D2256/18 , B01D2257/206 , B01D2257/306 , B01D2257/70 , B01D2257/702 , B01D2257/80 , B01J20/02 , B01J20/0207 , B01J20/0211 , B01J20/0214 , B01J20/0225 , B01J20/0229 , B01J20/0237 , B01J20/0244 , B01J20/06 , B01J20/08 , B01J20/103 , B01J20/18 , B01J2220/42 , G03F7/70925 , G03F7/70933
摘要： A method and composition for the removal of contaminants in a gas stream used in the contamination sensitive processes of photolithography and metrology are described. The synergistic effect of a combination of an electropositive metal component, a high silica zeolite, and a late transition metal compound effects removal or reduction of the contaminates in the gas which interfere with light transmittance to the ppb or ppt levels necessary for the gas to be suitable for these uses. The removal of neutral polar molecules, neutral polar aprotic molecules, protic and aprotic alkaline molecules, acidic polar species, and neutral non-polar aprotic molecules is accomplished with the claimed composition. Depending on the type of contaminant, the composition components are each varied from 10 to 80 parts by volume, with the total composition limited to 100 parts by volume.
摘要翻译： 描述了用于去除光刻和计量的污染敏感过程中气流中污染物的方法和组合物。 正电性金属组分，高二氧化硅沸石和后期过渡金属化合物的组合的协同效应影响气体中污染物的去除或还原，其干扰对于气体所需的ppb或ppt水平的透光率 适合这些用途。 中性极性分子，中性极性非质子分子，质子和非质子碱性分子，酸性极性物质和中性非极性非质子分子的去除是用要求保护的组合物完成的。 取决于污染物的类型，组合物组分各自为10至80体积份，总组合物限制为100体积份。
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