公开(公告)号：US06891204B2

公开(公告)日：2005-05-10

申请号：US09816927

申请日：2001-03-23

申请人： Heinrich Brunner ,  Franz Auerbach ,  Jenoe Tihanyi

发明人： Heinrich Brunner ,  Franz Auerbach ,  Jenoe Tihanyi

IPC分类号： H01L29/744 ,  H01L29/06 ,  H01L29/78 ,  H01L29/32 ,  H01L29/423

CPC分类号： H01L29/7811 ,  H01L29/0619 ,  H01L29/0623 ,  H01L29/0634 ,  H01L29/7802

摘要： A semiconductor element has a semiconductor body of a first conductivity type. The semiconductor body has a zone of a second conductivity type embedded. Further regions of the second conductivity type surround the zone of the second conductivity type like a well. The further regions are interrupted in at least one location by a channel that is formed by the semiconductor body. The further regions are doped with a doping concentration that is high enough so that the further regions are not completely depleted of charge carriers when the semiconductor element is revere-biased.

摘要翻译： 半导体元件具有第一导电类型的半导体本体。 半导体本体具有嵌入第二导电类型的区域。 第二导电类型的其他区域像井一样围绕第二导电类型的区域。 另外的区域通过由半导体本体形成的沟道在至少一个位置处中断。 另外的区域掺杂了足够高的掺杂浓度，使得当半导体元件被重新偏置时，其他区域不会完全耗尽电荷载流子。

公开(公告)号：US20050082591A1

公开(公告)日：2005-04-21

申请号：US10927948

申请日：2004-08-27

申请人： Franz Hirler ,  Ralf Henninger ,  Frank Pfirsch ,  Markus Zundel ,  Jenoe Tihanyi

发明人： Franz Hirler ,  Ralf Henninger ,  Frank Pfirsch ,  Markus Zundel ,  Jenoe Tihanyi

IPC分类号： H01L29/06 ,  H01L29/40 ,  H01L29/739 ,  H01L29/78 ,  H01L29/861

CPC分类号： H01L29/7802 ,  H01L29/0619 ,  H01L29/402 ,  H01L29/407 ,  H01L29/7813 ,  H01L29/861

摘要： The invention relates to a method for fabricating a drift zone of a vertical semiconductor component and to a vertical semiconductor component having the following features: a semiconductor body (100) having a first side (101) and a second side (102), a drift zone (30) of a first conduction type which is arranged in the region between the first and the second sides (101, 102) and is formed for the purpose of taking up a reverse voltage, a field electrode arrangement arranged in the drift zone (30) and having at least one electrically conducted field electrode (40; 40A-40E; 90A-90J) arranged in a manner insulated from the semiconductor body (100), an electrical potential of the at least one field electrode (40; 40A-40E; 90A-90J) varying in the vertical direction of the semiconductor body (100) at least when a reverse voltage is applied.

摘要翻译： 本发明涉及一种用于制造垂直半导体部件和具有以下特征的垂直半导体部件的漂移区的方法：具有第一侧（101）和第二侧（102）的半导体本体（100），漂移 第一导电类型的区域（30）布置在第一和第二侧面（101,102）之间的区域中并且被形成为用于吸收反向电压的目的，设置在漂移区域中的场电极布置（ 30），并且具有以与半导体本体（100）绝缘的方式布置的至少一个导电场电极（40; 40A-40E; 90A-90J），所述至少一个场电极 40; 40A-40E; 90A-90J），至少在施加反向电压时，在半导体本体（100）的垂直方向上变化。

公开(公告)号：US06717788B2

公开(公告)日：2004-04-06

申请号：US09784766

申请日：2001-02-15

申请人： Peter Sommer ,  Jenoe Tihanyi

发明人： Peter Sommer ,  Jenoe Tihanyi

IPC分类号： H02H504

CPC分类号： H03K17/18 ,  H01L27/0248 ,  H01L2924/0002 ,  H03K17/0822 ,  H03K2017/0806 ,  H01L2924/00

摘要： A temperature-protected semiconductor circuit configuration that has an integrated switching unit. The switching unit is formed of a semiconductor switch, a first integrated temperature sensor for driving the semiconductor switch when an over-temperature is reached, first and second connecting terminals for connecting a load, and a control terminal for applying a drive signal for the semiconductor switch. A second temperature sensor is connected in a heat-conducting manner to the switching unit which exhibits at least one output terminal for providing a temperature-dependent temperature signal.

摘要翻译： 具有集成开关单元的温度保护半导体电路配置。 开关单元由半导体开关构成，当达到过温时用于驱动半导体开关的第一集成温度传感器，用于连接负载的第一和第二连接端子以及用于施加用于半导体的驱动信号的控制端子 开关。 第二温度传感器以导热方式连接到具有至少一个输出端子的开关单元，用于提供与温度相关的温度信号。

公开(公告)号：US06693314B2

公开(公告)日：2004-02-17

申请号：US09888037

申请日：2001-06-22

申请人： Heinz Mitlehner ,  Dietrich Stephani ,  Jenoe Tihanyi

发明人： Heinz Mitlehner ,  Dietrich Stephani ,  Jenoe Tihanyi

IPC分类号： H01L2980

CPC分类号： H01L29/8083

摘要： A junction field-effect transistor containing a semiconductor region with an inner region is described. In addition, a first and a second connecting region, respectively, are disposed within the semiconductor region. The first connecting region has the same conductivity type as the inner region, but in a higher doping concentration. The second connecting region has the opposite conductivity type to that of the inner region. This reduces the forward resistance while at the same time maintaining a high reverse voltage strength.

摘要翻译： 描述了包含具有内部区域的半导体区域的结型场效应晶体管。 此外，第一和第二连接区域分别设置在半导体区域内。 第一连接区域具有与内部区域相同的导电类型，但是掺杂浓度较高。 第二连接区域具有与内部区域相反的导电类型。 这降低了正向电阻，同时保持了高的反向电压强度。

公开(公告)号：US06479876B1

公开(公告)日：2002-11-12

申请号：US09462759

申请日：2000-10-12

申请人： Gerald Deboy ,  Jenoe Tihanyi

发明人： Gerald Deboy ,  Jenoe Tihanyi

IPC分类号： H01L2976

CPC分类号： H01L29/7802 ,  H01L29/0634 ,  H01L29/167 ,  H01L29/32

摘要： The invention relates to a vertical power MOSFET having additional column-like zones (11, 12) which are arranged in an inner zone (1) and have the same and the opposite conductivity type as/to the inner zone (1). The charge carrier life is reduced in the additional zones (12), which are of the same conductivity type as the inner zone (1), and the inner zone (1) is dimensioned such that the space charge zone does not reach the junction between the inner zone and a drain zone.

摘要翻译： 本发明涉及具有附加的柱状区域（11,12）的垂直功率MOSFET，其布置在内部区域（1）中并且具有与内部区域（1）相同的导电类型。 在与内部区域（1）具有相同导电类型的附加区域（12）中减少电荷载体寿命，并且内部区域（1）的尺寸被设计成使得空间电荷区域不会到达 内部区域和排水区域。

公开(公告)号：US06365919B1

公开(公告)日：2002-04-02

申请号：US09530622

申请日：2000-07-11

申请人： Jenoe Tihanyi ,  Heinz Mitlehner ,  Wolfgang Bartsch

发明人： Jenoe Tihanyi ,  Heinz Mitlehner ,  Wolfgang Bartsch

IPC分类号： H01L310312

CPC分类号： H01L29/45 ,  H01L21/0485 ,  H01L29/0634 ,  H01L29/1608 ,  H01L29/41766 ,  H01L29/4232 ,  H01L29/4238 ,  H01L29/66068 ,  H01L29/7838

摘要： A lateral silicon carbide junction field effect transistor has p-conductive and n-conductive silicon carbide layers. The layers are provided in pairs in lateral direction in a silicon carbide body. Trenches for a source, a drain and a gate extend from a principal surface of the silicon carbide body and penetrate the layers. The source and drain trenches are filled with silicon carbide of one conductivity type, whereas the trench for the gate is filled with silicon carbide of a conductivity type that is different from the source and the drain.

摘要翻译： 横向碳化硅结场效应晶体管具有p导电和n导电碳化硅层。 这些层在碳化硅体中沿横向成对设置。 用于源极，漏极和栅极的沟槽从碳化硅本体的主表面延伸并穿透层。 源极和漏极沟槽填充有一种导电类型的碳化硅，而用于栅极的沟槽填充有不同于源极和漏极的导电类型的碳化硅。

公开(公告)号：US06326656B1

公开(公告)日：2001-12-04

申请号：US09511813

申请日：2000-02-24

申请人： Jenoe Tihanyi

发明人： Jenoe Tihanyi

IPC分类号： H01L2972

CPC分类号： H01L29/7816 ,  H01L29/0623 ,  H01L29/0634

摘要： A lateral high-voltage transistor has a semiconductor body made of a lightly doped semiconductor substrate of a first conductivity type and an epitaxial layer of a second conductivity type. The epitaxial layer is provided on the semiconductor substrate. The lateral high-voltage transistor has a drain electrode, a source electrode, a gate electrode and a semiconductor zone of the first conductivity type which is provided under the gate electrode and is embedded in the epitaxial layer. Between the source electrode and the drain electrode trenches are provided in lines and rows in the semiconductor layer. The walls of the trenches are highly doped with dopants of the first conductivity type.

摘要翻译： 横向高压晶体管具有由第一导电类型的轻掺杂半导体衬底和第二导电类型的外延层制成的半导体本体。 外延层设置在半导体衬底上。 横向高压晶体管具有漏极电极，源极电极，栅极电极和第一导电类型的半导体区域，其设置在栅电极下方并嵌入在外延层中。 在源电极和漏电极沟槽之间设置有半导体层中的行和列。 沟槽的壁被高掺杂有第一导电类型的掺杂剂。

公开(公告)号：US06184545B2

公开(公告)日：2001-02-06

申请号：US09152827

申请日：1998-09-14

申请人： Wolfgang Werner ,  Jenoe Tihanyi

发明人： Wolfgang Werner ,  Jenoe Tihanyi

IPC分类号： H01L2974

CPC分类号： H01L29/861 ,  H01L29/0619 ,  H01L29/0634 ,  H01L29/872

摘要： The semiconductor component, such as a Schottky diode with a low leakage current, has a metal-semiconductor junction between a first metal electrode and the semiconductor. The semiconductor, which is of a first conductivity type, has a defined drift path and a plurality of supplementary zones of a second conductivity type extending from the semiconductor surface into the drift path. A number of foreign atoms in the supplementary zones is substantially equal to a number of foreign atoms in intermediate zones surrounding the supplementary zones and the number of foreign atoms does not exceed a number corresponding to a breakdown charge of the semiconductor.

摘要翻译： 诸如具有低漏电流的肖特基二极管的半导体元件在第一金属电极和半导体之间具有金属 - 半导体结。 具有第一导电类型的半导体具有限定的漂移路径和从半导体表面延伸到漂移路径中的第二导电类型的多个补充区。 补充区域中的多个外来原子基本上等于在补充区域周围的中间区域中的多个外来原子，并且外来原子的数量不超过对应于半导体的击穿电荷的数量。

公开(公告)号：US5986441A

公开(公告)日：1999-11-16

申请号：US250869

申请日：1999-02-16

申请人： Adam-Istvan Koroncai ,  Jenoe Tihanyi

发明人： Adam-Istvan Koroncai ,  Jenoe Tihanyi

IPC分类号： G01R19/165 ,  G05F1/573

CPC分类号： G01R19/16519

摘要： The circuit configuration captures the load current of a field effect-controllable power semiconductor component. The drain and gate terminals of a further field effect-controllable semiconductor component are connected to the drain and gate terminals, respectively, of the first semiconductor component. A fraction of the load current flows through the further semiconductor component. The load current of the further semiconductor component is set as a function of the drain-to-source voltage of the two semiconductor components. The load current flowing through the further semiconductor component is compared with a reference current and an output signal is generated if the load current falls below a set value.

摘要翻译： 电路配置捕获场效应可控功率半导体元件的负载电流。 另外的场效应可控半导体元件的漏极和栅极端子分别连接到第一半导体部件的漏极和栅极端子。 一部分负载电流流过另外的半导体元件。 另外的半导体部件的负载电流被设定为两个半导体部件的漏极 - 源极电压的函数。 将流过另外的半导体部件的负载电流与参考电流进行比较，并且如果负载电流低于设定值，则产生输出信号。

公开(公告)号：US5923066A

公开(公告)日：1999-07-13

申请号：US940473

申请日：1997-09-30

申请人： Jenoe Tihanyi

发明人： Jenoe Tihanyi

IPC分类号： H01L29/10 ,  H01L29/739 ,  H01L29/78 ,  H01L29/87

CPC分类号： H01L29/1095 ,  H01L29/7391 ,  H01L29/7397

摘要： A field-effect-controllable semiconductor component includes a semiconductor body with first and second surfaces. An inner zone of a first conduction type adjoins the first surface. An anode zone of the opposite, second conduction type adjoins the inner zone in the direction of the first surface and adjoins the second surface in the opposite direction. At least one first base zone of the second conduction type is embedded in the first surface. At least one source zone of the first conduction type is embedded in the first surface. At least one source electrode makes contact with the base zones and the source zones. At least one gate electrode is insulated from the semiconductor body and the source electrode by a gate oxide and at least partly covers parts of the first base zones appearing at the first surface. Intermediate cell zones contain the source zones. Trenches enclose the intermediate cell zones and are insulated from the intermediate cell zones by a gate oxide. Gate electrode pins in the trenches are connected to the gate electrode running on the first surface.

摘要翻译： 场效应可控半导体部件包括具有第一和第二表面的半导体本体。 第一导电类型的内部区域与第一表面相邻。 相对的第二导电类型的阳极区域在第一表面的方向上与内部区域相邻，并且在相反方向上与第二表面相邻。 第二导电类型的至少一个第一基区被嵌入在第一表面中。 第一导电类型的至少一个源极区被嵌入在第一表面中。 至少一个源极与基极区和源极区接触。 至少一个栅电极通过栅极氧化物与半导体本体和源电极绝缘，并且至少部分地覆盖出现在第一表面处的第一基区的部分。 中间单元区域包含源区域。 沟槽包围中间细胞区域，并通过栅极氧化物与中间细胞区域绝缘。 沟槽中的栅电极引脚连接到在第一表面上运行的栅电极。