摘要:
A DRAM cell of a stack structure having a cup-shaped polysilicon storage electrode for being applied to a 16 mega and 64 mega DRAM wherein a transfer transistor is firstly manufactured, a bit line is formed, an oxide film grid is formed between the cell and cell in the minimum design rule, and upon completing this, the polysilicon storage electrode is formed into a single or double cup shape, whereby the capacitor area is remarkably increased when compared with the conventional stacked structure DRAM cell so that the area efficiency is greatly increased and the process can be executed by such a mask number as the prior stacked structure mask layer number and the structure thereof is simple.
摘要:
The DRAM cell of the invention comprises a structure wherein a deep trench is formed on a silicon wafer, a stacked trench capacitor is formed around a silicon pillar associated with the trench, and a vertical transfer transistor is formed on top of the silicon pillar after the formation of the stacked trench capacitor. The transfer transistor is connected to the storage capacitor through a selectively doped n.sup.+ diffused layer, and isolation between DRAM cells is formed by the trench.
摘要:
A method for manufacturing a DRAM cell is provided having an isolation merged trench for applying to 16 megabit and 64 megabit DRAM cells, which includes the steps forming a primary dielectric for a capacitor within the interior of a trench, depositing an n.sup.+ doped polysilicon, forming a secondary dielectric and then stacking polysilicon thereon and connecting the polysilicon within an n.sup.+ diffusion layer of the bottom of the trench for forming a plate. As a result of this method all of the capacitors disposed between the n.sup.+ polysilicon storing electrode and the n.sup.+ polysilicon plate as well as the polysilicon storing electrode and the n.sup.+ diffusion layer plate are utilized as a storing capacitor.
摘要:
The invention relates to a method of manufacturing a DRAM in which a storage capacitor is stacked vertically over a switching junction FET. There is provided a method comprising the steps of: (a) sequentially depositing a nitride layer and a first oxide layer on a substrate; (b) etching away the oxide and nitride layer by means of a trench mask so as to define field and active regions; (c) etching away the substrate of the field region up to a predetermined depth using the remaining oxide and nitride layers as a mask so as to form trench portion; (d) forming a first spacer at the edges of the trench portion; (e) further etching away the substrate of the field region up to a predetermined depth using the remaining oxide and nitride layers and the first spacer as a mask; (f) forming a second spacer at edges of the trench portion; (g) growing a device isolating field oxide layer of the field region after etching away the substrate of the field region; (h) depositing a polysilicon layer thereon after removal of the second spacer and implanting impurity into the substrate through the polysilicon layer so as to form a gate junction region; (i) etching away the polysilicon layer only on the field region so as to define a word line; (j) growing an insulating layer in the field region and removing the first oxide layer on the nitride layer; (k) flatting projected portions of the polysilicon layer and forming an oxide layer on the projected portion and the insulating layer so as to self-contact between storage node of the storage capacitor and drain of the junction FET; (I) depositing a patterned polysilicon layer for the storage node thereon and forming a capacitor dielectric layer around the patterned polysilicon layer; and (m) depositing a polysilicon layer for a plate electrode and defining a bit line by means of a bit line mask.
摘要:
A method for the removal of psoralens and psoralen degradation products is disclosed. The method of the present invention is useful for any biological fluid that has been treated with psoralens, including blood and blood fractions and components derived therefrom. Biological fluids treated according to the method of the present invention are substantially free from any residual psoralens or psoralen degradation products.
摘要:
Light arrays for use in systems for separating and irradiating blood are disclosed. In accordance with the present invention, the light array has one or more bulbs with electrical connecting leads and first and second support members connected to the bulbs. The second support member preferably includes a connector for receiving the electrical leads. The support members preferably define an end surface and an interior surface, wherein the support members are disposed adjacent the bulbs so the end surfaces are opposed to define a channel, providing a space where tubing carrying blood or other fluids can be disposed without interfering with the array. The bulbs are most preferably attached to the support members using flexible self-locking straps, and in embodiments using two or more bulbs, the bulbs are also preferably held together by one or more straps. Improved mounting systems for connecting the array to the instrument by one or more spring mounts are also disclosed. In certain preferred embodiments, one of the support members is a circuit board and includes a microcircuit for controlling the operation of the array using a clock/timer circuit for determining a total time of activation for the array, whereby upon reaching a predetermined value of the total time of activation, the clock/timer circuit disables the light array. Thus, methods of controlling the output of an array of bulbs are also disclosed.
摘要:
A carpet cleaner device and method having feed and dispensing lines for applying and removing cleaning solutions from carpets, upholstery, floors and similar surfaces is disclosed. Connections to these lines, and also connections for electric power are mounted on a tray which is supported within the device during use. The tray may be pulled out from the device to expose the lines and connections for ready access during servicing, and/or repair.
摘要:
A multicomponent fluid separation and irradiation system is described containing a centrifuge drum and a source of radiant energy located within the drum. In a first embodiment a disposable rigid separation/irradiation chamber is provided with a cylindrical outer compartment located within the drum and opposing the radiant energy source. Whole blood is supplied to the chamber through a dynamic seal located at the center of the chamber. As the chamber is rotated, blood is separated so that energy from the source passes through the inner wall of the chamber and the separated plasma layer to irradiate the buffy coat layer. In a second embodiment, one or both of the walls of the outer compartment of the chamber are flexible so that the chamber will expand as blood is pumped in and will collapse as blood is pumped out.