公开(公告)号：US20140117475A1

公开(公告)日：2014-05-01

申请号：US14059202

申请日：2013-10-21

申请人： Johannes CLASSEN ,  Axel FRANKE ,  Jens FREY ,  Heribert WEBER ,  Frank FISCHER ,  Patrick WELLNER ,  Mirko HATTASS ,  Daniel Christoph MEISEL

发明人： Johannes CLASSEN ,  Axel FRANKE ,  Jens FREY ,  Heribert WEBER ,  Frank FISCHER ,  Patrick WELLNER ,  Mirko HATTASS ,  Daniel Christoph MEISEL

IPC分类号： B81B7/00

CPC分类号： B81C1/00246 ,  B81C1/0023 ,  B81C2203/075 ,  B81C2203/0771 ,  H01L2224/48463

摘要： A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.

摘要翻译： 元件具有至少一个MEMS元件和至少一个由半导体材料制成的盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。

公开(公告)号：US20130333469A1

公开(公告)日：2013-12-19

申请号：US13918556

申请日：2013-06-14

申请人： Johannes CLASSEN ,  Christoph GAUGER ,  Patrick WELLNER

发明人： Johannes CLASSEN ,  Christoph GAUGER ,  Patrick WELLNER

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal.

摘要翻译： 一种用于操作和/或测量微机械装置的方法。 该装置具有第一和第二震动块，它们通过相对于基底振动而移动; 第一驱动装置，用于偏转第一抗震块;以及第二驱动装置，用于使第二抗震块平行于第一取向的驱动方向; 第三驱动装置，用于偏转所述第一抗震块;以及第四驱动装置，用于使所述第二抗震块平行于所述驱动方向并且根据与所述第一方向相反的第二方位偏转; 第一检测装置，用于检测第一抗震块的驱动运动; 以及用于检测第二地震块的驱动运动的第二检测装置。 第一和第二检测信号由第一和第二检测装置产生，第一检测信号与第二检测信号分开评估。

公开(公告)号：US20130176825A1

公开(公告)日：2013-07-11

申请号：US13729709

申请日：2012-12-28

申请人： Markus HEITZ ,  Christoph GAUGER ,  Sebastian GRACKI ,  Patrick WELLNER

发明人： Markus HEITZ ,  Christoph GAUGER ,  Sebastian GRACKI ,  Patrick WELLNER

IPC分类号： G01V1/18

CPC分类号： G01V1/18 ,  G01C19/5747

摘要： A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass.

摘要翻译： 传感器结构包括具有主延伸平面的基板，第一地震块和第二地震块，第一和第二地震块相对于基板沿着基本上垂直于主延伸平面的偏转方向可偏转。 第一和第二地震块通过刚性耦合摇杆联接在一起，所述刚性联轴器可围绕平行于主延伸平面的摇臂轴线枢转。 借助于第一悬架弹簧，第一抗震块从衬底悬挂，并且基本上刚性的第一联接杆位于第一悬架弹簧和第一抗震块之间。