公开(公告)号：US07103484B1

公开(公告)日：2006-09-05

申请号：US10698222

申请日：2003-10-31

申请人： Jianou Shi ,  Steve Yifeng Cui ,  Shiyou Pei ,  Zhiwei (Steve) Xu ,  Haiyong (Howard) Wang

发明人： Jianou Shi ,  Steve Yifeng Cui ,  Shiyou Pei ,  Zhiwei (Steve) Xu ,  Haiyong (Howard) Wang

IPC分类号： G01R15/00 ,  G01R31/26

CPC分类号： G01N27/205 ,  G01R31/305 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

摘要： Non-contact methods for determining a parameter of an insulating film are provided. One method includes measuring at least two surface voltages of the insulating film. The surface voltages are measured after different charge depositions. Measuring the surface voltages is performed in two or more sequences. The method also includes determining individual parameters for the two or more sequences from the surface voltages and the charge depositions. In addition, the method includes determining the parameter of the insulating film as an average of the individual parameters. The parameter is substantially independent of leakage in the insulating film. Another method includes determining a characteristic of nitrogen in an insulating film using two parameters of the insulating film selected from equivalent oxide thickness, optical thickness, and a measure of leakage through the insulating film. The characteristic may be a nitrogen dose, a nitrogen percentage, or a presence of nitrogen in the insulating film.

摘要翻译： 提供了用于确定绝缘膜的参数的非接触方法。 一种方法包括测量绝缘膜的至少两个表面电压。 在不同的电荷沉积之后测量表面电压。 以两个或更多个顺序进行表面电压的测量。 该方法还包括从表面电压和电荷沉积确定两个或多个序列的各个参数。 此外，该方法包括将绝缘膜的参数确定为各个参数的平均值。 该参数基本上与绝缘膜中的泄漏无关。 另一种方法包括使用选自等效氧化物厚度，光学厚度和通过绝缘膜的泄漏的测量的绝缘膜的两个参数来确定绝缘膜中的氮的特性。 该特性可以是绝缘膜中的氮剂量，氮百分比或氮的存在。

公开(公告)号：US07728965B2

公开(公告)日：2010-06-01

申请号：US11145874

申请日：2005-06-06

申请人： Kurt Lindsay Haller ,  Steve Yifeng Cui ,  Jared Lera

发明人： Kurt Lindsay Haller ,  Steve Yifeng Cui ,  Jared Lera

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/9503 ,  G01N21/95623 ,  G01N2021/8822 ,  H01L22/12

摘要： Systems and methods for inspecting an edge of a specimen are provided. One system includes an illumination subsystem configured to direct light to the edge of the specimen at an oblique angle of incidence. The plane of incidence of the light is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The system also includes a detection subsystem configured to collect light scattered from the edge and to generate signals responsive to the scattered light. One method includes directing light to the edge of the specimen at an oblique angle of incidence. The plane of incidence is substantially perpendicular to a plane substantially tangent to the edge of the specimen. The method also includes collecting light scattered from the edge and generating signals responsive to the scattered light. The signals described above can be used to detect defects on the edge of the specimen.

摘要翻译： 提供了用于检查试样边缘的系统和方法。 一个系统包括照明子系统，其构造成以倾斜的入射角将光引导到样品的边缘。 光的入射面基本上垂直于基本上与试样边缘相切的平面。 该系统还包括检测子系统，该检测子系统被配置为收集从边缘散射的光并产生响应于散射光的信号。 一种方法包括以倾斜的入射角将光引导到样品的边缘。 入射平面基本上垂直于基本上与样品边缘相切的平面。 该方法还包括收集从边缘散射的光并产生响应于散射光的信号。 上述信号可用于检测样品边缘的缺陷。