摘要:
A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.
摘要:
A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.
摘要:
A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.
摘要:
An apparatus for displacing an anchor pre-tensioner for a seat belt may include the anchor pre-tensioner which is installed on a lower portion of a center pillar of a vehicle body, and to which a wire is coupled at an angle with the wire exposed above the vehicle body; and a trim guide which is installed on the vehicle body, and which has a guide hole in the middle thereof so as to allow the wire to be fitted into and guided in the guide hole, and a stopper formed at one end of the guide hole so as to allow the wire to be caught in the stopper when the wire is tilted in a backward direction of the vehicle body.
摘要:
Disclosed herein is a method for detecting DNA using a nanopore including treating the surface of a nanopore formed in a solid substrate with a substance carrying positive charges; introducing a DNA-containing sample into the surface-treated nanopore; and detecting electrical signals generated during translocation of the sample through the nanopore. Also disclosed herein is device for detecting DNA using a nanopore including a solid substrate including a nanopore, treated with a substance which carries positive charges to change a surface property of the nanopore so that the nanopore surface carries positive charges; an electrode applying voltage to the nanopore of the solid substrate; and a measurement unit measuring an electrical signal generated during translocation of a DNA-containing sample through the nanopore.
摘要:
A CMOS image sensor is disclosed, to improve light-condensing efficiency by forming a minute lens array having a large curvature (long focal distance) for the increase in height of upper structures above a photodiode, which includes a lower layer formed of the photodiode, metal circuits, and insulating interlayers for insulating the metal circuits from one another; a color filter array of R, G and B formed on the lower layer; an overcoat layer formed on the color filter array; a micro-lens formed on the overcoat layer; and the minute lens array having minute lenses formed between the lower layer and the color filter array, each minute lens having a larger curvature than that of the micro-lens.