METHOD OF GAP-FILLING USING AMPLITUDE MODULATION RADIOFREQUENCY POWER AND APPARATUS FOR THE SAME
    1.
    发明申请
    METHOD OF GAP-FILLING USING AMPLITUDE MODULATION RADIOFREQUENCY POWER AND APPARATUS FOR THE SAME 有权
    使用振幅调制无线电功率的空隙填充方法及其设备

    公开(公告)号:US20100031886A1

    公开(公告)日:2010-02-11

    申请号:US12558559

    申请日:2009-09-13

    IPC分类号: C23C16/513

    摘要: A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.

    摘要翻译: 在衬底上填充间隙的方法包括将其上形成有间隙的衬底设置在腔室中的基座上; 向腔室施加源功率以产生等离子体进入腔室; 将工艺气体供应到所述室中; 通过向所述基座施加第一偏置功率来将薄膜填充到间隙中,所述第一偏置功率的幅度被周期性地调制; 停止处理气体的供给并切断第一偏压功率; 并熄灭腔室中的等离子体。

    METHOD OF GAP-FILLING USING AMPLITUDE MODULATION RADIOFREQUENCY POWER AND APPARATUS FOR THE SAME
    2.
    发明申请
    METHOD OF GAP-FILLING USING AMPLITUDE MODULATION RADIOFREQUENCY POWER AND APPARATUS FOR THE SAME 有权
    使用振幅调制无线电功率的空隙填充方法及其设备

    公开(公告)号:US20070264791A1

    公开(公告)日:2007-11-15

    申请号:US11746566

    申请日:2007-05-09

    IPC分类号: H01L21/76

    摘要: A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.

    摘要翻译: 在衬底上填充间隙的方法包括将其上形成有间隙的衬底设置在腔室中的基座上; 向腔室施加源功率以产生等离子体进入腔室; 将工艺气体供应到所述室中; 通过向所述基座施加第一偏置功率来将薄膜填充到间隙中,所述第一偏置功率的幅度被周期性地调制; 停止处理气体的供给并切断第一偏压功率; 并熄灭腔室中的等离子体。

    Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same
    3.
    发明授权
    Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same 有权
    使用调幅射频电源的间隙填充方法及其设备

    公开(公告)号:US08039406B2

    公开(公告)日:2011-10-18

    申请号:US12558559

    申请日:2009-09-13

    IPC分类号: C23C16/505 H01L21/42

    摘要: A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.

    摘要翻译: 在衬底上填充间隙的方法包括将其上形成有间隙的衬底设置在腔室中的基座上; 向腔室施加源功率以产生等离子体进入腔室; 将工艺气体供应到所述室中; 通过向所述基座施加第一偏置功率来将薄膜填充到间隙中,所述第一偏置功率的幅度被周期性地调制; 停止处理气体的供给并切断第一偏压功率; 并熄灭腔室中的等离子体。

    Apparatus for displacing anchor pre-tensioner for seat belt
    4.
    发明授权
    Apparatus for displacing anchor pre-tensioner for seat belt 有权
    用于移动安全带的锚定预张紧器的装置

    公开(公告)号:US08523230B2

    公开(公告)日:2013-09-03

    申请号:US13540344

    申请日:2012-07-02

    摘要: An apparatus for displacing an anchor pre-tensioner for a seat belt may include the anchor pre-tensioner which is installed on a lower portion of a center pillar of a vehicle body, and to which a wire is coupled at an angle with the wire exposed above the vehicle body; and a trim guide which is installed on the vehicle body, and which has a guide hole in the middle thereof so as to allow the wire to be fitted into and guided in the guide hole, and a stopper formed at one end of the guide hole so as to allow the wire to be caught in the stopper when the wire is tilted in a backward direction of the vehicle body.

    摘要翻译: 用于移动用于座椅安全带的锚定预张紧器的装置可以包括安装在车身的中心柱的下部上的锚定预张紧器,并且线与导线暴露成一定角度 车身上方; 以及安装在车身上的装饰引导件,并且在其中部具有引导孔,以允许电线装配并引导到引导孔中;以及止动件,其形成在引导孔的一端 以便当线沿着车身的后退方向倾斜时允许线卡在止动器中。

    METHOD AND DEVICE FOR DETECTING DNA USING SURFACE-TREATED NANOPORE
    5.
    发明申请
    METHOD AND DEVICE FOR DETECTING DNA USING SURFACE-TREATED NANOPORE 审中-公开
    用于使用表面处理的纳米层检测DNA的方法和装置

    公开(公告)号:US20070218471A1

    公开(公告)日:2007-09-20

    申请号:US11550099

    申请日:2006-10-17

    IPC分类号: C12Q1/68 C12M3/00

    摘要: Disclosed herein is a method for detecting DNA using a nanopore including treating the surface of a nanopore formed in a solid substrate with a substance carrying positive charges; introducing a DNA-containing sample into the surface-treated nanopore; and detecting electrical signals generated during translocation of the sample through the nanopore. Also disclosed herein is device for detecting DNA using a nanopore including a solid substrate including a nanopore, treated with a substance which carries positive charges to change a surface property of the nanopore so that the nanopore surface carries positive charges; an electrode applying voltage to the nanopore of the solid substrate; and a measurement unit measuring an electrical signal generated during translocation of a DNA-containing sample through the nanopore.

    摘要翻译: 本文公开了一种使用纳米孔检测DNA的方法,包括用携带正电荷的物质处理在固体基质中形成的纳米孔的表面; 将含DNA样品引入表面处理的纳米孔中; 并检测通过纳米孔在样品易位期间产生的电信号。 本文还公开了使用纳米孔检测DNA的装置,所述纳米孔包括包含纳米孔的固体基质,用携带正电荷的物质处理以改变纳米孔的表面性质,使得纳米孔表面带有正电荷; 电极向固体基底的纳米孔施加电压; 以及测量单元,其测量通过纳米孔在含DNA样品的易位期间产生的电信号。

    CMOS image sensor
    6.
    发明授权
    CMOS image sensor 有权
    CMOS图像传感器

    公开(公告)号:US07262448B2

    公开(公告)日:2007-08-28

    申请号:US11020526

    申请日:2004-12-27

    申请人: Young Rok Kim

    发明人: Young Rok Kim

    IPC分类号: H01L31/062 H01L31/113

    摘要: A CMOS image sensor is disclosed, to improve light-condensing efficiency by forming a minute lens array having a large curvature (long focal distance) for the increase in height of upper structures above a photodiode, which includes a lower layer formed of the photodiode, metal circuits, and insulating interlayers for insulating the metal circuits from one another; a color filter array of R, G and B formed on the lower layer; an overcoat layer formed on the color filter array; a micro-lens formed on the overcoat layer; and the minute lens array having minute lenses formed between the lower layer and the color filter array, each minute lens having a larger curvature than that of the micro-lens.

    摘要翻译: 公开了一种CMOS图像传感器,以通过形成具有大的曲率(长焦距)的微透镜阵列来提高聚光效率,以便在包括由光电二极管形成的下层的光电二极管之上的上部结构的高度增加, 金属电路和用于使金属电路彼此绝缘的绝缘夹层; 形成在下层上的R,G和B的滤色器阵列; 形成在滤色器阵列上的外涂层; 形成在外涂层上的微透镜; 并且具有形成在下层和滤色器阵列之间的微小透镜的微透镜阵列,每个微透镜具有比微透镜更大的曲率。