Abstract:
A semiconductor memory device and a method of manufacturing the same. The semiconductor memory device includes a first conductive type well and a second conductive type well disposed on and/or over a semiconductor substrate; a first gate and a second gate disposed on and/or over the first conductive type well and the second conductive type well, respectively; a second conductive type first ion implantation region disposed in the first conductive type well at one side of the first gate and a second conductive type second ion implantation region disposed in the first conductive type well at the other side of the first gate; a first conductive type first ion implantation region disposed in the second conductive type well at one side of the second gate and a first conductive type second ion implantation region disposed in the second conductive type well at the other side of the second gate; and a line electrically connecting the second conductive type second ion implantation region with the first conductive type first ion implantation region.
Abstract:
Provided are a SONGS type nonvolatile or flash memory device and related programming/erasing methods. The device has a deep well region of a first conductive type that isolates a well region of a second conductive type from a substrate to enhance programming and erasing operation characteristics. In the erasing method, first electrons are erased by one of Hot Hole Injection (e.g., gate-to-drain Hot Hole Injection) or tunneling in a first step, and second electrons that are not erased in the first step are erased by the other of tunneling (e.g., gate-to-body tunneling) or HHI in a second step. Preferably, a time gap intervenes between the first and second steps.
Abstract:
Flash memory and methods of fabricating the same are disclosed. An illustrated example flash memory includes a first source formed within a semiconductor substrate; an epitaxial layer formed on an upper surface of the semiconductor substrate; an opening formed within the epitaxial layer to expose the first source; a floating gate device formed inside the opening; and a select gate device formed on the epitaxial layer at a distance from the floating gate device.
Abstract:
A non-volatile memory device and drive method thereof uses a voltage bias condition to enable an electronic device to normally operate without employing a specific transistor, e.g., a recall transistor. The non-volatile memory device performs its function normally without the recall transistor, and by which a degree of cell integration can be considerably raised. A SRAM latch is controlled by the logic circuit, a SONOS (silicon-oxide-nitride-oxide-silicon) transistor is electrically connected to a Vcc node of the electronic device to store a high/low state of the SRAM latch according to a turn-on or turn-off state of power, and a pass transistor controls read, program, and erase operations of the SONOS transistor.
Abstract:
Flash memory and methods of fabricating the same are disclosed. An illustrated example flash memory includes a first source formed within a semiconductor substrate; an epitaxial layer formed on an upper surface of the semiconductor substrate; an opening formed within the epitaxial layer to expose the first source; a floating gate device formed inside the opening; and a select gate device formed on the epitaxial layer at a distance from the floating gate device.
Abstract:
The method of forming a floating gate array of a flash memory device includes: (a) forming a plurality of device isolations, which define active device regions, in a semiconductor substrate, the device isolations being formed such that upper portions thereof protrude from a surface of the substrate by a predetermined height; (b) forming tunnel oxide layers in the active device regions; (c) forming a floating gate-forming layer throughout an entire region of the substrate, including regions in which the plurality of device isolations and the active device regions are formed, the floating gate-forming layer being formed such that grooves are formed along the active device regions; (d) filling the grooves formed on the floating gate-forming layer with masking materials; and (e) patterning the floating gate-forming layer, using the masking materials filling the grooves as an etching mask.
Abstract:
A non-volatile memory device and a method for driving the same prevent an excessive electron erasing phenomenon without additional components. Each memory cell includes a tunnel oxide layer, a floating gate, a control gate connected to a word line, first and second oxide layers formed between the floating gate and the control gate, and first and second impurity diffusion layers formed in a semiconductor substrate at both sides of the floating gate and connected to a common line and a bit line.
Abstract:
A method for fabricating a flash memory includes forming a tunnel oxide layer by depositing a material with a conduction band energy level lower than that of SiO2 on a semiconductor substrate; forming a floating gate by depositing polysilicon on the tunnel oxide layer; forming an intergate dielectric layer on the floating gate; forming a control gate on the intergate dielectric layer; forming a gate electrode by patterning the tunnel oxide layer, the floating gate, the intergate dielectric layer and the control gate; and forming a source/drain region by implanting impurities into the substrate using the gate electrode as a mask.
Abstract:
A semiconductor memory device and a method of manufacturing the same. The semiconductor memory device includes a first conductive type well and a second conductive type well disposed on and/or over a semiconductor substrate; a first gate and a second gate disposed on and/or over the first conductive type well and the second conductive type well, respectively; a second conductive type first ion implantation region disposed in the first conductive type well at one side of the first gate and a second conductive type second ion implantation region disposed in the first conductive type well at the other side of the first gate; a first conductive type first ion implantation region disposed in the second conductive type well at one side of the second gate and a first conductive type second ion implantation region disposed in the second conductive type well at the other side of the second gate; and a line electrically connecting the second conductive type second ion implantation region with the first conductive type first ion implantation region.
Abstract:
The method of forming a floating gate array of a flash memory device includes: (a) forming a plurality of device isolations, which define active device regions, in a semiconductor substrate, the device isolations being formed such that upper portions thereof protrude from a surface of the substrate by a predetermined height; (b) forming tunnel oxide layers in the active device regions; (c) forming a floating gate-forming layer throughout an entire region of the substrate, including regions in which the plurality of device isolations and the active device regions are formed, the floating gate-forming layer being formed such that grooves are formed along the active device regions; (d) filling the grooves formed on the floating gate-forming layer with masking materials; and (e) patterning the floating gate-forming layer, using the masking materials filling the grooves as an etching mask.